SG10202002618UA - Driving apparatus and conveying apparatus - Google Patents

Driving apparatus and conveying apparatus

Info

Publication number
SG10202002618UA
SG10202002618UA SG10202002618UA SG10202002618UA SG10202002618UA SG 10202002618U A SG10202002618U A SG 10202002618UA SG 10202002618U A SG10202002618U A SG 10202002618UA SG 10202002618U A SG10202002618U A SG 10202002618UA SG 10202002618U A SG10202002618U A SG 10202002618UA
Authority
SG
Singapore
Prior art keywords
conveying
driving
driving apparatus
conveying apparatus
Prior art date
Application number
SG10202002618UA
Inventor
Kanazawa Keiji
Original Assignee
Hirata Spinning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Spinning filed Critical Hirata Spinning
Publication of SG10202002618UA publication Critical patent/SG10202002618UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B25J19/0079—Means for protecting the manipulator from its environment or vice versa using an internal pressure system
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0093—Programme-controlled manipulators co-operating with conveyor means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
SG10202002618UA 2019-03-28 2020-03-20 Driving apparatus and conveying apparatus SG10202002618UA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019063991A JP6885980B2 (en) 2019-03-28 2019-03-28 Drive device and transfer device

Publications (1)

Publication Number Publication Date
SG10202002618UA true SG10202002618UA (en) 2020-10-29

Family

ID=72603985

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202002618UA SG10202002618UA (en) 2019-03-28 2020-03-20 Driving apparatus and conveying apparatus

Country Status (6)

Country Link
US (1) US11511441B2 (en)
JP (1) JP6885980B2 (en)
KR (1) KR102333378B1 (en)
CN (1) CN111745629B (en)
SG (1) SG10202002618UA (en)
TW (1) TWI728717B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022035763A (en) * 2020-08-21 2022-03-04 東京エレクトロン株式会社 Device for transporting substrate, system for processing substrate, and method for processing substrate

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105082B2 (en) * 1985-08-20 1994-12-21 株式会社東芝 Dust prevention mechanism
JPS62228394A (en) 1986-03-28 1987-10-07 株式会社東芝 Dust-discharge preventive device of robot for clean room
JPH0929682A (en) * 1995-07-11 1997-02-04 Canon Inc Sealing device and clean robot for clean environment apparatus
JPH10296666A (en) * 1997-04-24 1998-11-10 Musashino Eng:Kk Carrying robot
TW401582B (en) * 1997-05-15 2000-08-11 Tokyo Electorn Limtied Apparatus for and method of transferring substrates
US7641247B2 (en) * 2002-12-17 2010-01-05 Applied Materials, Inc. End effector assembly for supporting a substrate
CN100519095C (en) * 2005-09-30 2009-07-29 株式会社大亨 Conveying device
US8757026B2 (en) * 2008-04-15 2014-06-24 Dynamic Micro Systems, Semiconductor Equipment Gmbh Clean transfer robot
JP5491834B2 (en) * 2009-12-01 2014-05-14 川崎重工業株式会社 Edge grip device and robot including the same.
TWI540665B (en) * 2010-03-19 2016-07-01 Ｅｖ集團有限公司 Device and method for stripping a wafer from a carrier
CN101826452B (en) * 2010-03-30 2011-09-07 东莞宏威数码机械有限公司 Substrate uploading device
JP2012056034A (en) * 2010-09-09 2012-03-22 Sinfonia Technology Co Ltd Robot arm device
JP5549655B2 (en) * 2011-09-26 2014-07-16 株式会社安川電機 Hand and robot
KR101334690B1 (en) * 2011-11-15 2013-12-02 주식회사 로보스타 Particle leakage preventing apparatus of transfer robot
JP5500206B2 (en) 2012-06-01 2014-05-21 株式会社安川電機 Local robot with transport robot and transport robot
JP2014086472A (en) * 2012-10-19 2014-05-12 Sinfonia Technology Co Ltd Clamp device and workpiece conveyer robot
JP6101417B2 (en) 2012-12-28 2017-03-22 平田機工株式会社 Sealed structure and transfer robot equipped with the same
JP2015123551A (en) * 2013-12-26 2015-07-06 シンフォニアテクノロジー株式会社 Multijoint robot
JP2015123549A (en) 2013-12-26 2015-07-06 シンフォニアテクノロジー株式会社 Multi-articulated robot
JP6448239B2 (en) * 2014-07-16 2019-01-09 キヤノン株式会社 Rotation drive device and articulated robot

Also Published As

Publication number Publication date
JP6885980B2 (en) 2021-06-16
JP2020163485A (en) 2020-10-08
KR20200115130A (en) 2020-10-07
US20200306991A1 (en) 2020-10-01
US11511441B2 (en) 2022-11-29
CN111745629B (en) 2023-04-25
KR102333378B1 (en) 2021-12-01
CN111745629A (en) 2020-10-09
TW202037467A (en) 2020-10-16
TWI728717B (en) 2021-05-21

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