JP2012056034A - Robot arm device - Google Patents

Robot arm device Download PDF

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JP2012056034A
JP2012056034A JP2010202326A JP2010202326A JP2012056034A JP 2012056034 A JP2012056034 A JP 2012056034A JP 2010202326 A JP2010202326 A JP 2010202326A JP 2010202326 A JP2010202326 A JP 2010202326A JP 2012056034 A JP2012056034 A JP 2012056034A
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base body
internal space
flow path
base
robot arm
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Yasumichi Mieno
靖理 三重野
Yuji Urabe
雄士 占部
Koichi Hashimoto
浩一 橋本
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Sinfonia Technology Co Ltd
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Sinfonia Technology Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a robot arm device capable of preventing/inhibiting dust soaring inside a base body portion accompanying the rising operation of a lifting portion from being released upward from a clearance between the lifting portion and the base body portion without depending on the exhausting function of a fan or an exhaust port and the sealing function of a sealing member and restricting the ascending/descending speed of the lifting portion.SOLUTION: A base supporting an arm is constituted of the base body portion 3, the lifting portion 4 capable of ascending/descending to/from the base body portion 3 through an opening portion 3a formed in a ceiling wall 32 of the base body portion 3, and a flow path 6 communicated with the upper and lower parts of an internal space 3S of the base body portion 3 for circulating air in the internal space 3S. The opening cross section of an upper side flow path opening 61 of the flow path 6 communicated with the upper part of the internal space 3S of the base body portion 3 is set to be larger than the cross section of the clearance between the opening part 3a formed in the ceiling wall 32 and the lifting portion 4.

Description

本発明は、昇降可能なアームを備えたロボットアーム装置に関するものである。   The present invention relates to a robot arm device including an arm that can be moved up and down.

従来より、例えば複数のリンク要素を連結してなるアームの基端部をベース部(基台)に水平旋回可能に支持させたロボットアーム装置が知られている。ロボットアーム装置は、アーム全体を水平旋回させたり、リンク要素同士を関節部分で回転させてアームの全体形状を適宜変形させて、その先端部(エンドエフェクタ)でウェーハや液晶等の搬送対象物を保持して所定の場所(次工程の処理装置等)に搬送可能な搬送装置として機能し得るものである。   2. Description of the Related Art Conventionally, there has been known a robot arm device in which, for example, a base end portion of an arm formed by connecting a plurality of link elements is supported on a base portion (base) so as to be horizontally rotatable. The robot arm device rotates the entire arm horizontally or rotates the link elements together at the joint part to appropriately deform the entire shape of the arm, and at the tip (end effector), the transfer object such as a wafer or liquid crystal is transferred. It can function as a transport device that can be held and transported to a predetermined place (processing device for the next process, etc.).

そして、基台に対してアームが上下動し得るように昇降機構を備えたロボットアーム装置も開発され、既に実用化されている。このようなロボットアーム装置の一例としては、基台を、基台本体部と、アームの基端部を水平旋回可能に支持した状態で基台本体部に対して昇降可能な昇降部(昇降基台)とを用いて構成した態様が挙げられる(特許文献1参照)。   A robot arm device having an elevating mechanism so that the arm can move up and down with respect to the base has been developed and put into practical use. As an example of such a robot arm device, a base is supported by a base body and a lift part (lift base) that can be lifted and lowered with respect to the base body part while supporting the base end of the arm so as to be horizontally rotatable. The aspect comprised using the (base) is mentioned (refer patent document 1).

特開2002−166376号公報JP 2002-166376 A

ところで、基台本体部はカバー等によって外部から隔離した内部空間を形成しているが、昇降部の昇降動作によって内部空間に生じ得る埃(粉塵)等が、昇降部の上昇時に舞い上がり、昇降部のスムーズな昇降動作を確保するために昇降部と基台本体部との間に確保した隙間(基台本体部の天井壁に形成した開口部)から基台の外部へ放出され得る。このようなロボットアーム装置では、基台の周辺環境を基台本体部の内部空間内と同様にクリーンな雰囲気に保つ必要がある場面に用い難い。特にアームの先端部でウェーハ等の精密部品を保持して搬送する搬送装置として活用した場合には、昇降部と基台本体部との隙間(基台本体部に形成した開口部)から基台の外部へ放出された埃やごみ等が精密部品に付着するおそれがある。   By the way, although the base body part forms an internal space isolated from the outside by a cover or the like, dust (dust) that can be generated in the internal space by the lifting / lowering operation of the lifting / lowering part rises when the lifting / lowering part rises. In order to ensure a smooth ascending / descending operation, it can be discharged to the outside of the base from a gap (an opening formed in the ceiling wall of the base main body) secured between the lift and the base main body. In such a robot arm device, it is difficult to use the robot arm in a scene where it is necessary to keep the environment around the base as clean as in the internal space of the base main body. In particular, when used as a transfer device that holds and transfers precision parts such as wafers at the tip of the arm, the base from the gap (opening formed in the base main body) between the elevating part and the base main body There is a risk that dust, dust, etc. released to the outside of the product will adhere to precision parts.

このような不具合の発生を防止する態様としては、基台本体部の適宜箇所に排気口を形成したり、或いはファンを設けて、昇降部の上昇時における基台本体部内の気流の変動を抑制する態様(第1案)や、基台本体部の天井壁に形成した開口部の縁部にシール部材を設けた態様(第2案)や、昇降部の上昇速度自体を、昇降部の上昇時に埃等が舞い上がらない程度にまで遅く設定する態様(第3案)が考えられる。   As an aspect to prevent the occurrence of such a problem, an exhaust port is formed at an appropriate position of the base body part, or a fan is provided to suppress fluctuations in the air flow in the base body part when the lift part is raised. The mode (1st plan) to perform, the mode (2nd plan) which provided the sealing member in the edge of the opening part formed in the ceiling wall of the base body part, and the raising speed itself of the lifting part There can be considered a mode (third plan) in which the setting is slow enough that dust does not sometimes rise.

しかしながら、第1案であれば、基台外部の空気が排気口から基台本体部の内部空間に流れ込んだり、ファンの配置箇所によっては十分な排気性能を発揮し難いという問題がある。さらに、基台本体部の内部空間に配置する部材のうち昇降駆動用モータやネジ軸等の昇降機構を構成する各部材の配置が設計上優先的に決定される傾向にあるため、基台本体部におけるファンの配置箇所や排気口の形成箇所の設計自由度は大幅に限定され、また、ロボットアーム装置を設置現場に導入した状態において、排気口やファンと基台外部の部品や壁等との離間距離を十分に保っておかなければ十分な排気性能を発揮し難いため、排気性能を考慮した設置が要求されるという問題がある。   However, in the case of the first plan, there is a problem that air outside the base flows into the internal space of the base main body from the exhaust port, or it is difficult to exhibit sufficient exhaust performance depending on the location of the fan. Furthermore, the arrangement of the members constituting the elevating mechanism such as the elevating drive motor and screw shaft among the members arranged in the internal space of the base main body tends to be determined preferentially by design. The degree of freedom in designing the location of the fan and the location where the exhaust port is formed is greatly limited, and with the robot arm device installed at the installation site, the exhaust port, fan, parts outside the base, walls, etc. Since it is difficult to exhibit sufficient exhaust performance unless the separation distance is sufficiently maintained, there is a problem that installation in consideration of exhaust performance is required.

また、第2案であれば、シール部材が摩耗等によって所期のシール機能を発揮し得ない状態になった場合には基台本体部の内部空間の埃等が基台外部へ放出され易くなる。そこで、シール部材の摩耗を低減するために、昇降部の昇降速度を遅く設定した場合には、ロボットアーム装置として機能低下を招来し、また、耐久性の高いシール部材を適用した場合にはコスト高となり易い。そして、昇降部の上昇速度を遅く設定するという第3案においても、やはりロボットアーム装置としての機能が低下してしまう。   Further, in the case of the second plan, when the sealing member becomes unable to perform the desired sealing function due to wear or the like, dust or the like in the internal space of the base body is easily released to the outside of the base. Become. Therefore, in order to reduce the wear of the seal member, if the raising / lowering speed of the raising / lowering part is set to be slow, the function of the robot arm device will be lowered, and if a highly durable seal member is applied, the cost will be reduced. It tends to be high. Even in the third plan in which the ascending speed of the elevating unit is set to be slow, the function as the robot arm device is also degraded.

本発明は、このような問題に着目してなされたものであって、主たる目的は、ファンや排気口による排気機能や、シール部材によるシール機能に依存することなく、しかもロボットアーム装置としての機能低下を招来し得る昇降部の昇降速度制限を考慮することなく、昇降部の上昇動作に伴って基台本体部内で舞い上がる粉塵が昇降部と基台本体部との隙間から上方へ放出されることを防止・抑制可能なロボットアーム装置を提供することにある。   The present invention has been made paying attention to such problems, and its main purpose is not to depend on an exhaust function by a fan or an exhaust port or a seal function by a seal member, and also functions as a robot arm device. Without taking into consideration the lifting speed limitation of the lifting part that may cause a drop, dust that rises in the base body part as the lifting part moves up is released upward from the gap between the lifting part and the base body part An object of the present invention is to provide a robot arm device capable of preventing and suppressing the above.

すなわち本発明は、先端側にエンドエフェクタを備えたアームと、このアームを支持する基台とを備え、基台を、基台本体部と、基台本体部の天井壁に形成した開口部を通じて少なくとも下側領域を基台本体部の内部空間に収容した状態で基台本体部に対して昇降可能な昇降部とを用いて構成したロボットアーム装置に関するものである。   That is, the present invention includes an arm having an end effector on the distal end side and a base that supports the arm, and the base is formed through a base body and an opening formed in the ceiling wall of the base body. The present invention relates to a robot arm device configured by using an elevating unit that can be moved up and down with respect to the base body in a state where at least the lower region is accommodated in the internal space of the base body.

そして、本発明のロボットアーム装置は、基台本体部の内部空間の上部及び下部に連通して内部空間の空気を循環させる流路を有する空気循環装置をさらに備え、流路のうち少なくとも内部空間の上部に連通する上側流路口の開口断面積を、天井壁に形成した開口部と昇降部とのクリアランスの断面積よりも大きく設定したことを特徴としている。   The robot arm device of the present invention further includes an air circulation device having a flow path that circulates air in the internal space in communication with the upper and lower portions of the internal space of the base body, and at least the internal space of the flow paths. The opening cross-sectional area of the upper channel port communicating with the upper part of the upper wall is set to be larger than the cross-sectional area of the clearance between the opening formed on the ceiling wall and the elevating part.

このようなロボットアーム装置であれば、空気循環装置の流路を通じて基台本体部の内部空間における気流が循環し易くなり、特に、上側流路口の開口断面積を天井壁に形成した開口部と昇降部との隙間の断面積よりも大きく設定したことによって、昇降部の上昇時に基台本体部の内部空間で生じる上昇気流に沿って上方に向かって流れた空気を上側流路口から流路内へスムーズに案内することができる。その結果、昇降部の昇降動作によって基台本体部の内部空間に発生し粉塵が昇降部の上昇時に基台本体部の内部空間で生じる上昇気流に沿って舞い上がった場合に、この粉塵を上側流路口を通じて基台本体の内部空間から流路内へ流通させることができ、基台本体部の天井壁に形成した開口部と昇降部との隙間から粉塵が基台の外部へ放出される事態を防止・抑制することができる。   With such a robot arm device, the air flow in the internal space of the base body portion can easily circulate through the flow path of the air circulation device, and in particular, an opening portion in which the opening cross-sectional area of the upper flow path port is formed in the ceiling wall By setting it larger than the cross-sectional area of the gap with the lifting / lowering section, the air flowing upward along the rising air flow generated in the internal space of the base body section when the lifting / lowering section is lifted is transferred from the upper flow path opening into the flow path. Can guide you smoothly. As a result, when dust is generated in the internal space of the base body due to the lifting / lowering operation of the lifting / lowering section and dust rises along the rising air flow generated in the internal space of the base body when the lifting / lowering section is raised, the dust flows upward. It can be circulated from the internal space of the base body through the roadway into the flow path, and dust is released to the outside of the base through the gap between the opening and the lifting part formed in the ceiling wall of the base body. It can be prevented / suppressed.

したがって、このような空気循環装置を備えたロボットアーム装置を、アームの先端部でウェーハ等の精密部品を保持して搬送する搬送装置して適用した場合には、搬送工程でウェーハ等の精密部品に埃等が不用意に付着するおそれなしに、所望の搬送処理能力を充分に発揮することができる。   Therefore, when the robot arm device provided with such an air circulation device is applied as a transfer device that holds and transfers a precision component such as a wafer at the tip of the arm, the precision component such as a wafer in the transfer process. It is possible to sufficiently exhibit the desired conveyance processing capacity without fear that dust or the like will inadvertently adhere to the surface.

特に、本発明のロボットアーム装置において、流路に、この流路内の塵埃が上側流路口から内部空間へ流れ込むことを防止する流通調整手段を設ければ、内部空間における下部に存在する粉塵や、流路のうち内部空間の下部に連通する下側流路口近傍に存在する粉塵が、昇降部の下降時に基台本体部内の内部空間や流路内で生じる気流によって流路の流路口から内部空間へ循環することを適切に防止することができ、これにより、基台本体部の天井壁に形成した開口部と昇降部との隙間から粉塵が基台の外部へ放出される事態をより一層効果的に防止・抑制することができる。ここで、流通調整手段としては、フィルタや逆止弁を挙げることができる。   In particular, in the robot arm device of the present invention, if a flow adjusting means for preventing dust in the flow path from flowing into the internal space from the upper flow path port is provided in the flow path, The dust existing in the vicinity of the lower flow passage opening communicating with the lower portion of the internal space of the flow passage is internalized from the flow passage opening of the flow passage by the air flow generated in the internal space or flow passage in the base body when the elevating part is lowered. It is possible to appropriately prevent the circulation to the space, and this further increases the situation in which dust is released to the outside of the base from the gap between the opening formed on the ceiling wall of the base body and the lifting part. It can be effectively prevented and suppressed. Here, examples of the flow adjusting means include a filter and a check valve.

そして、本発明のロボットアーム装置では、基台本体部の内部空間内の空気が空間循環装置の流路を通じて流れ易く(循環し易く)なり、昇降部の上昇移動時に上方に押し出される空気の流れによって内部空間内において舞い上がった粉塵は、流路を通じて循環する空気の流れに沿って下方に向かう。その結果、昇降部の上昇時に基台本体部の内部空間内の粉塵が昇降部と基台本体との隙間(天井壁に形成した開口部)から基台の外部へ放出されることを効果的に防止・抑制することができる。   In the robot arm device of the present invention, the air in the internal space of the base main body easily flows through the flow path of the space circulation device (is easy to circulate), and the air flow pushed upward when the lifting unit moves upward. The dust that soars in the internal space is directed downward along the flow of air circulating through the flow path. As a result, it is effective that dust in the internal space of the base body is released to the outside of the base from the gap (opening formed in the ceiling wall) between the lift and the base body when the lift is raised. Can be prevented and suppressed.

本発明によれば、基台本体部の内部空間に連通する流路を形成し、昇降部の上昇時には基台本体部の内部空間における空気をこの流路を通じて循環させることによって、昇降部の上昇時に基台本体部の内部空間の粉塵が舞い上がって基台の外部に放出され得るという不具合を抑制、防止することができる。また、本発明によれば、基台本体部の適宜箇所に排気口やファン、或いはシール部材を設けたり、或いは昇降部の上昇速度を遅く設定する必要がないため、ロボットアーム装置の設置場所が限定されたり、ロボットアーム装置の機能低下を招来するといった上述の不具合を悉く解決することができる。   According to the present invention, the flow path communicating with the internal space of the base body part is formed, and when the lift part is lifted, the air in the internal space of the base body part is circulated through this flow path, thereby raising the lift part. It is possible to suppress or prevent the problem that dust in the internal space of the base body part sometimes rises and can be discharged to the outside of the base. In addition, according to the present invention, it is not necessary to provide an exhaust port, a fan, or a seal member at an appropriate position of the base body, or to set a lowering speed of the lifting unit. It is possible to solve the above-mentioned inconveniences such as being limited or causing a decrease in the function of the robot arm device.

本発明の一実施形態に係る空気循環装置が適用可能なロボットアーム装置の全体概略図。1 is an overall schematic diagram of a robot arm device to which an air circulation device according to an embodiment of the present invention is applicable. 同実施形態に係る空気循環装置を適用したロボットアーム装置における昇降部上昇時の作用説明図。Explanatory drawing at the time of the raising / lowering part raising in the robot arm apparatus to which the air circulation apparatus which concerns on the same embodiment is applied. 図2の要部拡大図。The principal part enlarged view of FIG.

以下、本発明の一実施形態を、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

本実施形態に係る空気循環装置Rは、図1に示すようなロボットアーム装置Xに適用可能なものである。なお、図1では空気循環装置Rを省略している。   The air circulation device R according to the present embodiment is applicable to a robot arm device X as shown in FIG. In FIG. 1, the air circulation device R is omitted.

先ず、図1に示すロボットアーム装置Xについて説明する。このロボットアーム装置Xは、複数のリンク要素(第1リンク要素A、第2リンク要素B、エンドエフェクタC)から構成されたアーム1と、アーム1を支持する基台2とを備えたものである。   First, the robot arm device X shown in FIG. 1 will be described. This robot arm device X includes an arm 1 composed of a plurality of link elements (first link element A, second link element B, end effector C), and a base 2 that supports the arm 1. is there.

アーム1は、例えば、アーム1のうち最も基端側(基台2側)に配置した第1リンク要素Aと、第1リンク要素Aの先端部に水平旋回可能に連結した第2リンク要素Bと、第2リンク要素Bの先端部に水平旋回可能に連結したエンドエフェクタCとを備えたものである。このアーム1は、アーム長が最大になる伸長状態(図1参照)と、アーム長が最小になる折畳状態(図示省略)との間で形状が変わるリンク構造(多関節構造)のものである。なお、このロボットアーム装置Xは、図示しないシータ軸を介してアーム1と基台2とを連結している。本実施形態では、シータ軸を介して第1リンク要素Aの基端部を基台2に連結し、エンドエフェクタCの先端部に形成した吸着用エア供給口Caから供給される吸着用エアによって搬送対象物を吸着可能に構成している。なお、エンドエフェクタの形状は図1に示すフォーク状のものに限られず、他の適宜の形状のものであってもよい。   The arm 1 includes, for example, a first link element A disposed on the most proximal side (base 2 side) of the arm 1 and a second link element B coupled to the distal end portion of the first link element A so as to be horizontally rotatable. And an end effector C coupled to the tip of the second link element B so as to be horizontally rotatable. This arm 1 has a link structure (multi-joint structure) whose shape changes between an extended state (see FIG. 1) where the arm length is maximum and a folded state (not shown) where the arm length is minimum. is there. The robot arm apparatus X connects the arm 1 and the base 2 via a theta shaft (not shown). In the present embodiment, the base end portion of the first link element A is connected to the base 2 via the theta shaft, and the suction air supplied from the suction air supply port Ca formed at the front end portion of the end effector C is used. The conveyance object is configured to be suckable. The shape of the end effector is not limited to the fork shape shown in FIG. 1, but may be any other appropriate shape.

基台2は、基台本体部3と、シータ軸を介してアーム1の基端部(第1リンク要素Aの基端部)を水平旋回可能に支持した状態で基台本体部3に対して昇降可能な昇降部4とを備えたものである。なお、図2ではアーム1を省略している。   The base 2 supports the base main body 3 and the base main body 3 in a state where the base end of the arm 1 (the base end of the first link element A) is supported via a theta shaft so as to be horizontally rotatable. And an elevating part 4 that can be raised and lowered. In FIG. 2, the arm 1 is omitted.

基台本体部3は、底壁31と、昇降部4の昇降動作を許容する開口部3aを有する天井壁32と、これら底壁31と天井壁32との間に起立姿勢で配置した起立壁33と、起立壁33と対向するように配置される正面壁34と、起立壁33及び正面壁34の対応する側端同士間に配置される左右の両側壁35とを備え、これら各壁(底壁31、天井壁32、起立壁33、正面壁34、左右両側壁35)によって囲まれる閉空間(本発明の「内部空間」に相当し、以下「内部空間3S」と称する)を有するものである。図1では、天井壁32及び両側壁35の一部を第1カバー36によって構成した態様を例示しているが、図2では、説明の便宜上、第1カバー36を無視して天井壁32及び両側壁35を単純化して示し、これら各壁32、35及び底壁31の厚みを省いている。また、図1では、底壁31の前後方向中央部近傍に起立壁33を配置し、起立壁33を挟んで正面壁34と対向するように配置される背面壁を有する第2カバー37を備えた態様を例示している。   The base body 3 includes a bottom wall 31, a ceiling wall 32 having an opening 3 a that allows the lifting unit 4 to move up and down, and a standing wall disposed in a standing posture between the bottom wall 31 and the ceiling wall 32. 33, a front wall 34 disposed so as to face the standing wall 33, and left and right side walls 35 disposed between corresponding side ends of the standing wall 33 and the front wall 34. A closed space (corresponding to the “internal space” of the present invention, hereinafter referred to as “internal space 3S”) surrounded by the bottom wall 31, the ceiling wall 32, the standing wall 33, the front wall 34, and the left and right side walls 35). It is. In FIG. 1, an example in which a part of the ceiling wall 32 and both side walls 35 is configured by the first cover 36 is illustrated. However, in FIG. 2, for convenience of explanation, the ceiling wall 32 and the first cover 36 are ignored. Both side walls 35 are shown in a simplified manner, and the thickness of each of the walls 32 and 35 and the bottom wall 31 is omitted. Further, in FIG. 1, a standing wall 33 is arranged in the vicinity of the center portion in the front-rear direction of the bottom wall 31, and a second cover 37 having a back wall arranged to face the front wall 34 across the standing wall 33 is provided. The embodiment is illustrated.

昇降部4は、内部に閉空間41Sを有する昇降部本体41を主体としてなり、少なくとも下側領域を基台本体部3の内部空間3Sに収容した状態で所定の最上昇位置と最下降位置との間で昇降移動可能なものである。昇降部本体41の内部空間41Sは基台本体部3の内部空間3Sとは隔離される空間である。   The elevating part 4 is mainly composed of an elevating part main body 41 having a closed space 41S inside, and at least a lower region is stored in the internal space 3S of the base main body part 3 with a predetermined highest rising position and a lowest lowering position. Can be moved up and down. The internal space 41 </ b> S of the lift body 41 is a space that is isolated from the internal space 3 </ b> S of the base body 3.

本実施形態のロボットアーム装置Xでは、この昇降部4を昇降部本体3に対して昇降移動させる昇降機構として、ボールネジ機構やベルト機構等、種々の機構を適用することができる。図2では、昇降機構のうち、昇降部4を支持した状態で昇降軸(図示省略)に沿って上下動可能な可動部5を模式的に示している。   In the robot arm apparatus X of the present embodiment, various mechanisms such as a ball screw mechanism and a belt mechanism can be applied as an elevating mechanism that moves the elevating unit 4 up and down relative to the elevating unit body 3. In FIG. 2, the movable part 5 which can move up and down along a raising / lowering axis | shaft (illustration omitted) in the state which supported the raising / lowering part 4 among the raising / lowering mechanisms is shown typically.

このような構成を有するロボットアーム装置Xは、第1リンク要素A、第2リンク要素B、エンドエフェクタCをシータ軸やリンク要素同士の連結部に設けた旋回軸周りに水平旋回させてアーム1全体の形状(姿勢)を適宜変形させることができる。そして、このロボットアーム装置Xは、エンドエフェクタC上にウェーハ等の搬送対称物を保持して搬送する際に、図示しない吸着切替ユニットをエア供給可能状態にして、エンドエフェクタCの吸着用エア供給口Caから供給される負圧エアによって搬送対称物をエンドエフェクタC上に吸引して保持することができる状態(吸着ON状態)になる。また、ロボットアーム装置Xは、吸着ON状態を維持したままアーム1を適宜変形させて搬送対象物を所定の搬送位置まで搬送した時点で、吸着切替ユニットをエア供給可能状態からエア供給停止状態に切り替えると、エンドエフェクタCの吸着用エア供給口Caからの負圧エア供給動作を停止して搬送対象物の吸引保持状態を解除する状態(吸着OFF状態)になる。   In the robot arm device X having such a configuration, the first link element A, the second link element B, and the end effector C are horizontally swiveled around a swivel axis provided at a connecting portion between the theta shaft and the link elements. The overall shape (posture) can be appropriately changed. When the robot arm device X holds and conveys a transfer object such as a wafer on the end effector C, the robot arm device X makes a suction switching unit (not shown) ready to supply air and supplies the suction air to the end effector C. A state in which the conveyance symmetry object can be sucked and held on the end effector C by the negative pressure air supplied from the port Ca (adsorption ON state) is obtained. Further, the robot arm device X changes the arm 1 appropriately while maintaining the suction ON state, and when the transport target is transported to a predetermined transport position, the suction switching unit is changed from the air supply enabled state to the air supply stop state. When switched, the negative pressure air supply operation from the suction air supply port Ca of the end effector C is stopped, and the suction holding state of the conveyance object is released (adsorption OFF state).

このように、本実施形態に係るロボットアーム装置Xは、吸着切替ユニットをエア供給可能状態とエア供給停止状態との間で切り替えることによって、吸着ON状態または吸着OFF状態となり、エンドエフェクタC上に吸着保持した搬送対象物を好適に搬送することができる。   As described above, the robot arm device X according to the present embodiment is switched to the suction ON state or the suction OFF state by switching the suction switching unit between the air supply enabled state and the air supply stop state, and is placed on the end effector C. The conveyance object held by suction can be suitably conveyed.

また、本実施形態に係るロボットアーム装置Xは、昇降部4を昇降移動させることによってアーム1全体を上下動させることができる。具体的には、昇降機構が作動することによって可動部5に支持されている昇降部4が、基台本体部3の天井壁32に形成した開口部3aを通じて昇降移動し、この昇降部4に支持されているアーム1が上下動する。   The robot arm device X according to the present embodiment can move the entire arm 1 up and down by moving the lifting unit 4 up and down. Specifically, the elevating part 4 supported by the movable part 5 by the operation of the elevating mechanism moves up and down through the opening 3 a formed in the ceiling wall 32 of the base body part 3. The supported arm 1 moves up and down.

そして、本実施形態に係るロボットアーム装置Xは、図2に示すように、基台本体部3の内部空間3Sの上部及び下部に連通する流路6を備えた空気循環装置Rを基台本体部3に付帯させている。   As shown in FIG. 2, the robot arm device X according to this embodiment includes an air circulation device R including a flow path 6 communicating with the upper and lower portions of the internal space 3 </ b> S of the base body 3. It is attached to part 3.

空気循環装置Rは流路6を主体としてなり、本実施形態では管を用いて流路6を構成している。流路6の一端部は、基台本体部3の内部空間3Sのうち上部に連通する上側流路口61として機能し、流路の他端部は、基台本体部3の内部空間3Sのうち下部に連通する下側流路口62として機能する。そして、図2の要部拡大模式図である図3に示すように、上側流路口61の開口断面積(上側流路口61の内径61rに相当)を、天井壁32の開口部3aと昇降部4との隙間Sの断面積よりも大きく設定している。このような流路6からなる空気循環装置Rを基台本体部3に設けることによって、本実施形態に係るロボットアーム装置Xは、昇降部4の上昇時に基台本体部3の内部空間3Sで生じる上昇気流に沿って上方に向かって流れた空気を、昇降部4と基台本体部3の天井壁32の開口部3aとの隙間Sよりも優先して上側流路口61から流路6内へ向かわせることができ、流路6を通じて内部空間3Sの空気が循環し易くなる(図2参照、同図において基台本体部3の内部空間3S中に示す矢印は昇降部4の上昇時の空気の流れを模式的に示すものである)。なお、本実施形態では、下側流路口62の開口断面積を上側流路口61と同一に設定している。   The air circulation device R is mainly composed of the flow path 6, and in this embodiment, the flow path 6 is configured using a pipe. One end of the flow path 6 functions as an upper flow path port 61 communicating with the upper part of the internal space 3S of the base body 3 and the other end of the flow path is within the internal space 3S of the base body 3. It functions as a lower channel port 62 communicating with the lower part. Then, as shown in FIG. 3, which is an enlarged schematic view of the main part of FIG. 2, the opening cross-sectional area of the upper flow passage port 61 (corresponding to the inner diameter 61r of the upper flow passage port 61) is set to the opening 3a of the ceiling wall 32 and the lifting portion. 4 is set to be larger than the cross-sectional area of the gap S. By providing the air circulation device R composed of such a flow path 6 in the base body 3, the robot arm device X according to the present embodiment can move in the internal space 3 </ b> S of the base body 3 when the lift 4 is lifted. The air that has flowed upward along the rising airflow generated is given priority over the gap S between the lifting portion 4 and the opening 3a of the ceiling wall 32 of the base body portion 3 from the upper flow passage opening 61 into the flow passage 6. The air in the internal space 3S can be easily circulated through the flow path 6 (see FIG. 2, the arrow shown in the internal space 3S of the base body 3 in the figure indicates when the elevating unit 4 is raised) It shows the air flow schematically). In the present embodiment, the opening cross-sectional area of the lower flow path port 62 is set to be the same as that of the upper flow path port 61.

特に、本実施形態では、基台本体部3のうち左右の両側壁35にそれぞれ別々の流路6を設けているため、起立壁33の幅方向中央部33cを境にした左側領域と右側領域で均等に空気が流れ易くなる。その結果、基台本体部3の内部空間3Sに一部を収容した昇降部4が天井壁32の開口部3aを通じて昇降移動する際に、基台本体部3の内部空間3Sにおいて昇降部4の上昇移動に伴って一旦上方へ向かって流れる空気は、図2に示すように、流路6の上側流路口61を通じて流路6内に向かい、そのまま下側流路口62から基台本体部3の内部空間3Sに流れる。また、昇降部4の昇降軸(例えば昇降機構をボールネジ機構で構成した場合にはネジ軸に相当)を、基台本体部3の内部空間3Sの左右幅方向の中央部(本実施形態における起立壁33の幅方向中央部33cに相当)と一致させ、この昇降部4の昇降軸を境に流路6を左右対称に配置するとともに、基台本体部3の内部空間3Sに配置される機構(例えば昇降機構)や部品(例えば可動部5等)も昇降部4の昇降軸を境に左右対称に配置すれば、昇降部4が上昇移動した場合に、基台本体部3の内部空間3Sにおいて空気が昇降軸を境にした左側領域と右側領域で均等に流れて、各流路6へスムーズ且つ適切に導かれる。   In particular, in the present embodiment, since the separate flow paths 6 are provided in the left and right side walls 35 of the base body 3, the left region and the right region with the central portion 33 c in the width direction of the standing wall 33 as a boundary. This makes it easier for air to flow evenly. As a result, when the lifting / lowering part 4 partially accommodated in the internal space 3S of the base body 3 moves up and down through the opening 3a of the ceiling wall 32, the lifting / lowering part 4 in the internal space 3S of the base body 3 is provided. As shown in FIG. 2, the air that once flows upward along with the upward movement is directed into the flow path 6 through the upper flow path port 61 of the flow path 6, and directly from the lower flow path port 62 to the base body 3. It flows into the internal space 3S. Further, a lifting shaft (equivalent to a screw shaft when the lifting mechanism is configured by a ball screw mechanism) of the lifting / lowering section 4 is set to a central portion in the left-right width direction of the internal space 3S of the base body 3 (standing in the present embodiment). The flow path 6 is arranged symmetrically with respect to the elevating axis of the elevating part 4 and the mechanism is arranged in the internal space 3S of the base body part 3. (E.g., an elevating mechanism) and parts (e.g., the movable unit 5) are also arranged symmetrically with respect to the elevating axis of the elevating unit 4, so that when the elevating unit 4 moves up, the internal space 3S of the base body 3 is increased. The air flows evenly in the left region and the right region with the elevating shaft as a boundary, and is smoothly and appropriately guided to each flow path 6.

さらに、本実施形態に係る空気循環装置Rは、流路6のうち、上側流路口61近傍に、流路6内の塵埃が上側流路口61から基台本体部3の内部空間3Sへ流れ込むことを防止する流通調整手段63を設けている。本実施形態では、流通防止手段63としてフィルターを適用しているが、フィルターに代えて、または加えて逆止弁を適用することもできる。   Furthermore, in the air circulation device R according to the present embodiment, dust in the flow path 6 flows into the internal space 3S of the base body 3 from the upper flow path opening 61 in the vicinity of the upper flow path opening 61 in the flow path 6. The distribution adjusting means 63 for preventing the above is provided. In this embodiment, a filter is applied as the flow preventing means 63, but a check valve may be applied instead of or in addition to the filter.

以上のような構成を有する本実施形態に係るロボットアーム装置Xは、昇降部4の昇降動作に伴って生じ得る不具合、すなわち、昇降部4の昇降動作によって基台本体部3の内部空間3Sに生じる粉塵が、昇降部4の上昇動作に伴って基台本体部3の内部空間3Sにおいて舞い上がり、そのまま基台本体部3の天井壁32に形成した開口部3aと昇降部4との隙間Sから内部空間3S外へ押し出されて放出し、搬送対象物に付着してしまうという事態を、排気口やファンによる排気機能やシール部材によるシール機能に依存することなく好適に回避・抑制することができる。しかも、本実施形態に係るロボットアーム装置Xでは、昇降部3の上昇速度を粉塵が舞い上がらない程度に遅く設定する必要もないため、上昇速度制限に伴う搬送処理能力の低下を招来するおそれもない。   The robot arm device X according to the present embodiment having the above-described configuration has a problem that may occur with the lifting / lowering operation of the lifting / lowering unit 4, that is, the lifting / lowering operation of the lifting / lowering unit 4 in the internal space 3 </ b> S of the base body 3. The generated dust rises in the internal space 3 </ b> S of the base main body 3 with the ascending operation of the lifting / lowering unit 4, and from the gap S between the opening 3 a formed in the ceiling wall 32 of the base main body 3 and the lift 4. The situation of being pushed out and released outside the internal space 3S and adhering to the object to be conveyed can be suitably avoided / suppressed without depending on the exhaust function by the exhaust port or the fan or the seal function by the seal member. . In addition, in the robot arm device X according to the present embodiment, it is not necessary to set the ascending speed of the elevating unit 3 so slow that dust does not rise, so there is no possibility of causing a decrease in conveyance processing capacity due to the ascent speed limitation. .

また、本実施形態に係るロボットアーム装置Xは、流路6のうち、上側流路口61近傍に流通調整手段63を設けているため、例えば流路6内(特に下側流路口62近傍)や基台本体部3の内部空間3Sの下側領域に滞留し得る粉塵が、昇降部4が下降する際に上側流路口61へ向かって舞い上がった場合であっても、この粉塵を流通調整手段63で捕捉(濾過処理或いは分別処理)されて上側流路口61から基台本体部3の内部空間3Sへ流れ込むことを確実に防止することができる。   In addition, since the robot arm device X according to the present embodiment includes the flow adjusting means 63 in the vicinity of the upper flow path port 61 in the flow path 6, for example, in the flow path 6 (particularly in the vicinity of the lower flow path port 62) Even if the dust that can stay in the lower region of the internal space 3S of the base body 3 rises toward the upper flow path port 61 when the elevating part 4 is lowered, the dust is distributed to the flow adjusting means 63. Therefore, it is possible to reliably prevent the gas from being trapped (filtering process or separation process) and flowing into the internal space 3 </ b> S of the base body 3 from the upper flow path port 61.

なお、本発明は上述した実施形態に限定されるものではない。例えば、1つ或いは3つ以上の流路を備えたロボットアーム装置とすることもできる。また、上述の実施形態では基台本体部の内部空間を基台の外部空間と仕切り得る仕切り壁のうち、側壁に流路を設けた態様を例示したが、側壁以外の仕切り壁(起立壁や正面壁)に流路を設けてもよい。さらには、基台本体部の内部空間を基台の外部空間と仕切り得る仕切り壁と流路とを一体に形成した態様を採用することもできる。   In addition, this invention is not limited to embodiment mentioned above. For example, a robot arm device including one or three or more flow paths can be used. Moreover, in the above-described embodiment, the aspect in which the flow path is provided in the side wall among the partition walls that can partition the internal space of the base body portion from the external space of the base is illustrated. You may provide a flow path in a front wall. Furthermore, a mode in which a partition wall and a flow path that can partition the internal space of the base body portion from the external space of the base are integrally formed may be employed.

また、流路の全長や外観形状(上述の実施形態で示した略コの字状以外の形状、例えば部分円弧状等)は適宜変更することができ、何れの流路であっても、少なくとも上側流路口の開口断面積を、天井壁に形成した開口部と昇降部との隙間の断面積よりも大きく設定すればよい。   In addition, the overall length and appearance of the flow channel (a shape other than the substantially U-shape shown in the above-described embodiment, such as a partial arc shape) can be changed as appropriate. What is necessary is just to set the opening cross-sectional area of an upper channel opening larger than the cross-sectional area of the clearance gap between the opening part formed in the ceiling wall, and the raising / lowering part.

また、流路内において流通調整手段を設ける箇所は、流路の全長(流路長)の中間点よりも上側流路口側の箇所であることが好ましく、上側流路口の直近に設けなくてもよい。もちろん、流通調整手段を流路の全長(流路長)の中間点よりも下側流路口側の箇所に設けた態様も本発明に包含される。   Further, the location where the flow adjusting means is provided in the flow channel is preferably a location closer to the upper flow channel port than the middle point of the total length (flow channel length) of the flow channel, and it is not necessary to provide it near the upper flow channel port. Good. Of course, an embodiment in which the flow adjusting means is provided at a location on the lower channel opening side with respect to the intermediate point of the entire length of the channel (channel length) is also included in the present invention.

また、複数の管を用いて1つの流路を構成することもできる。この場合、管同士をジョイント等の適宜の接続部材で接続すればよい。さらには、管以外の部材を用いて流路を構成することも可能である。管以外の部材を用いて流路を構成する場合、断面積に関する要件、つまり、流路のうち少なくとも基台本体部の内部空間の上部に連通する上側流路口の開口断面積を、基台本体部の天井壁に形成した開口部と昇降部との隙間の断面積よりも大きく設定するという要件を満たしさえすればどのような構成であってもよく、例えば平板を組み合わせて流路を構成したり、平板に形成した溝によって流路を構成することができる。   Moreover, one flow path can also be configured using a plurality of tubes. In this case, the tubes may be connected by an appropriate connection member such as a joint. Furthermore, it is also possible to configure the flow path using a member other than the pipe. When a flow path is configured using a member other than a pipe, the requirements related to the cross-sectional area, that is, the opening cross-sectional area of the upper flow path port communicating with at least the upper part of the internal space of the base main body portion of the flow path, Any configuration is acceptable as long as it satisfies the requirement of setting the cross-sectional area larger than the gap between the opening formed on the ceiling wall of the unit and the lifting unit.For example, a flow path is configured by combining flat plates. Alternatively, the flow path can be constituted by a groove formed in a flat plate.

また、空気循環装置が、流路に加えて、基台本体部のうち適宜箇所(例えば昇降部の直下に相当する領域等)に設けた排気口やファンを備えたものであってもよい。このような態様であれば、基台本体部の内部空間において循環する空気や粉塵を基台本体部の外部へ効率良く排出することができる。そして、昇降部の昇降移動時に、この上昇移動に伴って上方へ流れる空気の量(速度)よりも、排気口及びファンを通じて基台本体部外へ流れる空気の量(速度)が多く(速く)なるように設定することにより、内部空間に存在する粉塵が空気と共に天井壁の開口部と昇降部との隙間から内部空間外へ噴き出されて搬送対象物に付着してしまう不具合を有効に防止することができる。   In addition to the flow path, the air circulation device may be provided with an exhaust port or a fan provided at an appropriate position (for example, a region corresponding to a position directly below the lifting unit) in the base main body. If it is such an aspect, the air and dust which circulate in the internal space of a base main-body part can be efficiently discharged | emitted to the exterior of a base main-body part. And, when the lifting part moves up and down, the amount (speed) of the air flowing out of the base body through the exhaust port and the fan is larger (faster) than the amount (speed) of the air flowing upward along with the upward movement. By setting so as to be effective, it is possible to effectively prevent the dust existing in the internal space from being ejected from the gap between the opening of the ceiling wall and the elevating part together with the air and adhering to the object to be transported. can do.

また、昇降部の下降時に基台本体部の内部空間における下方領域や流路の下側流路口近傍に存在する粉塵が舞い上がって流路の上側流路口から基台本体部の内部空間に流れ込むおそれがない場合には、流通調整手段を設けなくてもよい。   In addition, when the elevating part is lowered, there is a risk that dust existing in the lower area in the internal space of the base body part or in the vicinity of the lower flow path port of the flow path may flow up and flow into the internal space of the base body part from the upper flow path port of the flow path If there is no distribution adjustment means, the distribution adjustment means may not be provided.

また、上述した実施形態では、基台本体部の内部空間を外部と仕切り得る各壁(仕切り壁)のうち、天井壁及び側壁の一部、正面壁全体を、底壁に対して着脱可能な共通のカバー(第1カバー)によって形成した態様を例示したが、それぞれ別体のカバーで各仕切り壁を形成したり、或いはカバーを用いることなく仕切り壁を形成することも可能である。   Moreover, in embodiment mentioned above, among each wall (partition wall) which can partition the internal space of a base main-body part from the exterior, a part of ceiling wall, a side wall, and the whole front wall can be attached or detached with respect to a bottom wall. Although the aspect formed with the common cover (1st cover) was illustrated, it is also possible to form each partition wall with a separate cover, respectively, or to form a partition wall without using a cover.

また、例えば、吸着用エア供給口から低圧エアを供給するリンク式ロボットアーム装置であってもよい。この場合、吸着用エア供給口から吐出される低圧エアをエンドエフェクタの表面に沿って流すことで、搬送対象物とエンドエフェクタを近付けた際に、搬送対象物とエンドエフェクタとの隙間に負圧が生じ、大気圧との圧力差によって搬送対象物に働くエンドエフェクタ側に向かう力を利用して搬送対象物を吸着することができる(ベルヌーイ効果を利用したいわゆる「ベルヌーイ保持」)。   Further, for example, a link type robot arm device that supplies low-pressure air from the suction air supply port may be used. In this case, when low pressure air discharged from the suction air supply port flows along the surface of the end effector, a negative pressure is applied to the gap between the conveyance object and the end effector when the conveyance object and the end effector are brought close to each other. Is generated, and the object to be conveyed can be adsorbed using a force toward the end effector acting on the object to be conveyed due to a pressure difference from the atmospheric pressure (so-called “Bernoulli holding” using the Bernoulli effect).

また、アームを構成するリンク要素の数や長さは適宜変更してもよく、リンク要素同士を、水平旋回動作に代えて、或いは加えて、鉛直面内で旋回(回転)する(縦振り)動作可能に連結したり、スライド動作可能に連結してもよい。さらには、エンドエフェクタの形状、或いは吸着用エア供給口の数や形状等も適宜変更しても構わない。また、エンドエフェクタによる搬送対象物の保持態様は、「真空吸着保持」や「ベルヌーイ保持」の他に、機械的な爪やローラを用いて搬送対象物に物理的に接触して保持する「メカニカル保持」、静電気力で搬送対象物を保持する「静電気保持」、搬送対象物自体の重力によって保持する(例えばエンドエフェクタに溝または3点以上のノッチを設け、搬送対象物を溝や複数のノッチ内に収めて保持する)「重力保持」、これら何れの保持態様であっても構わない。   Further, the number and length of the link elements constituting the arm may be appropriately changed, and the link elements are swung (rotated) in the vertical plane instead of or in addition to the horizontal swiveling operation (vertical swing). You may connect so that operation | movement is possible, or it may connect so that sliding operation | movement is possible. Furthermore, the shape of the end effector or the number and shape of the suction air supply ports may be appropriately changed. In addition to “vacuum suction holding” and “Bernoulli holding”, the holding mode of the object to be transported by the end effector is “mechanical” that physically contacts and holds the object to be transported using mechanical claws and rollers. "Holding", "Static holding" to hold the object to be transported by electrostatic force, Hold by the gravity of the object to be transported (for example, the end effector is provided with a groove or three or more notches, and the object to be transported is provided with a groove or a plurality of notches. Any one of these holding modes may be used ("gravity holding").

また、本発明のロボットアーム装置で搬送可能な搬送対象物は、ウェーハに限らず、液晶等、他のものであってもよい。   Further, the transfer object that can be transferred by the robot arm device of the present invention is not limited to a wafer, but may be a liquid crystal or the like.

さらには、アームが、例えば、把持部、溶接ガン等、所定の作業対象に直接働きかける機能をもつエンドエフェクタを備えたものであっても構わない。   Furthermore, the arm may be provided with an end effector having a function of directly acting on a predetermined work target, such as a gripping part or a welding gun.

その他、各部の具体的構成についても上記実施形態に限られるものではなく、本発明の趣旨を逸脱しない範囲で種々変形が可能である。   In addition, the specific configuration of each part is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

1…アーム
2…基台
3…基台本体部
32…天井壁
3a…開口部
3S…内部空間
4…昇降部
63…流通調整手段
C…エンドエフェクタ
S…隙間
X…ロボットアーム装置
DESCRIPTION OF SYMBOLS 1 ... Arm 2 ... Base 3 ... Base main-body part 32 ... Ceiling wall 3a ... Opening part 3S ... Internal space 4 ... Elevating part 63 ... Distribution | distribution adjustment means C ... End effector S ... Gap X ... Robot arm apparatus

Claims (2)

先端側にエンドエフェクタを備えたアームを支持する基台が、基台本体部と、前記基台本体部の天井壁に形成した開口部を通じて少なくとも下側領域を前記基台本体部の内部空間に収容した状態で前記基台本体部に対して昇降可能な昇降部とを備えたロボットアーム装置であって、
前記基台本体部の内部空間の上部及び下部に連通して前記内部空間の空気を循環させる流路を有する空気循環装置をさらに備え、前記流路のうち少なくとも前記内部空間の上部に連通する上側流路口の開口断面積を、前記天井壁に形成した開口部と前記昇降部との隙間の断面積よりも大きく設定していることを特徴とするロボットアーム装置。
A base supporting an arm having an end effector on the distal end side has at least a lower region as an internal space of the base body through a base body and an opening formed in a ceiling wall of the base body. A robot arm device provided with an elevating part that can be raised and lowered with respect to the base body part in a housed state,
An air circulation device having a flow path that circulates air in the internal space in communication with an upper portion and a lower portion of the internal space of the base main body, and that communicates with at least the upper portion of the internal space. A robot arm device characterized in that an opening cross-sectional area of a flow path opening is set larger than a cross-sectional area of a gap between an opening formed in the ceiling wall and the elevating part.
前記流路に、当該流路内の塵埃が上側流路口から内部空間へ流れ込むことを防止する流通調整手段を設けている請求項1に記載のロボットアーム装置。

The robot arm device according to claim 1, wherein the flow path is provided with a flow adjusting means for preventing dust in the flow path from flowing into the internal space from the upper flow path port.

JP2010202326A 2010-09-09 2010-09-09 Robot arm device Pending JP2012056034A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019161117A (en) * 2018-03-15 2019-09-19 シンフォニアテクノロジー株式会社 Efem, and gas replacement method in efem
JP2020163485A (en) * 2019-03-28 2020-10-08 平田機工株式会社 Drive device and conveying device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019161117A (en) * 2018-03-15 2019-09-19 シンフォニアテクノロジー株式会社 Efem, and gas replacement method in efem
JP7137047B2 (en) 2018-03-15 2022-09-14 シンフォニアテクノロジー株式会社 EFEM and gas replacement method in EFEM
JP7496493B2 (en) 2018-03-15 2024-06-07 シンフォニアテクノロジー株式会社 Transport robot and EFEM
JP2020163485A (en) * 2019-03-28 2020-10-08 平田機工株式会社 Drive device and conveying device
US11511441B2 (en) 2019-03-28 2022-11-29 Hirata Corporation Driving apparatus and conveying apparatus

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