JP2012056034A - Robot arm device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a robot arm device capable of preventing/inhibiting dust soaring inside a base body portion accompanying the rising operation of a lifting portion from being released upward from a clearance between the lifting portion and the base body portion without depending on the exhausting function of a fan or an exhaust port and the sealing function of a sealing member and restricting the ascending/descending speed of the lifting portion.SOLUTION: A base supporting an arm is constituted of the base body portion 3, the lifting portion 4 capable of ascending/descending to/from the base body portion 3 through an opening portion 3a formed in a ceiling wall 32 of the base body portion 3, and a flow path 6 communicated with the upper and lower parts of an internal space 3S of the base body portion 3 for circulating air in the internal space 3S. The opening cross section of an upper side flow path opening 61 of the flow path 6 communicated with the upper part of the internal space 3S of the base body portion 3 is set to be larger than the cross section of the clearance between the opening part 3a formed in the ceiling wall 32 and the lifting portion 4.

Description

  The present invention relates to a robot arm device including an arm that can be moved up and down.

  2. Description of the Related Art Conventionally, there has been known a robot arm device in which, for example, a base end portion of an arm formed by connecting a plurality of link elements is supported on a base portion (base) so as to be horizontally rotatable. The robot arm device rotates the entire arm horizontally or rotates the link elements together at the joint part to appropriately deform the entire shape of the arm, and at the tip (end effector), the transfer object such as a wafer or liquid crystal is transferred. It can function as a transport device that can be held and transported to a predetermined place (processing device for the next process, etc.).

  A robot arm device having an elevating mechanism so that the arm can move up and down with respect to the base has been developed and put into practical use. As an example of such a robot arm device, a base is supported by a base body and a lift part (lift base) that can be lifted and lowered with respect to the base body part while supporting the base end of the arm so as to be horizontally rotatable. The aspect comprised using the (base) is mentioned (refer patent document 1).

JP 2002-166376 A

  By the way, although the base body part forms an internal space isolated from the outside by a cover or the like, dust (dust) that can be generated in the internal space by the lifting / lowering operation of the lifting / lowering part rises when the lifting / lowering part rises. In order to ensure a smooth ascending / descending operation, it can be discharged to the outside of the base from a gap (an opening formed in the ceiling wall of the base main body) secured between the lift and the base main body. In such a robot arm device, it is difficult to use the robot arm in a scene where it is necessary to keep the environment around the base as clean as in the internal space of the base main body. In particular, when used as a transfer device that holds and transfers precision parts such as wafers at the tip of the arm, the base from the gap (opening formed in the base main body) between the elevating part and the base main body There is a risk that dust, dust, etc. released to the outside of the product will adhere to precision parts.

  As an aspect to prevent the occurrence of such a problem, an exhaust port is formed at an appropriate position of the base body part, or a fan is provided to suppress fluctuations in the air flow in the base body part when the lift part is raised. The mode (1st plan) to perform, the mode (2nd plan) which provided the sealing member in the edge of the opening part formed in the ceiling wall of the base body part, and the raising speed itself of the lifting part There can be considered a mode (third plan) in which the setting is slow enough that dust does not sometimes rise.

  However, in the case of the first plan, there is a problem that air outside the base flows into the internal space of the base main body from the exhaust port, or it is difficult to exhibit sufficient exhaust performance depending on the location of the fan. Furthermore, the arrangement of the members constituting the elevating mechanism such as the elevating drive motor and screw shaft among the members arranged in the internal space of the base main body tends to be determined preferentially by design. The degree of freedom in designing the location of the fan and the location where the exhaust port is formed is greatly limited, and with the robot arm device installed at the installation site, the exhaust port, fan, parts outside the base, walls, etc. Since it is difficult to exhibit sufficient exhaust performance unless the separation distance is sufficiently maintained, there is a problem that installation in consideration of exhaust performance is required.

  Further, in the case of the second plan, when the sealing member becomes unable to perform the desired sealing function due to wear or the like, dust or the like in the internal space of the base body is easily released to the outside of the base. Become. Therefore, in order to reduce the wear of the seal member, if the raising / lowering speed of the raising / lowering part is set to be slow, the function of the robot arm device will be lowered, and if a highly durable seal member is applied, the cost will be reduced. It tends to be high. Even in the third plan in which the ascending speed of the elevating unit is set to be slow, the function as the robot arm device is also degraded.

  The present invention has been made paying attention to such problems, and its main purpose is not to depend on an exhaust function by a fan or an exhaust port or a seal function by a seal member, and also functions as a robot arm device. Without taking into consideration the lifting speed limitation of the lifting part that may cause a drop, dust that rises in the base body part as the lifting part moves up is released upward from the gap between the lifting part and the base body part An object of the present invention is to provide a robot arm device capable of preventing and suppressing the above.

  That is, the present invention includes an arm having an end effector on the distal end side and a base that supports the arm, and the base is formed through a base body and an opening formed in the ceiling wall of the base body. The present invention relates to a robot arm device configured by using an elevating unit that can be moved up and down with respect to the base body in a state where at least the lower region is accommodated in the internal space of the base body.

  The robot arm device of the present invention further includes an air circulation device having a flow path that circulates air in the internal space in communication with the upper and lower portions of the internal space of the base body, and at least the internal space of the flow paths. The opening cross-sectional area of the upper channel port communicating with the upper part of the upper wall is set to be larger than the cross-sectional area of the clearance between the opening formed on the ceiling wall and the elevating part.

  With such a robot arm device, the air flow in the internal space of the base body portion can easily circulate through the flow path of the air circulation device, and in particular, an opening portion in which the opening cross-sectional area of the upper flow path port is formed in the ceiling wall By setting it larger than the cross-sectional area of the gap with the lifting / lowering section, the air flowing upward along the rising air flow generated in the internal space of the base body section when the lifting / lowering section is lifted is transferred from the upper flow path opening into the flow path. Can guide you smoothly. As a result, when dust is generated in the internal space of the base body due to the lifting / lowering operation of the lifting / lowering section and dust rises along the rising air flow generated in the internal space of the base body when the lifting / lowering section is raised, the dust flows upward. It can be circulated from the internal space of the base body through the roadway into the flow path, and dust is released to the outside of the base through the gap between the opening and the lifting part formed in the ceiling wall of the base body. It can be prevented / suppressed.

  Therefore, when the robot arm device provided with such an air circulation device is applied as a transfer device that holds and transfers a precision component such as a wafer at the tip of the arm, the precision component such as a wafer in the transfer process. It is possible to sufficiently exhibit the desired conveyance processing capacity without fear that dust or the like will inadvertently adhere to the surface.

  In particular, in the robot arm device of the present invention, if a flow adjusting means for preventing dust in the flow path from flowing into the internal space from the upper flow path port is provided in the flow path, The dust existing in the vicinity of the lower flow passage opening communicating with the lower portion of the internal space of the flow passage is internalized from the flow passage opening of the flow passage by the air flow generated in the internal space or flow passage in the base body when the elevating part is lowered. It is possible to appropriately prevent the circulation to the space, and this further increases the situation in which dust is released to the outside of the base from the gap between the opening formed on the ceiling wall of the base body and the lifting part. It can be effectively prevented and suppressed. Here, examples of the flow adjusting means include a filter and a check valve.

  In the robot arm device of the present invention, the air in the internal space of the base main body easily flows through the flow path of the space circulation device (is easy to circulate), and the air flow pushed upward when the lifting unit moves upward. The dust that soars in the internal space is directed downward along the flow of air circulating through the flow path. As a result, it is effective that dust in the internal space of the base body is released to the outside of the base from the gap (opening formed in the ceiling wall) between the lift and the base body when the lift is raised. Can be prevented and suppressed.

  According to the present invention, the flow path communicating with the internal space of the base body part is formed, and when the lift part is lifted, the air in the internal space of the base body part is circulated through this flow path, thereby raising the lift part. It is possible to suppress or prevent the problem that dust in the internal space of the base body part sometimes rises and can be discharged to the outside of the base. In addition, according to the present invention, it is not necessary to provide an exhaust port, a fan, or a seal member at an appropriate position of the base body, or to set a lowering speed of the lifting unit. It is possible to solve the above-mentioned inconveniences such as being limited or causing a decrease in the function of the robot arm device.

1 is an overall schematic diagram of a robot arm device to which an air circulation device according to an embodiment of the present invention is applicable. Explanatory drawing at the time of the raising / lowering part raising in the robot arm apparatus to which the air circulation apparatus which concerns on the same embodiment is applied. The principal part enlarged view of FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  The air circulation device R according to the present embodiment is applicable to a robot arm device X as shown in FIG. In FIG. 1, the air circulation device R is omitted.

  First, the robot arm device X shown in FIG. 1 will be described. This robot arm device X includes an arm 1 composed of a plurality of link elements (first link element A, second link element B, end effector C), and a base 2 that supports the arm 1. is there.

  The arm 1 includes, for example, a first link element A disposed on the most proximal side (base 2 side) of the arm 1 and a second link element B coupled to the distal end portion of the first link element A so as to be horizontally rotatable. And an end effector C coupled to the tip of the second link element B so as to be horizontally rotatable. This arm 1 has a link structure (multi-joint structure) whose shape changes between an extended state (see FIG. 1) where the arm length is maximum and a folded state (not shown) where the arm length is minimum. is there. The robot arm apparatus X connects the arm 1 and the base 2 via a theta shaft (not shown). In the present embodiment, the base end portion of the first link element A is connected to the base 2 via the theta shaft, and the suction air supplied from the suction air supply port Ca formed at the front end portion of the end effector C is used. The conveyance object is configured to be suckable. The shape of the end effector is not limited to the fork shape shown in FIG. 1, but may be any other appropriate shape.

  The base 2 supports the base main body 3 and the base main body 3 in a state where the base end of the arm 1 (the base end of the first link element A) is supported via a theta shaft so as to be horizontally rotatable. And an elevating part 4 that can be raised and lowered. In FIG. 2, the arm 1 is omitted.

  The base body 3 includes a bottom wall 31, a ceiling wall 32 having an opening 3 a that allows the lifting unit 4 to move up and down, and a standing wall disposed in a standing posture between the bottom wall 31 and the ceiling wall 32. 33, a front wall 34 disposed so as to face the standing wall 33, and left and right side walls 35 disposed between corresponding side ends of the standing wall 33 and the front wall 34. A closed space (corresponding to the “internal space” of the present invention, hereinafter referred to as “internal space 3S”) surrounded by the bottom wall 31, the ceiling wall 32, the standing wall 33, the front wall 34, and the left and right side walls 35). It is. In FIG. 1, an example in which a part of the ceiling wall 32 and both side walls 35 is configured by the first cover 36 is illustrated. However, in FIG. 2, for convenience of explanation, the ceiling wall 32 and the first cover 36 are ignored. Both side walls 35 are shown in a simplified manner, and the thickness of each of the walls 32 and 35 and the bottom wall 31 is omitted. Further, in FIG. 1, a standing wall 33 is arranged in the vicinity of the center portion in the front-rear direction of the bottom wall 31, and a second cover 37 having a back wall arranged to face the front wall 34 across the standing wall 33 is provided. The embodiment is illustrated.

  The elevating part 4 is mainly composed of an elevating part main body 41 having a closed space 41S inside, and at least a lower region is stored in the internal space 3S of the base main body part 3 with a predetermined highest rising position and a lowest lowering position. Can be moved up and down. The internal space 41 </ b> S of the lift body 41 is a space that is isolated from the internal space 3 </ b> S of the base body 3.

  In the robot arm apparatus X of the present embodiment, various mechanisms such as a ball screw mechanism and a belt mechanism can be applied as an elevating mechanism that moves the elevating unit 4 up and down relative to the elevating unit body 3. In FIG. 2, the movable part 5 which can move up and down along a raising / lowering axis | shaft (illustration omitted) in the state which supported the raising / lowering part 4 among the raising / lowering mechanisms is shown typically.

  In the robot arm device X having such a configuration, the first link element A, the second link element B, and the end effector C are horizontally swiveled around a swivel axis provided at a connecting portion between the theta shaft and the link elements. The overall shape (posture) can be appropriately changed. When the robot arm device X holds and conveys a transfer object such as a wafer on the end effector C, the robot arm device X makes a suction switching unit (not shown) ready to supply air and supplies the suction air to the end effector C. A state in which the conveyance symmetry object can be sucked and held on the end effector C by the negative pressure air supplied from the port Ca (adsorption ON state) is obtained. Further, the robot arm device X changes the arm 1 appropriately while maintaining the suction ON state, and when the transport target is transported to a predetermined transport position, the suction switching unit is changed from the air supply enabled state to the air supply stop state. When switched, the negative pressure air supply operation from the suction air supply port Ca of the end effector C is stopped, and the suction holding state of the conveyance object is released (adsorption OFF state).

  As described above, the robot arm device X according to the present embodiment is switched to the suction ON state or the suction OFF state by switching the suction switching unit between the air supply enabled state and the air supply stop state, and is placed on the end effector C. The conveyance object held by suction can be suitably conveyed.

  The robot arm device X according to the present embodiment can move the entire arm 1 up and down by moving the lifting unit 4 up and down. Specifically, the elevating part 4 supported by the movable part 5 by the operation of the elevating mechanism moves up and down through the opening 3 a formed in the ceiling wall 32 of the base body part 3. The supported arm 1 moves up and down.

  As shown in FIG. 2, the robot arm device X according to this embodiment includes an air circulation device R including a flow path 6 communicating with the upper and lower portions of the internal space 3 </ b> S of the base body 3. It is attached to part 3.

  The air circulation device R is mainly composed of the flow path 6, and in this embodiment, the flow path 6 is configured using a pipe. One end of the flow path 6 functions as an upper flow path port 61 communicating with the upper part of the internal space 3S of the base body 3 and the other end of the flow path is within the internal space 3S of the base body 3. It functions as a lower channel port 62 communicating with the lower part. Then, as shown in FIG. 3, which is an enlarged schematic view of the main part of FIG. 2, the opening cross-sectional area of the upper flow passage port 61 (corresponding to the inner diameter 61r of the upper flow passage port 61) is set to the opening 3a of the ceiling wall 32 and the lifting portion. 4 is set to be larger than the cross-sectional area of the gap S. By providing the air circulation device R composed of such a flow path 6 in the base body 3, the robot arm device X according to the present embodiment can move in the internal space 3 </ b> S of the base body 3 when the lift 4 is lifted. The air that has flowed upward along the rising airflow generated is given priority over the gap S between the lifting portion 4 and the opening 3a of the ceiling wall 32 of the base body portion 3 from the upper flow passage opening 61 into the flow passage 6. The air in the internal space 3S can be easily circulated through the flow path 6 (see FIG. 2, the arrow shown in the internal space 3S of the base body 3 in the figure indicates when the elevating unit 4 is raised) It shows the air flow schematically). In the present embodiment, the opening cross-sectional area of the lower flow path port 62 is set to be the same as that of the upper flow path port 61.

  In particular, in the present embodiment, since the separate flow paths 6 are provided in the left and right side walls 35 of the base body 3, the left region and the right region with the central portion 33 c in the width direction of the standing wall 33 as a boundary. This makes it easier for air to flow evenly. As a result, when the lifting / lowering part 4 partially accommodated in the internal space 3S of the base body 3 moves up and down through the opening 3a of the ceiling wall 32, the lifting / lowering part 4 in the internal space 3S of the base body 3 is provided. As shown in FIG. 2, the air that once flows upward along with the upward movement is directed into the flow path 6 through the upper flow path port 61 of the flow path 6, and directly from the lower flow path port 62 to the base body 3. It flows into the internal space 3S. Further, a lifting shaft (equivalent to a screw shaft when the lifting mechanism is configured by a ball screw mechanism) of the lifting / lowering section 4 is set to a central portion in the left-right width direction of the internal space 3S of the base body 3 (standing in the present embodiment). The flow path 6 is arranged symmetrically with respect to the elevating axis of the elevating part 4 and the mechanism is arranged in the internal space 3S of the base body part 3. (E.g., an elevating mechanism) and parts (e.g., the movable unit 5) are also arranged symmetrically with respect to the elevating axis of the elevating unit 4, so that when the elevating unit 4 moves up, the internal space 3S of the base body 3 is increased. The air flows evenly in the left region and the right region with the elevating shaft as a boundary, and is smoothly and appropriately guided to each flow path 6.

  Furthermore, in the air circulation device R according to the present embodiment, dust in the flow path 6 flows into the internal space 3S of the base body 3 from the upper flow path opening 61 in the vicinity of the upper flow path opening 61 in the flow path 6. The distribution adjusting means 63 for preventing the above is provided. In this embodiment, a filter is applied as the flow preventing means 63, but a check valve may be applied instead of or in addition to the filter.

  The robot arm device X according to the present embodiment having the above-described configuration has a problem that may occur with the lifting / lowering operation of the lifting / lowering unit 4, that is, the lifting / lowering operation of the lifting / lowering unit 4 in the internal space 3 </ b> S of the base body 3. The generated dust rises in the internal space 3 </ b> S of the base main body 3 with the ascending operation of the lifting / lowering unit 4, and from the gap S between the opening 3 a formed in the ceiling wall 32 of the base main body 3 and the lift 4. The situation of being pushed out and released outside the internal space 3S and adhering to the object to be conveyed can be suitably avoided / suppressed without depending on the exhaust function by the exhaust port or the fan or the seal function by the seal member. . In addition, in the robot arm device X according to the present embodiment, it is not necessary to set the ascending speed of the elevating unit 3 so slow that dust does not rise, so there is no possibility of causing a decrease in conveyance processing capacity due to the ascent speed limitation. .

  In addition, since the robot arm device X according to the present embodiment includes the flow adjusting means 63 in the vicinity of the upper flow path port 61 in the flow path 6, for example, in the flow path 6 (particularly in the vicinity of the lower flow path port 62) Even if the dust that can stay in the lower region of the internal space 3S of the base body 3 rises toward the upper flow path port 61 when the elevating part 4 is lowered, the dust is distributed to the flow adjusting means 63. Therefore, it is possible to reliably prevent the gas from being trapped (filtering process or separation process) and flowing into the internal space 3 </ b> S of the base body 3 from the upper flow path port 61.

  In addition, this invention is not limited to embodiment mentioned above. For example, a robot arm device including one or three or more flow paths can be used. Moreover, in the above-described embodiment, the aspect in which the flow path is provided in the side wall among the partition walls that can partition the internal space of the base body portion from the external space of the base is illustrated. You may provide a flow path in a front wall. Furthermore, a mode in which a partition wall and a flow path that can partition the internal space of the base body portion from the external space of the base are integrally formed may be employed.

  In addition, the overall length and appearance of the flow channel (a shape other than the substantially U-shape shown in the above-described embodiment, such as a partial arc shape) can be changed as appropriate. What is necessary is just to set the opening cross-sectional area of an upper channel opening larger than the cross-sectional area of the clearance gap between the opening part formed in the ceiling wall, and the raising / lowering part.

  Further, the location where the flow adjusting means is provided in the flow channel is preferably a location closer to the upper flow channel port than the middle point of the total length (flow channel length) of the flow channel, and it is not necessary to provide it near the upper flow channel port. Good. Of course, an embodiment in which the flow adjusting means is provided at a location on the lower channel opening side with respect to the intermediate point of the entire length of the channel (channel length) is also included in the present invention.

  Moreover, one flow path can also be configured using a plurality of tubes. In this case, the tubes may be connected by an appropriate connection member such as a joint. Furthermore, it is also possible to configure the flow path using a member other than the pipe. When a flow path is configured using a member other than a pipe, the requirements related to the cross-sectional area, that is, the opening cross-sectional area of the upper flow path port communicating with at least the upper part of the internal space of the base main body portion of the flow path, Any configuration is acceptable as long as it satisfies the requirement of setting the cross-sectional area larger than the gap between the opening formed on the ceiling wall of the unit and the lifting unit.For example, a flow path is configured by combining flat plates. Alternatively, the flow path can be constituted by a groove formed in a flat plate.

  In addition to the flow path, the air circulation device may be provided with an exhaust port or a fan provided at an appropriate position (for example, a region corresponding to a position directly below the lifting unit) in the base main body. If it is such an aspect, the air and dust which circulate in the internal space of a base main-body part can be efficiently discharged | emitted to the exterior of a base main-body part. And, when the lifting part moves up and down, the amount (speed) of the air flowing out of the base body through the exhaust port and the fan is larger (faster) than the amount (speed) of the air flowing upward along with the upward movement. By setting so as to be effective, it is possible to effectively prevent the dust existing in the internal space from being ejected from the gap between the opening of the ceiling wall and the elevating part together with the air and adhering to the object to be transported. can do.

  In addition, when the elevating part is lowered, there is a risk that dust existing in the lower area in the internal space of the base body part or in the vicinity of the lower flow path port of the flow path may flow up and flow into the internal space of the base body part from the upper flow path port of the flow path If there is no distribution adjustment means, the distribution adjustment means may not be provided.

  Moreover, in embodiment mentioned above, among each wall (partition wall) which can partition the internal space of a base main-body part from the exterior, a part of ceiling wall, a side wall, and the whole front wall can be attached or detached with respect to a bottom wall. Although the aspect formed with the common cover (1st cover) was illustrated, it is also possible to form each partition wall with a separate cover, respectively, or to form a partition wall without using a cover.

  Further, for example, a link type robot arm device that supplies low-pressure air from the suction air supply port may be used. In this case, when low pressure air discharged from the suction air supply port flows along the surface of the end effector, a negative pressure is applied to the gap between the conveyance object and the end effector when the conveyance object and the end effector are brought close to each other. Is generated, and the object to be conveyed can be adsorbed using a force toward the end effector acting on the object to be conveyed due to a pressure difference from the atmospheric pressure (so-called “Bernoulli holding” using the Bernoulli effect).

  Further, the number and length of the link elements constituting the arm may be appropriately changed, and the link elements are swung (rotated) in the vertical plane instead of or in addition to the horizontal swiveling operation (vertical swing). You may connect so that operation | movement is possible, or it may connect so that sliding operation | movement is possible. Furthermore, the shape of the end effector or the number and shape of the suction air supply ports may be appropriately changed. In addition to “vacuum suction holding” and “Bernoulli holding”, the holding mode of the object to be transported by the end effector is “mechanical” that physically contacts and holds the object to be transported using mechanical claws and rollers. "Holding", "Static holding" to hold the object to be transported by electrostatic force, Hold by the gravity of the object to be transported (for example, the end effector is provided with a groove or three or more notches, and the object to be transported is provided with a groove or a plurality of notches. Any one of these holding modes may be used ("gravity holding").

  Further, the transfer object that can be transferred by the robot arm device of the present invention is not limited to a wafer, but may be a liquid crystal or the like.

  Furthermore, the arm may be provided with an end effector having a function of directly acting on a predetermined work target, such as a gripping part or a welding gun.

  In addition, the specific configuration of each part is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Arm 2 ... Base 3 ... Base main-body part 32 ... Ceiling wall 3a ... Opening part 3S ... Internal space 4 ... Elevating part 63 ... Distribution | distribution adjustment means C ... End effector S ... Gap X ... Robot arm apparatus

Claims (2)

A base supporting an arm having an end effector on the distal end side has at least a lower region as an internal space of the base body through a base body and an opening formed in a ceiling wall of the base body. A robot arm device provided with an elevating part that can be raised and lowered with respect to the base body part in a housed state,
An air circulation device having a flow path that circulates air in the internal space in communication with an upper portion and a lower portion of the internal space of the base main body, and that communicates with at least the upper portion of the internal space. A robot arm device characterized in that an opening cross-sectional area of a flow path opening is set larger than a cross-sectional area of a gap between an opening formed in the ceiling wall and the elevating part. The robot arm device according to claim 1, wherein the flow path is provided with a flow adjusting means for preventing dust in the flow path from flowing into the internal space from the upper flow path port.

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