SG10201903029VA - Conveying mechanism - Google Patents
Conveying mechanismInfo
- Publication number
- SG10201903029VA SG10201903029VA SG10201903029VA SG10201903029VA SG 10201903029V A SG10201903029V A SG 10201903029VA SG 10201903029V A SG10201903029V A SG 10201903029VA SG 10201903029V A SG10201903029V A SG 10201903029VA
- Authority
- SG
- Singapore
- Prior art keywords
- wafer
- housing tray
- housing
- conveying mechanism
- ceiling plate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/12—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising a series of individual load-carriers fixed, or normally fixed, relative to traction element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Packaging Frangible Articles (AREA)
Abstract
CONVEYING MECHANISM OF THE DISCLOSURE A conveying mechanism for conveying a wafer unit having a wafer disposed inside of and supported on an annular frame by a holding tape includes a housing tray housing the wafer unit therein and a transport unit supporting and transporting the housing tray between wafer treating apparatus. The housing tray includes a ceiling plate and a bottom plate that are interconnected by a pair of side walls facing each other across an opening defined in a side through which the wafer unit can be taken into and out of the housing tray. An air flow generator is disposed on the ceiling plate for generating air downflows in the housing tray that are directed from the ceiling plate into the opening. The transport unit conveys wafer units, one by one, between the wafer treating apparatus. [Figure 2]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018080387A JP2019192683A (en) | 2018-04-19 | 2018-04-19 | Transfer mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201903029VA true SG10201903029VA (en) | 2019-11-28 |
Family
ID=68105209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201903029V SG10201903029VA (en) | 2018-04-19 | 2019-04-04 | Conveying mechanism |
Country Status (7)
Country | Link |
---|---|
US (1) | US10622237B2 (en) |
JP (1) | JP2019192683A (en) |
KR (1) | KR20190122147A (en) |
CN (1) | CN110391162A (en) |
DE (1) | DE102019205588B4 (en) |
SG (1) | SG10201903029VA (en) |
TW (1) | TW201943627A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7109863B2 (en) * | 2018-11-30 | 2022-08-01 | 株式会社ディスコ | Conveyor system |
CN113998462B (en) * | 2021-12-28 | 2022-05-03 | 三一技术装备有限公司 | Pole piece conveying device and laminating machine |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0927543A (en) | 1995-07-10 | 1997-01-28 | Disco Abrasive Syst Ltd | Wafer cassette |
JP2001060610A (en) * | 1999-06-17 | 2001-03-06 | Tokyo Electron Ltd | Substrate transfer device, treating unit, treating system of substrate, transfer method, housing device and housing box |
JP5398595B2 (en) * | 2010-03-04 | 2014-01-29 | 東京エレクトロン株式会社 | Board storage device |
JP5895676B2 (en) * | 2012-04-09 | 2016-03-30 | 三菱電機株式会社 | Manufacturing method of semiconductor device |
JP6060822B2 (en) * | 2013-06-13 | 2017-01-18 | トヨタ自動車株式会社 | Transfer equipment and production system |
JP6456177B2 (en) * | 2015-02-12 | 2019-01-23 | 株式会社ディスコ | Wafer processing system |
JP6522476B2 (en) | 2015-09-30 | 2019-05-29 | 株式会社ディスコ | Transport mechanism |
-
2018
- 2018-04-19 JP JP2018080387A patent/JP2019192683A/en active Pending
-
2019
- 2019-03-29 KR KR1020190037338A patent/KR20190122147A/en not_active Application Discontinuation
- 2019-04-04 SG SG10201903029V patent/SG10201903029VA/en unknown
- 2019-04-17 CN CN201910308914.7A patent/CN110391162A/en active Pending
- 2019-04-17 DE DE102019205588.5A patent/DE102019205588B4/en active Active
- 2019-04-18 US US16/387,728 patent/US10622237B2/en active Active
- 2019-04-18 TW TW108113516A patent/TW201943627A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2019192683A (en) | 2019-10-31 |
US20190326135A1 (en) | 2019-10-24 |
US10622237B2 (en) | 2020-04-14 |
DE102019205588B4 (en) | 2022-12-29 |
CN110391162A (en) | 2019-10-29 |
TW201943627A (en) | 2019-11-16 |
DE102019205588A1 (en) | 2019-10-24 |
KR20190122147A (en) | 2019-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG10201903029VA (en) | Conveying mechanism | |
US2805898A (en) | Fluid current conveyor for fragile articles | |
TW368433B (en) | Transport and storage carrier | |
MY162259A (en) | Conveyor for and method of conveying heated material | |
MY177234A (en) | Wafer processing system | |
MY158953A (en) | Potential fluidization device for conveying powder materials in a hyperdense bed | |
TW200716461A (en) | Article transport apparatus | |
EA200600533A1 (en) | SYSTEM OF PRECISE REGULATION OF THE PRODUCT RATE OF LOADING OF THE PRODUCT FROM THE CONSUMABLE HOPPER | |
TW200616068A (en) | Processing apparatus for cleaning substrate and substrate processing unit | |
EP1661634A3 (en) | Apparatus for contactless cleaning a conveyor and assembly for transporting and/or storing elongate articles comprising an apparatus for contactless cleaning a conveyor | |
MX2017013410A (en) | Apparatus and process for packaging a product. | |
SG11201907406WA (en) | Cell processing system and cell processing device | |
TW200508128A (en) | Transporting apparatus | |
MX2019005734A (en) | Conveying device for conveying goods. | |
MX2022000412A (en) | Vapour delivery systems. | |
MX356752B (en) | Distribution supply device and combined measurement device. | |
TW200514955A (en) | Apparatus and method for drying articles that have been treated | |
US10071865B2 (en) | Machine for separating elements | |
JP2018041926A (en) | Container housing facility | |
MX2019011316A (en) | Apparatus and method for the treatment of a substrate with a multiplicity of solid particles. | |
SG11201905531SA (en) | Purge stocker | |
MX2018006602A (en) | Carrier for honeycomb body and method. | |
MX2020002101A (en) | Diverting apparatus with coanda stabilizing device. | |
MX2021010381A (en) | Illuminated apparatus closure. | |
SI2178677T1 (en) | A shot-blasting machine for surface treatment of products |