SG11201706916VA - Adjustable magnetic buoyancy gravity compensator - Google Patents

Adjustable magnetic buoyancy gravity compensator

Info

Publication number
SG11201706916VA
SG11201706916VA SG11201706916VA SG11201706916VA SG11201706916VA SG 11201706916V A SG11201706916V A SG 11201706916VA SG 11201706916V A SG11201706916V A SG 11201706916VA SG 11201706916V A SG11201706916V A SG 11201706916VA SG 11201706916V A SG11201706916V A SG 11201706916VA
Authority
SG
Singapore
Prior art keywords
adjustable magnetic
gravity compensator
magnetic buoyancy
buoyancy gravity
compensator
Prior art date
Application number
SG11201706916VA
Inventor
Hanchuan Ji
Qingsheng Chen
Original Assignee
Shanghai Micro Electronics Equipment (Group) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment (Group) Co Ltd filed Critical Shanghai Micro Electronics Equipment (Group) Co Ltd
Publication of SG11201706916VA publication Critical patent/SG11201706916VA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
  • Toys (AREA)
SG11201706916VA 2015-02-28 2016-02-24 Adjustable magnetic buoyancy gravity compensator SG11201706916VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201510091980.5A CN105988304B (en) 2015-02-28 2015-02-28 A kind of adjustable magnetic buoyancy gravity compensator
PCT/CN2016/074395 WO2016134652A1 (en) 2015-02-28 2016-02-24 Adjustable magnetic buoyancy gravity compensator

Publications (1)

Publication Number Publication Date
SG11201706916VA true SG11201706916VA (en) 2017-09-28

Family

ID=56787872

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201706916VA SG11201706916VA (en) 2015-02-28 2016-02-24 Adjustable magnetic buoyancy gravity compensator

Country Status (8)

Country Link
US (1) US10415639B2 (en)
EP (1) EP3264177B1 (en)
JP (1) JP6475356B2 (en)
KR (1) KR102012782B1 (en)
CN (1) CN105988304B (en)
SG (1) SG11201706916VA (en)
TW (1) TWI591449B (en)
WO (1) WO2016134652A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107885039B (en) * 2016-09-30 2019-07-23 上海微电子装备（集团）股份有限公司 Variable magnetic buoyancy, gravity compensator
AT520991B1 (en) * 2018-03-01 2023-05-15 Anton Paar Gmbh rheometer
CN108266457A (en) * 2018-03-16 2018-07-10 无锡源晟动力科技有限公司 Magnetic suspension bearing rotor bias magnet gravity-reducing device
DE102018207949A1 (en) * 2018-05-22 2019-05-29 Carl Zeiss Smt Gmbh Assembly in a microlithographic Projektionsbelichtungsanalge
EP3670958A1 (en) * 2018-12-21 2020-06-24 ASML Netherlands B.V. Positioning device, stiffness reduction device and electron beam apparatus
US11915863B2 (en) 2019-02-01 2024-02-27 Zaber Technologies Inc. Adjustable magnetic counterbalance
CN109888946A (en) * 2019-04-13 2019-06-14 山东科技大学 A kind of 24 phase simplex winding magnetic suspension switched reluctance motors
CN210819425U (en) * 2019-04-30 2020-06-23 上海隐冠半导体技术有限公司 Workbench and magnetic suspension gravity compensation device thereof
CN110587554A (en) * 2019-10-24 2019-12-20 上海隐冠半导体技术有限公司 Micro-motion platform and motion device with same
CN111313763B (en) * 2020-03-30 2022-08-05 重庆大学 Gravity compensator with low rigidity and large suspension force
CN111614226A (en) * 2020-06-24 2020-09-01 雅科贝思精密机电(南通)有限公司 Voice coil motor of variable-rigidity magnetic gravity compensator
CN112271053A (en) * 2020-10-22 2021-01-26 北京华卓精科科技股份有限公司 Gravity compensation device
CN112201611B (en) * 2020-12-01 2021-03-02 上海隐冠半导体技术有限公司 Magnetic suspension gravity compensation device and moving platform comprising same
CN113471112B (en) * 2021-07-16 2024-02-20 上海隐冠半导体技术有限公司 Magnetic levitation gravity compensation device and micro-motion stage
CN113745138B (en) * 2021-09-03 2024-03-22 上海隐冠半导体技术有限公司 Magnetic levitation device and micro-motion platform
CN115342158B (en) * 2022-08-01 2023-04-28 哈尔滨工业大学 Magnetic levitation gravity compensator with adjustable output and working method

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216308A (en) * 1989-05-25 1993-06-01 Avcon-Advanced Controls Technology, Inc. Magnetic bearing structure providing radial, axial and moment load bearing support for a rotatable shaft
CN1088719A (en) * 1992-12-25 1994-06-29 张居平 The sub-magnetic driving equipment of magnetically conducting differential (commentaries on classics)
JPH10521A (en) * 1996-06-07 1998-01-06 Nikon Corp Support device
TW526630B (en) 1998-11-10 2003-04-01 Asml Netherlands Bv Actuator and transducer
KR100403857B1 (en) 2000-01-05 2003-11-01 가부시기가이샤 산교세이기 세이사꾸쇼 Motor of magnetic lifting type
EP1321822A1 (en) * 2001-12-21 2003-06-25 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI265380B (en) * 2003-05-06 2006-11-01 Asml Netherlands Bv Lithographic projection apparatus
EP1524556A1 (en) * 2003-10-17 2005-04-20 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and positioning system
GB0414672D0 (en) * 2004-06-03 2004-08-04 Pii Ltd In-line pipe inspection tool
WO2006007167A2 (en) * 2004-06-17 2006-01-19 Nikon Corporation Magnetic levitation lithography apparatus and method
JP2006040927A (en) * 2004-07-22 2006-02-09 Nikon Corp Supporting apparatus, stage device, exposure device and method of manufacturing device
US7385679B2 (en) 2004-12-29 2008-06-10 Asml Netherlands B.V. Lithographic apparatus and actuator
TW200729673A (en) 2006-01-27 2007-08-01 Min-Fu Xie Synchronized motion control system for dual parallel linear motors
JP4814011B2 (en) * 2006-08-15 2011-11-09 日清フーズ株式会社 Pizza dough forming apparatus and pizza dough forming method using the forming apparatus
KR100950250B1 (en) * 2008-02-15 2010-03-31 주식회사 탑 엔지니어링 Apparatus for supporting chip for ejector
TW201108478A (en) * 2009-08-25 2011-03-01 Largan Precision Co Ltd Actuator
CN102200689B (en) 2010-03-23 2013-03-06 上海微电子装备有限公司 Hybrid maglev gravity compensation apparatus
CN101846131B (en) * 2010-06-10 2012-02-08 北京前沿科学研究所 Magnetic suspension bearing
JP6309765B2 (en) * 2010-12-20 2018-04-11 カール・ツァイス・エスエムティー・ゲーエムベーハー Arrangement for mounting optical elements
CN102722088B (en) * 2011-06-28 2014-06-18 清华大学 Non-contact coarse-fine motion layer positioning system and motion control method thereof
CN103034065B (en) * 2011-09-29 2014-12-17 上海微电子装备有限公司 Magnetic suspension gravity compensator and lithographic device
NL2009902A (en) * 2011-12-27 2013-07-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
DE102012202553A1 (en) * 2012-02-20 2013-08-22 Carl Zeiss Smt Gmbh LITHOGRAPHY DEVICE WITH DAMPING DEVICE
CN103293860B (en) 2012-02-22 2015-04-15 上海微电子装备有限公司 Magnet block fixing device and mounting method for magnet blocks in magnetic levitation gravity compensator
US9519230B2 (en) * 2012-07-18 2016-12-13 Asml Netherlands B.V. Magnetic device and lithographic apparatus
CN102866596B (en) 2012-09-26 2014-07-16 哈尔滨工业大学 Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe
BR112015004409A2 (en) * 2012-10-05 2017-07-04 Koninklijke Philips Nv rotary positioning device
CN102944980A (en) * 2012-11-02 2013-02-27 清华大学 Microchecker having permanent magnet gravity support structure
CN103048891B (en) 2012-12-19 2014-10-29 哈尔滨工业大学 Six-degree-of-freedom magnetic levitation micropositioner
JP5541398B1 (en) 2013-07-02 2014-07-09 日本精工株式会社 Table device and transfer device

Also Published As

Publication number Publication date
TWI591449B (en) 2017-07-11
US20180010633A1 (en) 2018-01-11
EP3264177B1 (en) 2020-02-19
WO2016134652A1 (en) 2016-09-01
JP6475356B2 (en) 2019-02-27
TW201643552A (en) 2016-12-16
US10415639B2 (en) 2019-09-17
EP3264177A1 (en) 2018-01-03
KR20170121252A (en) 2017-11-01
CN105988304B (en) 2018-10-16
CN105988304A (en) 2016-10-05
JP2018508040A (en) 2018-03-22
KR102012782B1 (en) 2019-08-21
EP3264177A4 (en) 2018-10-31

Similar Documents

Publication Publication Date Title
SG11201706916VA (en) Adjustable magnetic buoyancy gravity compensator
GB2541725B (en) Weights system
PL3162465T3 (en) Casting facility
IL235973A0 (en) Adjustable dumbbell
IL251948B (en) Buoyant structure
HUE049763T2 (en) Casting device
GB201511821D0 (en) Magnet
GB201507550D0 (en) Supercoducting magnet
TWM534015U (en) Kettlebell with adjustable weight
GB201719541D0 (en) Cell Lines
GB201611477D0 (en) Buoyancy
GB201511822D0 (en) Magnet
GB201522480D0 (en) Floating structure
GB201518745D0 (en) Buoyancy component
IL249609A0 (en) Size adjustable charger
GB201513490D0 (en) Foundation improvements
GB2534197B (en) Protective wall
GB2536654B (en) Underwater location
PT3093169T (en) Suspension mechanism
GB201615933D0 (en) Free weight
GB201609179D0 (en) Batterys
IL248752A0 (en) Snorkel
GB201604859D0 (en) Batterys
GB2542752B (en) Fishing weight
GB201509104D0 (en) Batterys