SG10201801395TA - Processing method for workpiece - Google Patents

Processing method for workpiece

Info

Publication number
SG10201801395TA
SG10201801395TA SG10201801395TA SG10201801395TA SG10201801395TA SG 10201801395T A SG10201801395T A SG 10201801395TA SG 10201801395T A SG10201801395T A SG 10201801395TA SG 10201801395T A SG10201801395T A SG 10201801395TA SG 10201801395T A SG10201801395T A SG 10201801395TA
Authority
SG
Singapore
Prior art keywords
cutting
deep
workpiece
grooves
processing method
Prior art date
Application number
SG10201801395TA
Inventor
Tanaka Hideaki
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201801395TA publication Critical patent/SG10201801395TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Milling, Broaching, Filing, Reaming, And Others (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Milling Processes (AREA)

Abstract

PROCESSING METHOD FOR WORKPIECE A processing method for a workpiece includes: a holding step of holding the workpiece by a chuck table; a groove forming step of moving the chuck table in a processing feeding direction at a first speed, and sequentially cutting a plurality of division lines extending in a first direction by a first cutting blade to form the workpiece with grooves along the division lines; a first deep-cutting step of further cutting the grooves, by a second cutting blade, to thereby deep-cut the grooves, during when the groove forming step is performed; and a second deep-cutting step of moving the chuck table in the processing feeding direction at a second speed higher than the first speed, and further cutting by the second cutting blade those of the grooves which have not been deep-cut in the first deep-cutting step, to thereby deep-cut those grooves, after the groove forming step. [Figure 3A]
SG10201801395TA 2017-03-13 2018-02-21 Processing method for workpiece SG10201801395TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017047317A JP6812079B2 (en) 2017-03-13 2017-03-13 Processing method of work piece

Publications (1)

Publication Number Publication Date
SG10201801395TA true SG10201801395TA (en) 2018-10-30

Family

ID=63259331

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201801395TA SG10201801395TA (en) 2017-03-13 2018-02-21 Processing method for workpiece

Country Status (8)

Country Link
US (1) US10535562B2 (en)
JP (1) JP6812079B2 (en)
KR (1) KR102391848B1 (en)
CN (1) CN108573919B (en)
DE (1) DE102018203678B4 (en)
MY (1) MY181615A (en)
SG (1) SG10201801395TA (en)
TW (1) TWI745547B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7080552B2 (en) * 2017-12-28 2022-06-06 株式会社ディスコ Cutting blade dressing method

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174228A (en) * 1997-08-28 1999-03-16 Disco Abrasive Syst Ltd Precision cutting apparatus
JP2002075919A (en) 2000-08-30 2002-03-15 Sharp Corp Dicing method of semiconductor wafer
JP2003173986A (en) * 2001-12-04 2003-06-20 Disco Abrasive Syst Ltd Cutting method in 2-spindle cutter
KR20030075681A (en) * 2002-03-20 2003-09-26 삼성전기주식회사 A wafer dicing method for preventing a chipping
US20080138962A1 (en) * 2004-07-22 2008-06-12 Renesas Technology Corp. Manufacturing Method of Semiconductor Device
JP4975422B2 (en) * 2006-11-28 2012-07-11 株式会社ディスコ Cutting equipment
KR20090052468A (en) * 2007-11-21 2009-05-26 한미반도체 주식회사 Half cutting method for semiconductor strip
JP5571331B2 (en) * 2009-07-07 2014-08-13 株式会社ディスコ Cutting equipment
JP5764031B2 (en) * 2011-10-06 2015-08-12 株式会社ディスコ Cutting equipment
US20130273717A1 (en) * 2012-04-17 2013-10-17 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and Method for the Singulation of a Semiconductor Wafer
JP6078272B2 (en) * 2012-09-10 2017-02-08 株式会社ディスコ Wafer processing method
JP6061776B2 (en) * 2013-05-16 2017-01-18 株式会社ディスコ Cutting groove detection method
JP6170769B2 (en) * 2013-07-11 2017-07-26 株式会社ディスコ Wafer processing method
JP6180876B2 (en) * 2013-10-02 2017-08-16 株式会社ディスコ Cutting apparatus and wafer cutting method
TW201519360A (en) * 2013-11-08 2015-05-16 Prov Technology Corp Wafer cutting method
JP6203011B2 (en) * 2013-11-19 2017-09-27 株式会社ディスコ Cutting method
JP6251574B2 (en) * 2014-01-14 2017-12-20 株式会社ディスコ Cutting method
JP6282194B2 (en) * 2014-07-30 2018-02-21 株式会社ディスコ Wafer processing method
JP6562670B2 (en) 2015-03-23 2019-08-21 株式会社ディスコ Workpiece cutting method
JP6521687B2 (en) * 2015-03-23 2019-05-29 株式会社ディスコ Inspection method of cutting blade
JP6422388B2 (en) * 2015-04-09 2018-11-14 株式会社ディスコ Method for forming cutting groove
JP2016219757A (en) * 2015-05-26 2016-12-22 株式会社ディスコ Method of dividing workpiece
TWI692023B (en) * 2015-07-08 2020-04-21 美商戴卡科技有限公司 Semiconductor device processing method for material removal
JP6607639B2 (en) * 2015-12-24 2019-11-20 株式会社ディスコ Wafer processing method
JP6906836B2 (en) * 2017-01-27 2021-07-21 株式会社ディスコ How to use laminated dressing board
JP2018181903A (en) * 2017-04-04 2018-11-15 株式会社ディスコ Processing method
JP6847529B2 (en) * 2017-06-15 2021-03-24 株式会社ディスコ Cutting method of work piece
JP6979296B2 (en) * 2017-07-28 2021-12-08 株式会社ディスコ Cutting method
JP6955975B2 (en) * 2017-11-21 2021-10-27 株式会社ディスコ Wafer processing method
JP2019115962A (en) * 2017-12-27 2019-07-18 株式会社ディスコ Chuck table correction method, and cutting device

Also Published As

Publication number Publication date
DE102018203678B4 (en) 2024-01-25
TW201835990A (en) 2018-10-01
KR102391848B1 (en) 2022-04-27
TWI745547B (en) 2021-11-11
DE102018203678A1 (en) 2018-09-13
MY181615A (en) 2020-12-29
CN108573919A (en) 2018-09-25
US10535562B2 (en) 2020-01-14
KR20180104566A (en) 2018-09-21
JP6812079B2 (en) 2021-01-13
US20180261505A1 (en) 2018-09-13
JP2018152453A (en) 2018-09-27
CN108573919B (en) 2023-08-15

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