SG11201510335QA - Aerosol coating method and plasma-resistant member formed thereby - Google Patents

Aerosol coating method and plasma-resistant member formed thereby

Info

Publication number
SG11201510335QA
SG11201510335QA SG11201510335QA SG11201510335QA SG11201510335QA SG 11201510335Q A SG11201510335Q A SG 11201510335QA SG 11201510335Q A SG11201510335Q A SG 11201510335QA SG 11201510335Q A SG11201510335Q A SG 11201510335QA SG 11201510335Q A SG11201510335Q A SG 11201510335QA
Authority
SG
Singapore
Prior art keywords
plasma
coating method
member formed
resistant member
aerosol coating
Prior art date
Application number
SG11201510335QA
Inventor
Sung Hwan Yi
Jae Hyun Jung
Kyeong Ik Jang
Kyoung Hwan Ye
Original Assignee
Komico Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komico Co Ltd filed Critical Komico Co Ltd
Publication of SG11201510335QA publication Critical patent/SG11201510335QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/12—Applying particulate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C04B35/505—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Drying Of Semiconductors (AREA)
SG11201510335QA 2013-08-22 2013-08-28 Aerosol coating method and plasma-resistant member formed thereby SG11201510335QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020130099561A KR102082190B1 (en) 2013-08-22 2013-08-22 Aerosol coating method and plasma-resistant member formed by the same
PCT/KR2013/007711 WO2015025996A1 (en) 2013-08-22 2013-08-28 Aerosol coating method and plasma-resistant member formed thereby

Publications (1)

Publication Number Publication Date
SG11201510335QA true SG11201510335QA (en) 2016-01-28

Family

ID=52483763

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201510335QA SG11201510335QA (en) 2013-08-22 2013-08-28 Aerosol coating method and plasma-resistant member formed thereby

Country Status (7)

Country Link
US (1) US10272467B2 (en)
JP (1) JP6258498B2 (en)
KR (1) KR102082190B1 (en)
CN (1) CN105452529B (en)
SG (1) SG11201510335QA (en)
TW (1) TWI494291B (en)
WO (1) WO2015025996A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7124798B2 (en) * 2018-07-17 2022-08-24 信越化学工業株式会社 Membrane-forming powder, method for forming coating, and method for producing membrane-forming powder
KR102490570B1 (en) * 2022-05-23 2023-01-20 주식회사 코미코 Method for Producing Plasma-Resistant Coating Layer with Low Brightness using Heat Treatment Process of Rare Earth Metal Powders and Plasma-Resistant Coating Layer Formed by the Same

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670234B2 (en) 1985-11-27 1994-09-07 株式会社河端製作所 Method for reducing friction of coating on sliding or rotating parts of metal
US5827797A (en) * 1989-08-28 1998-10-27 Cass; Richard B. Method for producing refractory filaments
JPH04154657A (en) * 1990-10-18 1992-05-27 Genshiryoku Gijutsu Kk Production of ceramic power, device therefor and production of ceramics
KR950011017B1 (en) 1991-07-01 1995-09-27 미쯔시다덴기산교 가부시기가이샤 Semiconductor device and its making method
KR970001558B1 (en) * 1993-10-19 1997-02-11 이재성 Method for composite powder
KR100724070B1 (en) 1999-10-12 2007-06-04 도토기키 가부시키가이샤 Composite structured material and method for preparation thereof and apparatus for preparation thereof
KR100575615B1 (en) 2000-12-27 2006-05-03 매그나칩 반도체 유한회사 Circuit for test of sram
CN1202043C (en) 2003-05-29 2005-05-18 上海交通大学 Prepn of large grain spherical submicron/nano composite fiber-ceramic powder
JP4585832B2 (en) * 2004-10-22 2010-11-24 株式会社フジミインコーポレーテッド Thermal spray powder, thermal spraying method and thermal spray coating
JP2008045191A (en) * 2006-08-21 2008-02-28 Ntn Corp Apparatus and method for depositing coating film
JP2008056948A (en) 2006-08-29 2008-03-13 Ntn Corp Pretreatment method for ceramic fine particle
KR101012421B1 (en) 2008-06-02 2011-02-08 성균관대학교산학협력단 Normal pressure aerosol spray apparatus and method of forming film using the same
KR100988175B1 (en) * 2008-07-25 2010-10-18 재단법인 철원플라즈마 산업기술연구원 Apparatus For Forming Ceramic Coated Layer
KR100966132B1 (en) * 2008-07-25 2010-06-25 주식회사 코미코 Plasma-Resistant Ceramic Coated Substrate
JP5909737B2 (en) * 2010-02-10 2016-04-27 有限会社 渕田ナノ技研 Yttria film deposition method
KR101208768B1 (en) * 2010-08-06 2012-12-05 서울대학교산학협력단 A method for manufacturing ceramic coating layer for improving corrosion resistance of metal and a thing having a ceramic coating layer thereof
KR20140072110A (en) * 2011-09-26 2014-06-12 가부시키가이샤 후지미인코퍼레이티드 Thermal spray powder and film that contain rare-earth element, and member provided with film
WO2014047283A1 (en) * 2012-09-20 2014-03-27 The Penn State Research Foundation Process for production of graphene/silicon carbide ceramic composites
CN102976617B (en) 2012-11-30 2015-04-15 华泽庆 Glass ceramic and preparation method thereof
JP2014198308A (en) * 2013-03-29 2014-10-23 日本碍子株式会社 Ceramic separation filter and dehydration method

Also Published As

Publication number Publication date
JP6258498B2 (en) 2018-01-10
JP2016528392A (en) 2016-09-15
US10272467B2 (en) 2019-04-30
TW201507993A (en) 2015-03-01
US20160176763A1 (en) 2016-06-23
WO2015025996A1 (en) 2015-02-26
CN105452529B (en) 2018-09-14
KR20150022149A (en) 2015-03-04
KR102082190B1 (en) 2020-02-27
TWI494291B (en) 2015-08-01
CN105452529A (en) 2016-03-30

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