SG10201601407RA - Protective film detecting method - Google Patents
Protective film detecting methodInfo
- Publication number
- SG10201601407RA SG10201601407RA SG10201601407RA SG10201601407RA SG10201601407RA SG 10201601407R A SG10201601407R A SG 10201601407RA SG 10201601407R A SG10201601407R A SG 10201601407RA SG 10201601407R A SG10201601407R A SG 10201601407RA SG 10201601407R A SG10201601407R A SG 10201601407RA
- Authority
- SG
- Singapore
- Prior art keywords
- protective film
- detecting method
- film detecting
- protective
- film
- Prior art date
Links
- 230000001681 protective effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
- G01N2021/8433—Comparing coated/uncoated parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Dicing (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Toxicology (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015048446A JP6478728B2 (en) | 2015-03-11 | 2015-03-11 | Protective film detection method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201601407RA true SG10201601407RA (en) | 2016-10-28 |
Family
ID=56887520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201601407RA SG10201601407RA (en) | 2015-03-11 | 2016-02-25 | Protective film detecting method |
Country Status (6)
Country | Link |
---|---|
US (1) | US9976951B2 (en) |
JP (1) | JP6478728B2 (en) |
KR (1) | KR102413014B1 (en) |
CN (1) | CN105977175B (en) |
SG (1) | SG10201601407RA (en) |
TW (1) | TWI662270B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6765949B2 (en) * | 2016-12-12 | 2020-10-07 | 株式会社ディスコ | Wafer processing method |
CN109884712B (en) * | 2019-03-20 | 2021-09-28 | 深圳精智达技术股份有限公司 | Contact type detection device |
CN110697528A (en) * | 2019-09-10 | 2020-01-17 | 宁夏电通物联网科技股份有限公司 | Detection device for detecting opening and closing states of car door based on diffuse reflection, elevator and detection method |
WO2021079879A1 (en) * | 2019-10-21 | 2021-04-29 | ヌヴォトンテクノロジージャパン株式会社 | Semiconductor device and dicing method |
CN112864034B (en) * | 2019-11-27 | 2023-09-01 | 上海先进半导体制造有限公司 | Aluminum corrosion treatment method and system |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4748329A (en) * | 1987-02-17 | 1988-05-31 | Canadian Patents And Development Ltd. | Method for on-line thickness monitoring of a transparent film |
JPH0718931B2 (en) * | 1989-06-26 | 1995-03-06 | グンゼ株式会社 | How to detect the presence of transparent film |
AU4536093A (en) * | 1992-07-31 | 1994-03-03 | Biostar, Inc. | Devices and methods for detection of an analyte based upon light interference |
JPH10305420A (en) | 1997-03-04 | 1998-11-17 | Ngk Insulators Ltd | Method for fabricating matrix made up of oxide single crystal and method for manufacturing functional device |
AU2002349599A1 (en) * | 2001-11-30 | 2003-06-10 | International Business Machines Corporation | Inspection device and inspection method for pattern profile, exposure system |
JP4777783B2 (en) | 2006-01-26 | 2011-09-21 | 株式会社ディスコ | Laser processing equipment |
JP2009158763A (en) * | 2007-12-27 | 2009-07-16 | Disco Abrasive Syst Ltd | Protective film coating apparatus |
JP5258349B2 (en) * | 2008-03-28 | 2013-08-07 | 富士フイルム株式会社 | Defect detection apparatus and method |
JP5715370B2 (en) * | 2010-10-08 | 2015-05-07 | 株式会社ディスコ | Detection method |
JP5681453B2 (en) * | 2010-11-08 | 2015-03-11 | 株式会社ディスコ | Measuring method and measuring device |
JP5681452B2 (en) * | 2010-11-08 | 2015-03-11 | 株式会社ディスコ | Measuring method and measuring device |
CN202156556U (en) * | 2011-06-20 | 2012-03-07 | 在贤电子(苏州)有限公司 | Producing device of panel protective film |
JP2015065386A (en) * | 2013-09-26 | 2015-04-09 | 株式会社ディスコ | Protective film detector |
-
2015
- 2015-03-11 JP JP2015048446A patent/JP6478728B2/en active Active
-
2016
- 2016-02-03 TW TW105103530A patent/TWI662270B/en active
- 2016-02-25 SG SG10201601407RA patent/SG10201601407RA/en unknown
- 2016-03-07 CN CN201610127183.2A patent/CN105977175B/en active Active
- 2016-03-09 KR KR1020160028150A patent/KR102413014B1/en active IP Right Grant
- 2016-03-10 US US15/066,688 patent/US9976951B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW201634915A (en) | 2016-10-01 |
CN105977175A (en) | 2016-09-28 |
CN105977175B (en) | 2021-04-23 |
TWI662270B (en) | 2019-06-11 |
US9976951B2 (en) | 2018-05-22 |
KR102413014B1 (en) | 2022-06-23 |
JP2016169971A (en) | 2016-09-23 |
KR20160110176A (en) | 2016-09-21 |
US20160266037A1 (en) | 2016-09-15 |
JP6478728B2 (en) | 2019-03-06 |
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