SG11201602581WA - Gas treatment apparatus - Google Patents

Gas treatment apparatus

Info

Publication number
SG11201602581WA
SG11201602581WA SG11201602581WA SG11201602581WA SG11201602581WA SG 11201602581W A SG11201602581W A SG 11201602581WA SG 11201602581W A SG11201602581W A SG 11201602581WA SG 11201602581W A SG11201602581W A SG 11201602581WA SG 11201602581W A SG11201602581W A SG 11201602581WA
Authority
SG
Singapore
Prior art keywords
treatment apparatus
gas treatment
gas
treatment
Prior art date
Application number
SG11201602581WA
Other languages
English (en)
Inventor
Andrew James Seeley
Alexander Michael Pope
Thomas Frank Cohn
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of SG11201602581WA publication Critical patent/SG11201602581WA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/01—Pretreatment of the gases prior to electrostatic precipitation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/1456—Removing acid components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/16—Plant or installations having external electricity supply wet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/53—Liquid, or liquid-film, electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
    • B01D2252/10—Inorganic absorbents
    • B01D2252/103—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/10—Ionising electrode with two or more serrated ends or sides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Electrostatic Separation (AREA)
  • Separation Of Particles Using Liquids (AREA)
SG11201602581WA 2013-11-05 2014-09-30 Gas treatment apparatus SG11201602581WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1319533.4A GB2520009A (en) 2013-11-05 2013-11-05 Gas treatment apparatus
PCT/GB2014/052953 WO2015067921A1 (en) 2013-11-05 2014-09-30 Gas treatment apparatus

Publications (1)

Publication Number Publication Date
SG11201602581WA true SG11201602581WA (en) 2016-05-30

Family

ID=49767696

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201602581WA SG11201602581WA (en) 2013-11-05 2014-09-30 Gas treatment apparatus

Country Status (9)

Country Link
US (1) US10150120B2 (ja)
EP (1) EP3065849B1 (ja)
JP (1) JP6410817B2 (ja)
KR (1) KR102293536B1 (ja)
CN (1) CN105682774B (ja)
GB (1) GB2520009A (ja)
SG (1) SG11201602581WA (ja)
TW (1) TWI643659B (ja)
WO (1) WO2015067921A1 (ja)

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* Cited by examiner, † Cited by third party
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PE20151196Z (es) * 2015-03-04 2015-08-28 Prevoo Christian Paul Henriquez Filtro electrostatico concentrico
US10882053B2 (en) 2016-06-14 2021-01-05 Agentis Air Llc Electrostatic air filter
US20170354980A1 (en) 2016-06-14 2017-12-14 Pacific Air Filtration Holdings, LLC Collecting electrode
US10828646B2 (en) 2016-07-18 2020-11-10 Agentis Air Llc Electrostatic air filter
CN108738315A (zh) * 2017-02-17 2018-11-02 美的集团股份有限公司 静电除尘装置和空气处理设备
CN108050851B (zh) * 2017-11-30 2019-07-26 湖南红太阳光电科技有限公司 一种减压扩散炉尾气冷却装置
CN108262166B (zh) * 2018-01-30 2024-04-19 山东佳星环保科技有限公司 用于净化器的净化组件
US10792673B2 (en) 2018-12-13 2020-10-06 Agentis Air Llc Electrostatic air cleaner
US10875034B2 (en) 2018-12-13 2020-12-29 Agentis Air Llc Electrostatic precipitator
CN116056794A (zh) * 2020-06-11 2023-05-02 爱德华兹有限公司 静电除尘器
GB2595908A (en) * 2020-06-11 2021-12-15 Edwards Ltd Electrostatic precipitator
DE102021119736A1 (de) * 2021-07-29 2023-02-02 Woco Gmbh & Co. Kg Raumluftreiniger
US20240347350A1 (en) * 2021-09-02 2024-10-17 Edwards Vacuum Llc In line water scrubber system for semiconductor processing
DE102022105258A1 (de) 2022-03-07 2023-09-07 Das Environmental Expert Gmbh Vorrichtung und Verfahren zur Reinigung eines Gasstromes
CN114643130B (zh) * 2022-03-23 2022-09-02 温州伟诚环保科技有限公司 一种电袋复合除尘器

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US2085349A (en) * 1935-02-28 1937-06-29 Research Corp Electrical precipitation
US3315444A (en) * 1964-05-01 1967-04-25 Electronatom Corp Integrated mechanical filter and electrostatic precipitator system for broad spectrum purification
JPS5245940Y2 (ja) 1972-02-09 1977-10-19
JPS4895363A (ja) * 1972-03-21 1973-12-07
DE2235332A1 (de) * 1972-07-19 1974-05-16 Elba Werk Maschinen Gmbh & Co Wasserspuelvorrichtung fuer nasselektrofilter
JPS5428073A (en) * 1977-08-04 1979-03-02 Koyo Kensetsu Kougiyou Kk Wet type electric dust collector
JPS5348283A (en) * 1977-10-19 1978-05-01 Japan Steel Works Ltd:The Multiple cylinder electrostatic waste gas cleaning device
US5160510A (en) 1990-06-09 1992-11-03 Metallgesellschaft Aktiengesellschaft Process and apparatus for purifying dust- and pollutant-containing exhaust gases
US5215557A (en) * 1992-06-24 1993-06-01 The Babcock & Wilcox Company Dry scrubber with integral particulate collection device
US5250267A (en) * 1992-06-24 1993-10-05 The Babcock & Wilcox Company Particulate collection device with integral wet scrubber
CA2364100A1 (en) * 2001-11-30 2003-05-30 Diversified Metals Engineering Ltd. Method and apparatus for scrubbing gases, using mixing vanes
WO2004041412A1 (en) 2002-09-24 2004-05-21 Erma Eero Device for cleaning of gases from dust particles with or without ionisation and with dry, wet or both dry and wet dust catching
WO2005009692A1 (ja) 2003-07-29 2005-02-03 Matsushita Electric Industrial Co., Ltd. ロボットアームの制御方法および制御装置
JP4553125B2 (ja) * 2003-12-25 2010-09-29 ミドリ安全株式会社 荷電装置、捕集装置及び静電式集塵装置
US7112236B2 (en) * 2004-04-08 2006-09-26 Fleetguard, Inc. Multistage space-efficient electrostatic collector
BRPI0617813A2 (pt) * 2005-10-26 2011-08-09 Koninkl Philips Electronics Nv aparelho de limpeza de ar
GB0709502D0 (en) * 2007-05-18 2007-06-27 Boc Group Plc Apparatus for treating gas
US7597750B1 (en) * 2008-05-12 2009-10-06 Henry Krigmont Hybrid wet electrostatic collector
TW201105406A (en) * 2009-03-10 2011-02-16 Calera Corp Systems and methods for processing CO2
GB2472097B (en) * 2009-07-24 2013-04-17 Dyson Technology Ltd Separating apparatus with electrostatic filter
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Also Published As

Publication number Publication date
TW201524581A (zh) 2015-07-01
EP3065849A1 (en) 2016-09-14
US20160236205A1 (en) 2016-08-18
WO2015067921A1 (en) 2015-05-14
EP3065849B1 (en) 2018-11-07
TWI643659B (zh) 2018-12-11
GB2520009A (en) 2015-05-13
US10150120B2 (en) 2018-12-11
KR102293536B1 (ko) 2021-08-24
JP6410817B2 (ja) 2018-10-24
KR20160081916A (ko) 2016-07-08
CN105682774B (zh) 2017-10-24
GB201319533D0 (en) 2013-12-18
JP2016534862A (ja) 2016-11-10
CN105682774A (zh) 2016-06-15

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