SG11201508595SA - Laser Beam Shielding Member, Laser Processing Device And Laser Beam Irradiation Method - Google Patents
Laser Beam Shielding Member, Laser Processing Device And Laser Beam Irradiation MethodInfo
- Publication number
- SG11201508595SA SG11201508595SA SG11201508595SA SG11201508595SA SG11201508595SA SG 11201508595S A SG11201508595S A SG 11201508595SA SG 11201508595S A SG11201508595S A SG 11201508595SA SG 11201508595S A SG11201508595S A SG 11201508595SA SG 11201508595S A SG11201508595S A SG 11201508595SA
- Authority
- SG
- Singapore
- Prior art keywords
- laser beam
- laser
- processing device
- shielding member
- irradiation method
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/706—Protective screens
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Recrystallisation Techniques (AREA)
- Laser Beam Processing (AREA)
- Nonlinear Science (AREA)
- Thin Film Transistor (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013086972A JP5725518B2 (en) | 2013-04-17 | 2013-04-17 | Laser light shielding member, laser processing apparatus, and laser light irradiation method |
PCT/JP2014/060374 WO2014171384A1 (en) | 2013-04-17 | 2014-04-10 | Laser light shielding member, laser processing device, and laser light irradiation method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201508595SA true SG11201508595SA (en) | 2015-11-27 |
Family
ID=51731327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201508595SA SG11201508595SA (en) | 2013-04-17 | 2014-04-10 | Laser Beam Shielding Member, Laser Processing Device And Laser Beam Irradiation Method |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP5725518B2 (en) |
KR (1) | KR102214156B1 (en) |
CN (1) | CN105144344B (en) |
SG (1) | SG11201508595SA (en) |
TW (1) | TWI647046B (en) |
WO (1) | WO2014171384A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109654393B (en) * | 2017-01-11 | 2020-06-19 | 哈尔滨理工大学 | Nostril illuminating device with second shielding plate |
US20190362992A1 (en) * | 2017-02-02 | 2019-11-28 | Mitsubishi Electric Corporation | Heat treatment apparatus, heat treatment method, and method for manufacturing semiconductor device |
JP2019036636A (en) * | 2017-08-15 | 2019-03-07 | 株式会社ブイ・テクノロジー | Laser irradiation device, thin film transistor manufacturing method and projection mask |
JP6970580B2 (en) * | 2017-10-03 | 2021-11-24 | 株式会社ディスコ | Laser processing equipment and output confirmation method |
EP3761344A1 (en) * | 2019-07-05 | 2021-01-06 | Laser Systems & Solutions of Europe | System and method for spatially controlling an amount of energy delivered to a processed surface of a substrate |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05208289A (en) * | 1992-01-13 | 1993-08-20 | Toshiba Corp | Laser beam irradiating device |
EP0770925B1 (en) * | 1995-10-11 | 2002-01-02 | SANYO ELECTRIC Co., Ltd. | Photoprocessing method and apparatus |
JP3292058B2 (en) * | 1996-10-01 | 2002-06-17 | 三菱電機株式会社 | Method and apparatus for processing wiring substrate using laser light |
US6737672B2 (en) | 2000-08-25 | 2004-05-18 | Fujitsu Limited | Semiconductor device, manufacturing method thereof, and semiconductor manufacturing apparatus |
JP3945805B2 (en) * | 2001-02-08 | 2007-07-18 | 株式会社東芝 | Laser processing method, liquid crystal display device manufacturing method, laser processing device, and semiconductor device manufacturing method |
KR100424593B1 (en) * | 2001-06-07 | 2004-03-27 | 엘지.필립스 엘시디 주식회사 | A method of crystallizing Si |
KR100796758B1 (en) * | 2001-11-14 | 2008-01-22 | 삼성전자주식회사 | A mask for crystallizing polysilicon and a method for forming thin film transistor using the mask |
JP4474108B2 (en) | 2002-09-02 | 2010-06-02 | 株式会社 日立ディスプレイズ | Display device, manufacturing method thereof, and manufacturing apparatus |
TWI353467B (en) * | 2003-01-08 | 2011-12-01 | Samsung Electronics Co Ltd | Polysilicon thin film transistor array panel and m |
US7387922B2 (en) * | 2003-01-21 | 2008-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system |
WO2005008333A2 (en) * | 2003-07-18 | 2005-01-27 | Uclt Ltd. | Method for correcting critical dimension variations in photomasks |
JP5072197B2 (en) * | 2004-06-18 | 2012-11-14 | 株式会社半導体エネルギー研究所 | Laser irradiation apparatus and laser irradiation method |
JP2006013050A (en) * | 2004-06-24 | 2006-01-12 | Sharp Corp | Laser beam projection mask, laser processing method using the same and laser processing system |
JP2006145745A (en) * | 2004-11-18 | 2006-06-08 | Dainippon Screen Mfg Co Ltd | Pattern drawing apparatus and method for drawing pattern |
JP2007214527A (en) * | 2006-01-13 | 2007-08-23 | Ihi Corp | Laser annealing method and laser annealer |
WO2009157373A1 (en) * | 2008-06-26 | 2009-12-30 | 株式会社Ihi | Method and apparatus for laser annealing |
JP2010089094A (en) * | 2008-10-03 | 2010-04-22 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
JP2010264471A (en) * | 2009-05-14 | 2010-11-25 | Norio Karube | Thermal stress cracking for brittle material by wide region non-uniform temperature distribution |
JP2012081478A (en) * | 2010-10-07 | 2012-04-26 | Ushio Inc | Laser lift-off device |
-
2013
- 2013-04-17 JP JP2013086972A patent/JP5725518B2/en active Active
-
2014
- 2014-04-10 KR KR1020157029915A patent/KR102214156B1/en active IP Right Grant
- 2014-04-10 WO PCT/JP2014/060374 patent/WO2014171384A1/en active Application Filing
- 2014-04-10 CN CN201480021820.7A patent/CN105144344B/en active Active
- 2014-04-10 SG SG11201508595SA patent/SG11201508595SA/en unknown
- 2014-04-17 TW TW103113957A patent/TWI647046B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR102214156B1 (en) | 2021-02-09 |
KR20150143508A (en) | 2015-12-23 |
TW201446387A (en) | 2014-12-16 |
CN105144344A (en) | 2015-12-09 |
CN105144344B (en) | 2018-03-20 |
TWI647046B (en) | 2019-01-11 |
WO2014171384A1 (en) | 2014-10-23 |
JP5725518B2 (en) | 2015-05-27 |
JP2014212178A (en) | 2014-11-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL244344B (en) | Beam delivery apparatus and method | |
EP3038272A4 (en) | Beam tracking method, apparatus and system | |
EP2979636A4 (en) | Radiation image processing device, radiation image processing method and program | |
HK1201613A1 (en) | Page processing method and device thereof, page generating method and device thereof | |
GB2518085B (en) | Ion beam processing method and ion beam processing apparatus | |
EP2961559A4 (en) | Laser system and method for processing sapphire | |
EP3018838A4 (en) | Optical path processing method and apparatus | |
EP3184147A4 (en) | Respiratory guiding device and method in respiratory gating ion beam irradiation | |
EP3072629A4 (en) | Laser processing apparatus and laser processing method | |
EP3069813A4 (en) | Laser welding condition determination method and laser welding device | |
PL2883648T3 (en) | Laser cutting apparatus and cutting method therefor | |
EP2918689A4 (en) | Laser processing device and laser radiation method | |
SG11201802626SA (en) | Radiation shielding tube, and shielding device and method | |
EP2991078A4 (en) | Electron beam irradiation apparatus | |
PL3145685T3 (en) | Method, device and laser plotter for processing workpieces | |
EP2966906A4 (en) | Method and device for processing downlink information | |
GB2511417B (en) | X-ray data processing apparatus, x-ray data processing method, and x-ray data processing program | |
EP3275392A4 (en) | Laser irradiation device | |
EP2804448A4 (en) | Active species irradiation device, active species irradiation method and method for forming object having been irradiated with active species | |
EP3076722A4 (en) | Beam alignment method and device | |
EP2873780A4 (en) | Light shielding device, light shielding method, and program | |
SG11201502953QA (en) | Laser line beam improvement apparatus and laser processing apparatus | |
SG11201508595SA (en) | Laser Beam Shielding Member, Laser Processing Device And Laser Beam Irradiation Method | |
GB2515595B (en) | Particle beam irradiation system and method for operating the same | |
EP2998809A4 (en) | Laser processing method and laser processing program creation device |