SG11201609910XA - Anti-backlash mechanism for motor-driven components in precision systems and applications - Google Patents

Anti-backlash mechanism for motor-driven components in precision systems and applications

Info

Publication number
SG11201609910XA
SG11201609910XA SG11201609910XA SG11201609910XA SG11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA
Authority
SG
Singapore
Prior art keywords
applications
motor
driven components
backlash mechanism
precision systems
Prior art date
Application number
SG11201609910XA
Other languages
English (en)
Inventor
James Cedrone
Iraj Gashgaee
George L Gonnella
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG11201609910XA publication Critical patent/SG11201609910XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/30—Retaining components in desired mutual position
    • F05B2260/301—Retaining bolts or nuts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/60—Fluid transfer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Transmission Devices (AREA)
SG11201609910XA 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications SG11201609910XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
PCT/US2015/032816 WO2015184056A1 (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Publications (1)

Publication Number Publication Date
SG11201609910XA true SG11201609910XA (en) 2016-12-29

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201810172QA SG10201810172QA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications
SG11201609910XA SG11201609910XA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201810172QA SG10201810172QA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Country Status (8)

Country Link
US (2) US20170114879A1 (ko)
EP (2) EP3149328B1 (ko)
JP (2) JP6543646B2 (ko)
KR (2) KR102141271B1 (ko)
CN (2) CN106662083B (ko)
SG (2) SG10201810172QA (ko)
TW (2) TWI670417B (ko)
WO (2) WO2015184057A1 (ko)

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US10519942B2 (en) * 2016-07-28 2019-12-31 Accriva Diagnostics, Inc. Methods of operating a pump to reduce or eliminate pump backlash errors
US10570896B1 (en) * 2017-04-28 2020-02-25 Vp Sales And Company Lp Packing nut lock
US10792697B2 (en) * 2017-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Drippage prevention system and method of operating same
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US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
EP3856420B1 (en) * 2018-09-24 2023-07-05 Graco Minnesota Inc. Paint sprayer distribution control and output volume monitoring architectures
BR102018072471B1 (pt) * 2018-10-31 2023-01-03 Drausuisse Brasil Comércio E Locação De Unidades Hidráulicas Inteligentes S.A. Unidade hidráulica com acionamento combinado por via pneumática e servo motor e seu uso
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Also Published As

Publication number Publication date
EP3149328A1 (en) 2017-04-05
TW201608131A (zh) 2016-03-01
TWI670417B (zh) 2019-09-01
WO2015184056A1 (en) 2015-12-03
KR20170012423A (ko) 2017-02-02
TWI664350B (zh) 2019-07-01
JP6543646B2 (ja) 2019-07-10
CN106662083A (zh) 2017-05-10
JP2017516944A (ja) 2017-06-22
EP3149329A1 (en) 2017-04-05
SG10201810172QA (en) 2018-12-28
KR102141270B1 (ko) 2020-08-04
WO2015184057A9 (en) 2016-09-01
JP6644712B2 (ja) 2020-02-12
TW201608133A (zh) 2016-03-01
EP3149329B1 (en) 2020-01-29
KR102141271B1 (ko) 2020-08-04
CN106662083B (zh) 2018-11-27
WO2015184057A1 (en) 2015-12-03
KR20170013322A (ko) 2017-02-06
US20170107982A1 (en) 2017-04-20
JP2017517696A (ja) 2017-06-29
US20170114879A1 (en) 2017-04-27
CN106460811A (zh) 2017-02-22
EP3149328B1 (en) 2019-03-20

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