SG10202006342YA - Turntable cloth peeling jig - Google Patents

Turntable cloth peeling jig

Info

Publication number
SG10202006342YA
SG10202006342YA SG10202006342YA SG10202006342YA SG10202006342YA SG 10202006342Y A SG10202006342Y A SG 10202006342YA SG 10202006342Y A SG10202006342Y A SG 10202006342YA SG 10202006342Y A SG10202006342Y A SG 10202006342YA SG 10202006342Y A SG10202006342Y A SG 10202006342YA
Authority
SG
Singapore
Prior art keywords
peeling jig
cloth peeling
turntable cloth
turntable
jig
Prior art date
Application number
SG10202006342YA
Inventor
Sotozaki Hiroshi
Saito Kenichiro
Sone Tadakazu
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2016135947A external-priority patent/JP6774238B2/en
Priority claimed from JP2016135832A external-priority patent/JP2018001386A/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202006342YA publication Critical patent/SG10202006342YA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02082—Cleaning product to be cleaned
    • H01L21/02087—Cleaning of wafer edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1174—Using roller for delamination [e.g., roller pairs operating at differing speeds or directions, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/195—Delaminating roller means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
SG10202006342YA 2016-07-08 2017-06-30 Turntable cloth peeling jig SG10202006342YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016135947A JP6774238B2 (en) 2016-07-08 2016-07-08 Turntable cloth peeling jig
JP2016135832A JP2018001386A (en) 2016-07-08 2016-07-08 Peeling tool for turn table cloth

Publications (1)

Publication Number Publication Date
SG10202006342YA true SG10202006342YA (en) 2020-08-28

Family

ID=60893026

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10202006342YA SG10202006342YA (en) 2016-07-08 2017-06-30 Turntable cloth peeling jig
SG10201705377TA SG10201705377TA (en) 2016-07-08 2017-06-30 Turntable cloth peeling jig

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201705377TA SG10201705377TA (en) 2016-07-08 2017-06-30 Turntable cloth peeling jig

Country Status (2)

Country Link
US (1) US10730162B2 (en)
SG (2) SG10202006342YA (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106913257B (en) * 2017-03-23 2018-11-02 深圳饭来科技有限公司 Dyestripping batch charging mechanism
US11958281B2 (en) * 2021-09-03 2024-04-16 TSC International Products, LLC Removal tool for flooring planks

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US126818A (en) * 1872-05-14 Improvement in carpet-stretchers
US127303A (en) * 1872-05-28 Improvement in carpet-stretchers
US549341A (en) * 1895-11-05 Carpet stretcher and shaker
US138333A (en) * 1873-04-29 Improvement in carpet-stretchers
US812405A (en) * 1905-03-14 1906-02-13 Eugene Stuart Carothers Carpet-stretcher.
CA2087774C (en) * 1993-01-21 1998-08-18 Patrick Heavrin Carpet stripper
JPH10217149A (en) * 1997-02-05 1998-08-18 Ebara Corp Cloth exfoliating jig for turntable
JPH10217148A (en) 1997-02-05 1998-08-18 Ebara Corp Cloth exfoliating jig for turntable
US5891297A (en) * 1997-10-29 1999-04-06 Sharp Microelectronics Technology, Inc. System and method for peeling a polarized film
US6221199B1 (en) * 1999-02-03 2001-04-24 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for removing an adhesive bonded pad
US7096762B2 (en) 2003-10-20 2006-08-29 Tai-Her Yang Wrench driven rotation hand tool with side handle
US7299846B2 (en) * 2004-11-04 2007-11-27 Bridgestone Firestone North American Tire, Llc Tool for removing material strip from surface
JP2007075949A (en) 2005-09-14 2007-03-29 Ebara Corp Polishing platen and polishing device
KR20080072183A (en) * 2007-02-01 2008-08-06 삼성전자주식회사 Apparatus and method of separating film

Also Published As

Publication number Publication date
US20180009081A1 (en) 2018-01-11
US10730162B2 (en) 2020-08-04
SG10201705377TA (en) 2018-02-27

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