SG10201510712PA - Etchant solutions and method of use thereof - Google Patents
Etchant solutions and method of use thereofInfo
- Publication number
- SG10201510712PA SG10201510712PA SG10201510712PA SG10201510712PA SG10201510712PA SG 10201510712P A SG10201510712P A SG 10201510712PA SG 10201510712P A SG10201510712P A SG 10201510712PA SG 10201510712P A SG10201510712P A SG 10201510712PA SG 10201510712P A SG10201510712P A SG 10201510712PA
- Authority
- SG
- Singapore
- Prior art keywords
- etchant solutions
- etchant
- solutions
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/02—Etching, surface-brightening or pickling compositions containing an alkali metal hydroxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462097408P | 2014-12-29 | 2014-12-29 | |
US14/978,383 US9873833B2 (en) | 2014-12-29 | 2015-12-22 | Etchant solutions and method of use thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201510712PA true SG10201510712PA (en) | 2016-07-28 |
Family
ID=55361303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201510712PA SG10201510712PA (en) | 2014-12-29 | 2015-12-29 | Etchant solutions and method of use thereof |
Country Status (9)
Country | Link |
---|---|
US (1) | US9873833B2 (en) |
EP (1) | EP3040397B1 (en) |
JP (2) | JP6809787B2 (en) |
KR (3) | KR20160080084A (en) |
CN (1) | CN105733587B (en) |
MY (1) | MY180929A (en) |
PH (1) | PH12016000004B1 (en) |
SG (1) | SG10201510712PA (en) |
TW (1) | TWI580764B (en) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI642763B (en) * | 2014-01-27 | 2018-12-01 | 三菱瓦斯化學股份有限公司 | Liquid composition for removing titanium nitride, method for washing semiconductor element using the liquid composition, and method for manufacturing semiconductor element |
US9976111B2 (en) | 2015-05-01 | 2018-05-22 | Versum Materials Us, Llc | TiN hard mask and etch residual removal |
US10072237B2 (en) | 2015-08-05 | 2018-09-11 | Versum Materials Us, Llc | Photoresist cleaning composition used in photolithography and a method for treating substrate therewith |
KR102532413B1 (en) * | 2016-07-21 | 2023-05-15 | 동우 화인켐 주식회사 | Eching composition for etching a polysilicon and method for manufacturing a semiconductor device |
KR102368969B1 (en) * | 2017-03-30 | 2022-03-02 | 동우 화인켐 주식회사 | Etching solution composition, manufacturing method of an array substrate for display device using the same |
US10934485B2 (en) * | 2017-08-25 | 2021-03-02 | Versum Materials Us, Llc | Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device |
US10761423B2 (en) | 2017-08-30 | 2020-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chemical composition for tri-layer removal |
CN108085683A (en) * | 2018-01-22 | 2018-05-29 | 深圳市华星光电技术有限公司 | A kind of etchant |
US11180697B2 (en) * | 2018-11-19 | 2021-11-23 | Versum Materials Us, Llc | Etching solution having silicon oxide corrosion inhibitor and method of using the same |
TWI683362B (en) * | 2018-12-17 | 2020-01-21 | 許富翔 | Method for trimming si fin structure |
JP7305679B2 (en) * | 2018-12-18 | 2023-07-10 | 株式会社トクヤマ | Silicon etchant |
CN110438504A (en) * | 2019-08-19 | 2019-11-12 | 江阴江化微电子材料股份有限公司 | A kind of alum gate Ke Kai area's silicon slag removes composition and silicon slag sweep-out method |
CN112480928A (en) * | 2019-09-11 | 2021-03-12 | 利绅科技股份有限公司 | Silicon etching composition and etching method for silicon substrate by using same |
CN110922970A (en) * | 2019-11-29 | 2020-03-27 | 南京纳鑫新材料有限公司 | PERC battery back polishing additive and technology |
CN111440613B (en) * | 2019-12-09 | 2022-03-25 | 杭州格林达电子材料股份有限公司 | TMAH anisotropic silicon etching liquid and preparation method thereof |
CN111341655A (en) * | 2020-03-07 | 2020-06-26 | 浙江中晶科技股份有限公司 | Double-time alkali corrosion processing technology for heavily-doped borosilicate sheet |
TWI751568B (en) | 2020-05-29 | 2022-01-01 | 新應材股份有限公司 | Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process |
CN113736466B (en) * | 2020-05-29 | 2023-05-12 | 新应材股份有限公司 | Etchant composition, adhesion promoter, method for removing polyimide and etching process |
WO2022138754A1 (en) | 2020-12-24 | 2022-06-30 | 株式会社トクヤマ | Silicon etching liquid, and method for producing silicon devices and method for processing substrates, each using said etching liquid |
CN113186044B (en) * | 2021-04-27 | 2022-12-30 | 上海新阳半导体材料股份有限公司 | Preparation method of fluorine-containing cleaning liquid composition |
CN113161234B (en) * | 2021-04-27 | 2023-02-17 | 上海新阳半导体材料股份有限公司 | Application of fluorine-containing cleaning liquid composition |
US11920252B2 (en) | 2021-08-05 | 2024-03-05 | Toyota Motor Engineering & Manufacturing North America, Inc. | SU-8 etching technique using molten salt |
CN114854419B (en) * | 2022-04-13 | 2023-09-05 | 华中科技大学 | Alkaline etching solution for wet etching of phase-change material and application thereof |
CN115011347B (en) * | 2022-06-30 | 2023-12-29 | 湖北兴福电子材料股份有限公司 | Selective etching solution for aluminum nitride and tungsten |
CN115044376B (en) * | 2022-06-30 | 2023-12-29 | 湖北兴福电子材料股份有限公司 | Scandium-doped aluminum nitride etching solution and application thereof |
CN114989825B (en) * | 2022-06-30 | 2023-07-11 | 湖北兴福电子材料股份有限公司 | Scandium-doped aluminum nitride and tungsten selective etching solution |
CN115595154A (en) * | 2022-08-31 | 2023-01-13 | 湖北兴福电子材料股份有限公司(Cn) | Selective etching solution for SiGe and Si |
CN115851134A (en) * | 2022-10-27 | 2023-03-28 | 万华化学集团电子材料有限公司 | High-precision silicon wafer polishing composition and application thereof |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE789090A (en) * | 1971-09-22 | 1973-01-15 | Western Electric Co | SEMICONDUCTOR ATTACK METHOD AND SOLUTION |
US3980587A (en) * | 1974-08-16 | 1976-09-14 | G. T. Schjeldahl Company | Stripper composition |
JPH03201533A (en) | 1989-12-28 | 1991-09-03 | Toyota Central Res & Dev Lab Inc | Anisotropic etchant for silicon |
JP3160344B2 (en) | 1991-01-25 | 2001-04-25 | アシュランド インコーポレーテッド | Organic stripping composition |
JP3525612B2 (en) | 1996-03-12 | 2004-05-10 | セイコーエプソン株式会社 | Method of processing silicon wafer and electronic device using the silicon wafer |
US7129199B2 (en) | 2002-08-12 | 2006-10-31 | Air Products And Chemicals, Inc. | Process solutions containing surfactants |
JP4631152B2 (en) | 2000-03-16 | 2011-02-16 | 株式会社デンソー | Manufacturing method of semiconductor device using silicon substrate |
JP3890981B2 (en) | 2002-01-07 | 2007-03-07 | 株式会社Sumco | Alkaline etching solution, method for etching silicon wafer using this etching solution, and method for differentiating front and back surfaces of silicon wafer using this method |
JP5109261B2 (en) | 2006-02-10 | 2012-12-26 | 三菱瓦斯化学株式会社 | Silicon anisotropic etchant composition for silicon microfabrication |
JP2007305832A (en) * | 2006-05-12 | 2007-11-22 | Matsushita Electric Ind Co Ltd | Manufacturing method of semiconductor device |
JP5142592B2 (en) | 2007-06-06 | 2013-02-13 | 関東化学株式会社 | Alkaline aqueous solution composition used for substrate cleaning or etching |
JP5022198B2 (en) * | 2007-11-27 | 2012-09-12 | パナソニック株式会社 | Method for manufacturing transducer substrate |
US7999335B2 (en) * | 2007-12-05 | 2011-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Micromachine and method for manufacturing the same |
JP5302551B2 (en) | 2008-02-28 | 2013-10-02 | 林純薬工業株式会社 | Silicon anisotropic etchant composition |
JP5379441B2 (en) | 2008-10-09 | 2013-12-25 | 関東化学株式会社 | Alkaline aqueous solution composition for substrate processing |
JP5339880B2 (en) * | 2008-12-11 | 2013-11-13 | 株式会社新菱 | Etching solution for silicon substrate and surface processing method for silicon substrate |
US8883034B2 (en) | 2009-09-16 | 2014-11-11 | Brian Reiss | Composition and method for polishing bulk silicon |
JP5720573B2 (en) | 2009-10-02 | 2015-05-20 | 三菱瓦斯化学株式会社 | Silicon etchant and etching method |
EP2355138B1 (en) * | 2010-01-28 | 2016-08-24 | Canon Kabushiki Kaisha | Liquid composition, method of producing silicon substrate, and method of producing liquid discharge head substrate |
WO2012039390A1 (en) * | 2010-09-24 | 2012-03-29 | 株式会社 フジミインコーポレーテッド | Composition for polishing and composition for rinsing |
JP5869368B2 (en) | 2011-03-04 | 2016-02-24 | 富士フイルム株式会社 | Capacitor structure forming method and silicon etching solution used therefor |
JP2012209480A (en) * | 2011-03-30 | 2012-10-25 | Disco Abrasive Syst Ltd | Processing method of electrode-embedded wafer |
JP2013168610A (en) * | 2012-02-17 | 2013-08-29 | Tokuyama Corp | Composition for texture formation, manufacturing method of silicon substrate, and preparation kit of composition for texture formation |
US20130295712A1 (en) * | 2012-05-03 | 2013-11-07 | Advanced Technology Materials, Inc. | Methods of texturing surfaces for controlled reflection |
JP5943755B2 (en) * | 2012-07-20 | 2016-07-05 | キヤノン株式会社 | Method for manufacturing substrate of liquid discharge head |
JP2014033046A (en) * | 2012-08-02 | 2014-02-20 | Tokuyama Corp | Composition for forming texture, production method of silicon substrate, and composition preparation kit for forming texture |
JP6146144B2 (en) | 2013-06-03 | 2017-06-14 | 富士通株式会社 | Semiconductor device and manufacturing method thereof. |
-
2015
- 2015-12-22 US US14/978,383 patent/US9873833B2/en active Active
- 2015-12-24 TW TW104143649A patent/TWI580764B/en active
- 2015-12-28 KR KR1020150187290A patent/KR20160080084A/en active Application Filing
- 2015-12-28 JP JP2015257092A patent/JP6809787B2/en active Active
- 2015-12-28 MY MYPI2015704773A patent/MY180929A/en unknown
- 2015-12-29 SG SG10201510712PA patent/SG10201510712PA/en unknown
- 2015-12-29 EP EP15202875.9A patent/EP3040397B1/en active Active
- 2015-12-29 CN CN201511009473.9A patent/CN105733587B/en active Active
-
2016
- 2016-01-04 PH PH12016000004A patent/PH12016000004B1/en unknown
-
2018
- 2018-06-04 KR KR1020180064229A patent/KR102285187B1/en active IP Right Grant
- 2018-12-07 JP JP2018230185A patent/JP6932683B2/en active Active
-
2021
- 2021-07-27 KR KR1020210098701A patent/KR102378486B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR102378486B1 (en) | 2022-03-23 |
JP2019068087A (en) | 2019-04-25 |
US20160186058A1 (en) | 2016-06-30 |
KR20160080084A (en) | 2016-07-07 |
JP6809787B2 (en) | 2021-01-06 |
TW201623581A (en) | 2016-07-01 |
PH12016000004A1 (en) | 2017-07-10 |
JP6932683B2 (en) | 2021-09-08 |
EP3040397A1 (en) | 2016-07-06 |
CN105733587A (en) | 2016-07-06 |
TWI580764B (en) | 2017-05-01 |
JP2016127293A (en) | 2016-07-11 |
KR20180064365A (en) | 2018-06-14 |
MY180929A (en) | 2020-12-12 |
CN105733587B (en) | 2020-04-03 |
KR102285187B1 (en) | 2021-08-02 |
US9873833B2 (en) | 2018-01-23 |
EP3040397B1 (en) | 2021-06-30 |
KR20210095845A (en) | 2021-08-03 |
PH12016000004B1 (en) | 2017-07-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG10201510712PA (en) | Etchant solutions and method of use thereof | |
IL250415B (en) | Anti-pdl- antibodies and methods of use thereof | |
ZA201703075B (en) | Substituted chromanes and method of use | |
IL282572B (en) | Tetrahydropyranyl amino-pyrrolopyrimidinone and methods of use thereof | |
IL251988A0 (en) | Glycan-interacting compounds and methods of use | |
GB201417048D0 (en) | Occupancy-control device and methods of use | |
GB201514760D0 (en) | Compounds and method of use | |
GB201421894D0 (en) | End fitting and method of manufacture | |
PT3089971T (en) | Compounds and methods of use | |
GB2529433B (en) | Winch assembly and method of use | |
EP3152281A4 (en) | Defoaming agent and associated methods of use | |
SG11201605915WA (en) | Furo-3-carboxamide derivatives and methods of use | |
GB201421197D0 (en) | Apparatus and method of use thereof | |
GB2544019B (en) | Gripping block arrangement and method of use | |
GB201406245D0 (en) | Vent value and method of use | |
GB201403697D0 (en) | Compounds and methods of use | |
GB201416797D0 (en) | Contianer and method of use thereof | |
SG10201912615PA (en) | Tetrahydropyranyl amino-pyrrolopyrimidinone and methods of use thereof | |
AU2014904885A0 (en) | Device and method of use | |
GB201419990D0 (en) | Hprseshoe and method of manufacture | |
GB201404133D0 (en) | Garment and method of use thereof |