SG10201902749TA - Multiple Actuator Wire Bonding Apparatus - Google Patents

Multiple Actuator Wire Bonding Apparatus

Info

Publication number
SG10201902749TA
SG10201902749TA SG10201902749TA SG10201902749TA SG 10201902749T A SG10201902749T A SG 10201902749TA SG 10201902749T A SG10201902749T A SG 10201902749TA SG 10201902749T A SG10201902749T A SG 10201902749TA
Authority
SG
Singapore
Prior art keywords
actuator
bonding
wire bonding
bonding apparatus
wire
Prior art date
Application number
Other languages
English (en)
Inventor
Keng Yew Song
Yue Zhang
Xiao Liang Chen
zheng yu Lin
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of SG10201902749TA publication Critical patent/SG10201902749TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/78268—Discharge electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
    • H01L2224/7835—Stable and mobile yokes
    • H01L2224/78352—Stable and mobile yokes in the upper part of the bonding apparatus, e.g. in the capillary or wedge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
    • H01L2224/78621—Holding means, e.g. wire clampers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/788—Means for moving parts
    • H01L2224/78821—Upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
    • H01L2224/78822—Rotational mechanism
    • H01L2224/78823—Pivoting mechanism

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Die Bonding (AREA)
  • Resistance Welding (AREA)
  • Wire Bonding (AREA)
SG10201902749T 2018-03-28 2019-03-27 Multiple Actuator Wire Bonding Apparatus SG10201902749TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15/937,972 US11289446B2 (en) 2018-03-28 2018-03-28 Multiple actuator wire bonding apparatus

Publications (1)

Publication Number Publication Date
SG10201902749TA true SG10201902749TA (en) 2019-10-30

Family

ID=68055543

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201902749T SG10201902749TA (en) 2018-03-28 2019-03-27 Multiple Actuator Wire Bonding Apparatus

Country Status (5)

Country Link
US (1) US11289446B2 (ko)
KR (1) KR102360298B1 (ko)
CN (1) CN110315246A (ko)
SG (1) SG10201902749TA (ko)
TW (1) TWI732189B (ko)

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475681A (en) * 1982-05-24 1984-10-09 The Micromanipulator Co., Inc. Bonder apparatus
US4808892A (en) * 1985-12-13 1989-02-28 Kulick And Soffa Ind. Inc. Bi-directional drive motor system
US5653375A (en) 1994-10-29 1997-08-05 Samsung Aerospace Industries, Ltd. Wire bonding apparatus
KR0155773B1 (ko) * 1994-10-29 1998-12-01 이해규 와이어 본딩헤드 및 이를 이용한 본딩장치
US5578888A (en) 1994-12-05 1996-11-26 Kulicke And Soffa Investments, Inc. Multi resonance unibody ultrasonic transducer
US6286749B1 (en) * 1998-01-23 2001-09-11 Hyundai Electronics Industries Co., Ltd. Apparatus for moving a bonding head of a wire bonder in X, Y and Z axial directions
US6237833B1 (en) * 1998-06-15 2001-05-29 Rohm Co., Ltd. Method of checking wirebond condition
JP4018057B2 (ja) * 2003-03-31 2007-12-05 株式会社新川 ボンディング装置
JP3993157B2 (ja) * 2003-10-23 2007-10-17 株式会社新川 ボンディング装置
US7025243B2 (en) 2004-06-16 2006-04-11 Asm Technology Singapore Pte. Ltd. Bondhead for wire bonding apparatus
US7279814B2 (en) 2005-11-01 2007-10-09 Bio-Rad Laboratories, Inc. Moving coil actuator for reciprocating motion with controlled force distribution
CN101505904A (zh) 2006-08-30 2009-08-12 库利克和索夫工业公司 用于引线接合机的改进的z轴运动系统
WO2008151964A1 (de) * 2007-06-15 2008-12-18 Oerlikon Assembly Equipment Ag, Steinhausen Bondkopf fuer einen wire bonder
CN101777505A (zh) * 2009-12-29 2010-07-14 天津大学 旋转引线键合头装置
JP5596487B2 (ja) * 2010-10-07 2014-09-24 日本発條株式会社 圧電アクチュエータ及びヘッド・サスペンション
US8919631B2 (en) * 2012-03-15 2014-12-30 Asm Technology Singapore Pte Ltd Wire bonder including a transducer, a bond head, and a mounting apparatus
JP5583179B2 (ja) * 2012-08-03 2014-09-03 株式会社カイジョー ボンディング装置
CN104826786A (zh) * 2014-02-11 2015-08-12 上海声定科技有限公司 一种法兰式超声波换能器
US9640512B2 (en) * 2014-07-24 2017-05-02 Asm Technology Singapore Pte Ltd Wire bonding apparatus comprising an oscillator mechanism
TWI643276B (zh) 2016-08-23 2018-12-01 日商新川股份有限公司 夾線裝置的校準方法以及打線裝置

Also Published As

Publication number Publication date
KR20190113640A (ko) 2019-10-08
TW201941852A (zh) 2019-11-01
US20190304947A1 (en) 2019-10-03
KR102360298B1 (ko) 2022-02-10
US11289446B2 (en) 2022-03-29
CN110315246A (zh) 2019-10-11
TWI732189B (zh) 2021-07-01

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