SG10202011907WA - Holding table - Google Patents

Holding table

Info

Publication number
SG10202011907WA
SG10202011907WA SG10202011907WA SG10202011907WA SG10202011907WA SG 10202011907W A SG10202011907W A SG 10202011907WA SG 10202011907W A SG10202011907W A SG 10202011907WA SG 10202011907W A SG10202011907W A SG 10202011907WA SG 10202011907W A SG10202011907W A SG 10202011907WA
Authority
SG
Singapore
Prior art keywords
holding table
holding
Prior art date
Application number
SG10202011907WA
Inventor
Sawaki Satoshi
Katoh Kei
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10202011907WA publication Critical patent/SG10202011907WA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/98—Methods for disconnecting semiconductor or solid-state bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0683—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
    • F16B5/0004—Joining sheets, plates or panels in abutting relationship
    • F16B5/0032—Joining sheets, plates or panels in abutting relationship by moving the sheets, plates, or panels or the interlocking key parallel to the abutting edge
    • F16B5/0036—Joining sheets, plates or panels in abutting relationship by moving the sheets, plates, or panels or the interlocking key parallel to the abutting edge and using hook and slot or keyhole-type connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means
    • B23Q2703/04—Work clamping means using fluid means or a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SG10202011907WA 2019-12-19 2020-11-30 Holding table SG10202011907WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019229750A JP7361595B2 (en) 2019-12-19 2019-12-19 holding table

Publications (1)

Publication Number Publication Date
SG10202011907WA true SG10202011907WA (en) 2021-07-29

Family

ID=76542025

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202011907WA SG10202011907WA (en) 2019-12-19 2020-11-30 Holding table

Country Status (5)

Country Link
JP (1) JP7361595B2 (en)
KR (1) KR20210079185A (en)
CN (1) CN113084680B (en)
SG (1) SG10202011907WA (en)
TW (1) TW202125686A (en)

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1092913A (en) * 1996-09-18 1998-04-10 Sony Corp Semiconductor growing susceptor
CN2400818Y (en) * 1999-10-18 2000-10-11 神基科技股份有限公司 Rotary fixing structure
JP2003197720A (en) 2001-12-25 2003-07-11 Hitachi Kokusai Electric Inc Substrate treatment unit
JP2003209162A (en) 2002-01-15 2003-07-25 Sumitomo Electric Ind Ltd Container for semiconductor wafer
JP4410062B2 (en) * 2004-09-03 2010-02-03 株式会社ディスコ Chuck table
TWM272672U (en) * 2005-03-07 2005-08-11 Yi Yao Co Ltd Easy assembling and disassembling retractable type multi-color stamp pad
CN1869498A (en) * 2005-05-24 2006-11-29 鸿富锦精密工业（深圳）有限公司 Retation support device and vertical device using the device
JP4784931B2 (en) * 2006-02-09 2011-10-05 エスアイアイ・ナノテクノロジー株式会社 Sample holding mechanism and sample processing / observation device
JP5709370B2 (en) 2009-11-26 2015-04-30 株式会社ディスコ Cutting apparatus and cutting method
CN202312031U (en) * 2011-11-04 2012-07-11 李声辉 Dismountable automatic-rotating dining turning plate with electric-heating heat preservation function
CN202419060U (en) * 2011-12-27 2012-09-05 东莞呈越电脑配件有限公司 Quick-release rotating base
CN102536009B (en) * 2012-01-19 2014-07-16 中国新兴保信建设总公司 Multi-angle positioning device for vertical hinged door
TWM458272U (en) * 2013-01-11 2013-08-01 M & S Prec Machinery Co Ltd Automatic rotating-swinging device
JP2017050412A (en) * 2015-09-02 2017-03-09 株式会社ディスコ Holding jig
CN105459282A (en) * 2016-01-06 2016-04-06 福建巨邦机械有限公司 Rotary table, positioning block, positioning method, processing device and processing method
CN106670830B (en) * 2016-03-10 2019-05-21 上海大侨誉远精密机械有限公司 A kind of horizontal arrangement type workbench exchange frame
US20180142497A1 (en) * 2016-11-21 2018-05-24 Hsiang-Chih Hung Door lock
CN109945808A (en) * 2017-12-20 2019-06-28 宁波奉化三湖电子厂 A kind of arc length and the automatic detecting tool of position degree of belt pulley arcuate socket
JP7043346B2 (en) * 2018-05-18 2022-03-29 株式会社ディスコ Cutting equipment
CN208409006U (en) * 2018-06-01 2019-01-22 福建庆翔机械有限公司 A kind of position rotating platform of auto parts and components trial-production fixture
JP2020035548A (en) * 2018-08-27 2020-03-05 コイズミ照明株式会社 Light fitting
CN209272319U (en) * 2018-11-19 2019-08-20 南京华万机械配件有限公司 Discharging device on punching machine
CN209394310U (en) * 2018-12-28 2019-09-17 广州市威嘉机床有限公司 A kind of precise rotating platform positioning mechanism
CN109571053B (en) * 2018-12-29 2020-06-02 广东长盈精密技术有限公司 Five-axis machining equipment and workbench thereof

Also Published As

Publication number Publication date
CN113084680B (en) 2024-03-12
TW202125686A (en) 2021-07-01
CN113084680A (en) 2021-07-09
JP2021100015A (en) 2021-07-01
KR20210079185A (en) 2021-06-29
JP7361595B2 (en) 2023-10-16

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