SG104305A1 - Storage vessel for liquid high-purity substances - Google Patents

Storage vessel for liquid high-purity substances

Info

Publication number
SG104305A1
SG104305A1 SG200201770A SG200201770A SG104305A1 SG 104305 A1 SG104305 A1 SG 104305A1 SG 200201770 A SG200201770 A SG 200201770A SG 200201770 A SG200201770 A SG 200201770A SG 104305 A1 SG104305 A1 SG 104305A1
Authority
SG
Singapore
Prior art keywords
storage vessel
vessel
shut
coupling
connecting piece
Prior art date
Application number
SG200201770A
Other languages
English (en)
Inventor
Christoph Scholz Dr
Original Assignee
Cs Clean Systems Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP01108033A external-priority patent/EP1245527B1/de
Application filed by Cs Clean Systems Ag filed Critical Cs Clean Systems Ag
Publication of SG104305A1 publication Critical patent/SG104305A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/65—Vaporizers

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Cleaning By Liquid Or Steam (AREA)
SG200201770A 2001-03-29 2002-03-27 Storage vessel for liquid high-purity substances SG104305A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01108033A EP1245527B1 (de) 2001-03-29 2001-03-29 Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters

Publications (1)

Publication Number Publication Date
SG104305A1 true SG104305A1 (en) 2004-06-21

Family

ID=8176998

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200201770A SG104305A1 (en) 2001-03-29 2002-03-27 Storage vessel for liquid high-purity substances

Country Status (5)

Country Link
JP (1) JP4146148B2 (ko)
KR (1) KR100863082B1 (ko)
CN (1) CN1214956C (ko)
AT (1) ATE227242T1 (ko)
SG (1) SG104305A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005131632A (ja) 2003-10-08 2005-05-26 Adeka Engineering & Consutruction Co Ltd 流体供給装置
CN103184412A (zh) * 2011-12-27 2013-07-03 鸿富锦精密工业（深圳）有限公司 真空镀膜机清洗设备
CN107448273B (zh) * 2017-07-18 2021-02-19 中国电建集团河南工程公司 一种管道系统冲洗设备及燃机油系统化学清洗方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4723967A (en) * 1987-04-27 1988-02-09 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
US5108015A (en) * 1990-07-06 1992-04-28 Fluoroware, Inc. Multiple tube to bung coupling
DE4142567C1 (ko) * 1991-12-21 1993-06-09 Burdosa Ing. Herwig Burgert, 6305 Buseck, De
US6098848A (en) * 1997-12-25 2000-08-08 Nisso Engineering Co., Ltd Method and apparatus for connecting a fluid reservoir with pipelines

Also Published As

Publication number Publication date
CN1378966A (zh) 2002-11-13
KR100863082B1 (ko) 2008-10-13
JP4146148B2 (ja) 2008-09-03
JP2002343719A (ja) 2002-11-29
CN1214956C (zh) 2005-08-17
ATE227242T1 (de) 2002-11-15
KR20020077031A (ko) 2002-10-11

Similar Documents

Publication Publication Date Title
CA2401864A1 (en) Apparatus and methods for placing an additive fluid into a refrigerant circuit
ECSP024395A (es) Conjunto dispensador de bebida y contenedor para bebida y conducto de dispensación de bebida
SG152060A1 (en) Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
MXPA02002809A (es) Dispositivo de retencion de baja presion.
SG91271A1 (en) Cleaning apparatus
HK1086173A1 (en) Device for pumping a liquid from a packaging or a container
EP1063090A3 (en) Liquid supply system and liquid vessel used for the same
TW200846240A (en) Brake system with hydraulic brake equipment
EP1159929A3 (de) Dentales Abrasivstrahlgerät
AU2388502A (en) Generation of therapeutic microfoam
GB2358911B (en) Process for unloading pressurized liquefied natural gas from containers
TW200642909A (en) Method and apparatus for filling liquids into foil bags with a spout
AU5983099A (en) Sealing device
WO2004012636A3 (en) Apparatus for delivery of fluid to ophthalmic surgical handpiece
EP1078766A3 (en) Liquid container, liquid ejection mechanism and liquid ejection apparatus
MY123644A (en) Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels.
EP1360924A3 (de) Rucksack-Auftragegerät
AR014658A1 (es) Modulo de llenado y de extraccion para dioxido de carbono dentro de un modulo de refrigeracion asociado a un recipiente de refrigeracion, un metodopara el llenado de un modulo de refrigeracion asociado a un recipiente de refrigeracion, y el uso del modulo de llenado y de extraccion
MX2009001581A (es) Método de llenado de líquido y contenedor de recepción de líquido.
WO2003099685A3 (en) An assembly for delivering solid particulate matter for loading
SG104305A1 (en) Storage vessel for liquid high-purity substances
GB0102386D0 (en) Method for filling needless injector capsules
WO2008053238A3 (en) System for charging and discharging containers for storage & transportation of high pressure compressed gas
AU3160999A (en) Dispensing means
WO2001093647A3 (en) Filling method