SG11201403305VA - Apparatus for forming thin film - Google Patents
Apparatus for forming thin filmInfo
- Publication number
- SG11201403305VA SG11201403305VA SG11201403305VA SG11201403305VA SG11201403305VA SG 11201403305V A SG11201403305V A SG 11201403305VA SG 11201403305V A SG11201403305V A SG 11201403305VA SG 11201403305V A SG11201403305V A SG 11201403305VA SG 11201403305V A SG11201403305V A SG 11201403305VA
- Authority
- SG
- Singapore
- Prior art keywords
- thin film
- forming thin
- forming
- film
- thin
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D23/00—Details of bottles or jars not otherwise provided for
- B65D23/02—Linings or internal coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011284609 | 2011-12-27 | ||
PCT/JP2012/083679 WO2013099960A1 (en) | 2011-12-27 | 2012-12-26 | Apparatus for forming thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201403305VA true SG11201403305VA (en) | 2014-09-26 |
Family
ID=48697441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201403305VA SG11201403305VA (en) | 2011-12-27 | 2012-12-26 | Apparatus for forming thin film |
Country Status (13)
Country | Link |
---|---|
US (1) | US10612142B2 (en) |
EP (1) | EP2799593B1 (en) |
JP (1) | JP5809711B2 (en) |
KR (1) | KR101552077B1 (en) |
CN (1) | CN103998649B (en) |
AU (1) | AU2012361615B2 (en) |
BR (1) | BR112014015773A8 (en) |
CA (1) | CA2860243C (en) |
MY (1) | MY167942A (en) |
PH (1) | PH12014501448A1 (en) |
SG (1) | SG11201403305VA (en) |
TW (1) | TWI522282B (en) |
WO (1) | WO2013099960A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6480195B2 (en) * | 2015-01-23 | 2019-03-06 | キリン株式会社 | Article processing device |
JP6474673B2 (en) | 2015-04-17 | 2019-02-27 | キリン株式会社 | Gas barrier plastic molded body and method for producing the same |
JP6578001B2 (en) * | 2015-06-30 | 2019-09-18 | 三菱重工機械システム株式会社 | Film forming apparatus and film forming method |
JP6535384B2 (en) * | 2015-10-01 | 2019-06-26 | 三菱重工機械システム株式会社 | Film deposition system |
JP6625656B2 (en) * | 2015-10-19 | 2019-12-25 | 三菱重工機械システム株式会社 | Film forming equipment |
KR102229237B1 (en) | 2017-08-31 | 2021-03-18 | 새한프라텍 주식회사 | Plastic container having excellent gas barrier property and manufacturing method thereof |
EP3684962B1 (en) * | 2017-09-20 | 2021-10-06 | C4E Technology GmbH | Method and device for carrying out a deposition process at the outer side and/or at the inner side of a body |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2201858A1 (en) * | 1971-01-22 | 1972-08-10 | Cockerill | Device for applying a metallic coating to the inner wall of a hollow body |
US5308649A (en) * | 1992-06-26 | 1994-05-03 | Polar Materials, Inc. | Methods for externally treating a container with application of internal bias gas |
US5679412A (en) * | 1993-10-28 | 1997-10-21 | Manfred R. Kuehnle | Method and apparatus for producing gas impermeable, chemically inert container structures for food and volatile substances |
US5565248A (en) | 1994-02-09 | 1996-10-15 | The Coca-Cola Company | Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance |
US5521351A (en) * | 1994-08-30 | 1996-05-28 | Wisconsin Alumni Research Foundation | Method and apparatus for plasma surface treatment of the interior of hollow forms |
US6223683B1 (en) * | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
EP0943699B1 (en) * | 1998-02-19 | 2003-12-17 | Applied Films GmbH & Co. KG | Load-lock device for transferring substrates in and out of a treatment chamber |
EP1229068B1 (en) * | 2001-02-06 | 2005-09-14 | Shibuya Kogyo Co., Ltd. | Method and apparatus for modifying the inner surface of containers made of polymeric compound |
KR20050007341A (en) * | 2002-04-26 | 2005-01-17 | 호카이세이칸가부시끼가이샤 | Plastic containers coated on the inner surface and process for production thereof |
ATE322561T1 (en) * | 2002-05-24 | 2006-04-15 | Schott Ag | APPARATUS FOR CVD COATINGS |
MXPA04011663A (en) * | 2002-05-24 | 2005-07-05 | Schott Ag | Multistation coating device and method for plasma coating. |
AU2003242357A1 (en) * | 2002-06-05 | 2003-12-22 | Kirin Brewery Company, Limited | Method and device for cleaning raw material gas introduction tube used in cvd film forming apparatus |
JP2004107781A (en) | 2002-09-20 | 2004-04-08 | Mitsubishi Heavy Ind Ltd | Carbon film coating process and apparatus |
JP2005048272A (en) * | 2003-07-31 | 2005-02-24 | Tokyo Electron Ltd | Film deposition apparatus and film deposition method |
JP4789234B2 (en) * | 2005-02-03 | 2011-10-12 | 三菱重工食品包装機械株式会社 | Film forming apparatus, matching device, and impedance control method |
JP5260050B2 (en) * | 2005-05-27 | 2013-08-14 | 麒麟麦酒株式会社 | Gas barrier plastic container manufacturing apparatus and method for manufacturing the container |
JP2006335379A (en) | 2005-05-31 | 2006-12-14 | Yoshino Kogyosho Co Ltd | Synthetic-resin-made container with coat, method and apparatus for forming coat on synthetic-resin-made container |
JP2007105999A (en) * | 2005-10-13 | 2007-04-26 | Toyobo Co Ltd | Multilayered molded product, multilayered stretched molded product comprising it and manufacturing method of multilayered molded product |
JP4954679B2 (en) | 2006-11-20 | 2012-06-20 | 麒麟麦酒株式会社 | Barrier film-coated plastic container manufacturing method and manufacturing apparatus thereof |
JP5355860B2 (en) * | 2007-03-16 | 2013-11-27 | 三菱重工食品包装機械株式会社 | Barrier film forming apparatus, barrier film forming method, and barrier film coating container |
US8062470B2 (en) * | 2008-05-12 | 2011-11-22 | Yuri Glukhoy | Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers |
MX345403B (en) * | 2009-05-13 | 2017-01-30 | Sio2 Medical Products Inc | Pecvd coating using an organosilicon precursor. |
-
2012
- 2012-12-26 WO PCT/JP2012/083679 patent/WO2013099960A1/en active Application Filing
- 2012-12-26 BR BR112014015773A patent/BR112014015773A8/en not_active IP Right Cessation
- 2012-12-26 EP EP12862231.3A patent/EP2799593B1/en active Active
- 2012-12-26 AU AU2012361615A patent/AU2012361615B2/en not_active Ceased
- 2012-12-26 SG SG11201403305VA patent/SG11201403305VA/en unknown
- 2012-12-26 US US14/368,161 patent/US10612142B2/en active Active
- 2012-12-26 JP JP2013551747A patent/JP5809711B2/en active Active
- 2012-12-26 KR KR1020147017172A patent/KR101552077B1/en active IP Right Grant
- 2012-12-26 CN CN201280063883.XA patent/CN103998649B/en active Active
- 2012-12-26 MY MYPI2014701655A patent/MY167942A/en unknown
- 2012-12-26 CA CA2860243A patent/CA2860243C/en not_active Expired - Fee Related
- 2012-12-27 TW TW101150676A patent/TWI522282B/en not_active IP Right Cessation
-
2014
- 2014-06-23 PH PH12014501448A patent/PH12014501448A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
AU2012361615B2 (en) | 2015-08-06 |
CA2860243C (en) | 2016-07-12 |
US10612142B2 (en) | 2020-04-07 |
EP2799593A1 (en) | 2014-11-05 |
JPWO2013099960A1 (en) | 2015-05-11 |
EP2799593B1 (en) | 2020-03-04 |
CN103998649B (en) | 2016-05-11 |
BR112014015773A8 (en) | 2017-07-04 |
EP2799593A4 (en) | 2015-08-05 |
JP5809711B2 (en) | 2015-11-11 |
MY167942A (en) | 2018-10-04 |
AU2012361615A1 (en) | 2014-07-17 |
BR112014015773A2 (en) | 2017-06-13 |
KR101552077B1 (en) | 2015-09-09 |
PH12014501448A1 (en) | 2014-10-08 |
CN103998649A (en) | 2014-08-20 |
KR20140105773A (en) | 2014-09-02 |
US20140366806A1 (en) | 2014-12-18 |
CA2860243A1 (en) | 2013-07-04 |
TW201332844A (en) | 2013-08-16 |
TWI522282B (en) | 2016-02-21 |
WO2013099960A1 (en) | 2013-07-04 |
NZ626604A (en) | 2015-03-27 |
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