SG10201506633SA - Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp) - Google Patents

Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp)

Info

Publication number
SG10201506633SA
SG10201506633SA SG10201506633SA SG10201506633SA SG10201506633SA SG 10201506633S A SG10201506633S A SG 10201506633SA SG 10201506633S A SG10201506633S A SG 10201506633SA SG 10201506633S A SG10201506633S A SG 10201506633SA SG 10201506633S A SG10201506633S A SG 10201506633SA
Authority
SG
Singapore
Prior art keywords
ewlb
mlp
semiconductor device
forming
grid array
Prior art date
Application number
SG10201506633SA
Inventor
Seung Wook Yoon
Jose A Caparas
Yaojian Lin
Pandi C Marimuthu
Original Assignee
Stats Chippac Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stats Chippac Ltd filed Critical Stats Chippac Ltd
Publication of SG10201506633SA publication Critical patent/SG10201506633SA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561—Batch processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/19—Manufacturing methods of high density interconnect preforms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568—Temporary substrate used as encapsulation process aid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
    • H01L2225/1035—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1047—Details of electrical connections between containers
    • H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12041—LED
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12042—LASER
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress
    • H01L2924/3511—Warping

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
SG10201506633SA 2012-03-02 2013-02-25 Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp) SG10201506633SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261606327P 2012-03-02 2012-03-02
US13/772,683 US9293401B2 (en) 2008-12-12 2013-02-21 Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (EWLP-MLP)

Publications (1)

Publication Number Publication Date
SG10201506633SA true SG10201506633SA (en) 2015-10-29

Family

ID=49042375

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201506633SA SG10201506633SA (en) 2012-03-02 2013-02-25 Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp)
SG2013013891A SG193122A1 (en) 2012-03-02 2013-02-25 Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp)

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG2013013891A SG193122A1 (en) 2012-03-02 2013-02-25 Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp)

Country Status (4)

Country Link
US (2) US9293401B2 (en)
CN (2) CN108666214B (en)
SG (2) SG10201506633SA (en)
TW (2) TWI680540B (en)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8810024B2 (en) 2012-03-23 2014-08-19 Stats Chippac Ltd. Semiconductor method and device of forming a fan-out PoP device with PWB vertical interconnect units
US10049964B2 (en) 2012-03-23 2018-08-14 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming a fan-out PoP device with PWB vertical interconnect units
US9842798B2 (en) 2012-03-23 2017-12-12 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming a PoP device with embedded vertical interconnect units
US9837303B2 (en) 2012-03-23 2017-12-05 STATS ChipPAC Pte. Ltd. Semiconductor method and device of forming a fan-out device with PWB vertical interconnect units
JP6273362B2 (en) * 2013-12-23 2018-01-31 インテル コーポレイション Package on package structure and method for manufacturing the same
US9870946B2 (en) 2013-12-31 2018-01-16 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer level package structure and method of forming same
CN104795377B (en) * 2014-01-17 2019-02-19 恩智浦美国有限公司 Semiconductor devices with lead net
CN104882386B (en) * 2014-02-27 2019-03-01 恩智浦美国有限公司 Semiconductor devices grid array package
US20150282367A1 (en) * 2014-03-27 2015-10-01 Hans-Joachim Barth Electronic assembly that includes stacked electronic components
US9595485B2 (en) * 2014-06-26 2017-03-14 Nxp Usa, Inc. Microelectronic packages having embedded sidewall substrates and methods for the producing thereof
US9343385B2 (en) * 2014-07-30 2016-05-17 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device comprising a chip substrate, a mold, and a buffer layer
US10319607B2 (en) * 2014-08-22 2019-06-11 Taiwan Semiconductor Manufacturing Company, Ltd. Package-on-package structure with organic interposer
DE102014114982B4 (en) * 2014-10-15 2023-01-26 Infineon Technologies Ag Method of forming a chip package
US9806066B2 (en) 2015-01-23 2017-10-31 Samsung Electronics Co., Ltd. Semiconductor package including exposed connecting stubs
CN107039369A (en) * 2015-01-23 2017-08-11 三星半导体(中国)研究开发有限公司 Encapsulation includes the encapsulation stacking structure and its manufacture method of the encapsulation
SG10201501021PA (en) * 2015-02-10 2016-09-29 Delta Electronics Int L Singapore Pte Ltd Package structure
SG10201501172RA (en) * 2015-02-13 2016-09-29 Delta Electronics Int’L Singapore Pte Ltd Packaging process of electronic component
US20160240457A1 (en) * 2015-02-18 2016-08-18 Altera Corporation Integrated circuit packages with dual-sided stacking structure
US9786623B2 (en) 2015-03-17 2017-10-10 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming PoP semiconductor device with RDL over top package
US9899285B2 (en) * 2015-07-30 2018-02-20 Semtech Corporation Semiconductor device and method of forming small Z semiconductor package
US9761571B2 (en) * 2015-09-17 2017-09-12 Deca Technologies Inc. Thermally enhanced fully molded fan-out module
US20170092594A1 (en) * 2015-09-25 2017-03-30 Qualcomm Incorporated Low profile package with passive device
US10727207B2 (en) 2016-07-07 2020-07-28 Agency For Science, Technology And Research Semiconductor packaging structure and method of forming the same
WO2018063196A1 (en) * 2016-09-28 2018-04-05 Intel IP Corporation Systems, methods, and apparatuses for implementing reduced height semiconductor packages for mobile electronics
US10522505B2 (en) 2017-04-06 2019-12-31 Advanced Semiconductor Engineering, Inc. Semiconductor device package and method for manufacturing the same
TWI666743B (en) * 2017-09-29 2019-07-21 英屬開曼群島商鳳凰先驅股份有限公司 Sensor package and method of manufacturing the same
US10910287B2 (en) * 2018-02-28 2021-02-02 Stmicroelectronics Pte Ltd Semiconductor package with protected sidewall and method of forming the same
EP3557608A1 (en) * 2018-04-19 2019-10-23 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Packaged integrated circuit with interposing functionality and method for manufacturing such a packaged integrated circuit
TWI662594B (en) * 2018-08-16 2019-06-11 友達光電股份有限公司 Flexible substrate and circuit structure and method of manufacturing the same
US10658348B2 (en) 2018-09-27 2020-05-19 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor devices having a plurality of first and second conductive strips
DE102019101999B4 (en) 2018-09-28 2021-08-05 Taiwan Semiconductor Manufacturing Company, Ltd. SEMICONDUCTOR DEVICE WITH MULTIPLE POLARITY GROUPS
US10861841B2 (en) 2018-09-28 2020-12-08 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device with multiple polarity groups
US11189523B2 (en) * 2019-06-12 2021-11-30 Nanya Technology Corporation Semiconductor structure and fabrication method thereof
US11581262B2 (en) 2019-10-02 2023-02-14 Qualcomm Incorporated Package comprising a die and die side redistribution layers (RDL)
US11502024B2 (en) * 2020-01-21 2022-11-15 Advanced Semiconductor Engineering, Inc. Semiconductor device package and method of manufacturing the same
EP4338198A1 (en) * 2021-05-31 2024-03-20 Huawei Technologies Co., Ltd. Method of manufacturing active reconstructed wafers

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5250843A (en) 1991-03-27 1993-10-05 Integrated System Assemblies Corp. Multichip integrated circuit modules
US5353498A (en) 1993-02-08 1994-10-11 General Electric Company Method for fabricating an integrated circuit module
US5872338A (en) 1996-04-10 1999-02-16 Prolinx Labs Corporation Multilayer board having insulating isolation rings
US5841193A (en) 1996-05-20 1998-11-24 Epic Technologies, Inc. Single chip modules, repairable multichip modules, and methods of fabrication thereof
US6833613B1 (en) 1997-12-18 2004-12-21 Micron Technology, Inc. Stacked semiconductor package having laser machined contacts
US6002169A (en) 1998-06-15 1999-12-14 Lsi Logic Corporation Thermally enhanced tape ball grid array package
US6586323B1 (en) 2000-09-18 2003-07-01 Taiwan Semiconductor Manufacturing Company Method for dual-layer polyimide processing on bumping technology
US6423570B1 (en) * 2000-10-18 2002-07-23 Intel Corporation Method to protect an encapsulated die package during back grinding with a solder metallization layer and devices formed thereby
TW495943B (en) 2001-04-18 2002-07-21 Siliconware Precision Industries Co Ltd Semiconductor package article with heat sink structure and its manufacture method
SG111919A1 (en) 2001-08-29 2005-06-29 Micron Technology Inc Packaged microelectronic devices and methods of forming same
US6750547B2 (en) 2001-12-26 2004-06-15 Micron Technology, Inc. Multi-substrate microelectronic packages and methods for manufacture
TW200302685A (en) 2002-01-23 2003-08-01 Matsushita Electric Ind Co Ltd Circuit component built-in module and method of manufacturing the same
US7548430B1 (en) * 2002-05-01 2009-06-16 Amkor Technology, Inc. Buildup dielectric and metallization process and semiconductor package
US6987031B2 (en) 2002-08-27 2006-01-17 Micron Technology, Inc. Multiple chip semiconductor package and method of fabricating same
DE102004022884B4 (en) 2004-05-06 2007-07-19 Infineon Technologies Ag Semiconductor device with a rewiring substrate and method of making the same
DE102005026098B3 (en) * 2005-06-01 2007-01-04 Infineon Technologies Ag Benefit and semiconductor device made of a composite board with semiconductor chips and plastic housing composition and method for producing the same
FR2893764B1 (en) 2005-11-21 2008-06-13 St Microelectronics Sa STACKABLE SEMICONDUCTOR HOUSING AND METHOD FOR MANUFACTURING THE SAME
US8072059B2 (en) 2006-04-19 2011-12-06 Stats Chippac, Ltd. Semiconductor device and method of forming UBM fixed relative to interconnect structure for alignment of semiconductor die
DE102006019244B4 (en) * 2006-04-21 2008-07-03 Infineon Technologies Ag Benefit and semiconductor device made of a composite board with semiconductor chips and plastic housing composition and method for producing the same
US8174119B2 (en) * 2006-11-10 2012-05-08 Stats Chippac, Ltd. Semiconductor package with embedded die
JP2008166373A (en) 2006-12-27 2008-07-17 Nec Electronics Corp Semiconductor device and its manufacturing method
KR100809718B1 (en) 2007-01-15 2008-03-06 삼성전자주식회사 Stack type semiconductor chip package having different type of chips and fabrication method thereof
US8409920B2 (en) 2007-04-23 2013-04-02 Stats Chippac Ltd. Integrated circuit package system for package stacking and method of manufacture therefor
US20080284045A1 (en) 2007-05-18 2008-11-20 Texas Instruments Incorporated Method for Fabricating Array-Molded Package-On-Package
CN100530593C (en) 2007-06-01 2009-08-19 日月光半导体制造股份有限公司 Method for cutting crystal wafer
TWI332790B (en) 2007-06-13 2010-11-01 Ind Tech Res Inst Image sensor module with a three-dimensional dies-stacking structure
US7944034B2 (en) 2007-06-22 2011-05-17 Texas Instruments Incorporated Array molded package-on-package having redistribution lines
US7619901B2 (en) * 2007-06-25 2009-11-17 Epic Technologies, Inc. Integrated structures and fabrication methods thereof implementing a cell phone or other electronic system
US8829663B2 (en) * 2007-07-02 2014-09-09 Infineon Technologies Ag Stackable semiconductor package with encapsulant and electrically conductive feed-through
KR101329355B1 (en) 2007-08-31 2013-11-20 삼성전자주식회사 stack-type semicondoctor package, method of forming the same and electronic system including the same
US7651889B2 (en) 2007-09-13 2010-01-26 Freescale Semiconductor, Inc. Electromagnetic shield formation for integrated circuit die package
US7834462B2 (en) 2007-09-17 2010-11-16 Qimonda Ag Electric device, stack of electric devices, and method of manufacturing a stack of electric devices
US7777351B1 (en) * 2007-10-01 2010-08-17 Amkor Technology, Inc. Thin stacked interposer package
US20090212420A1 (en) 2008-02-22 2009-08-27 Harry Hedler integrated circuit device and method for fabricating same
US8101460B2 (en) 2008-06-04 2012-01-24 Stats Chippac, Ltd. Semiconductor device and method of shielding semiconductor die from inter-device interference
US8039303B2 (en) 2008-06-11 2011-10-18 Stats Chippac, Ltd. Method of forming stress relief layer between die and interconnect structure
KR20100009941A (en) 2008-07-21 2010-01-29 삼성전자주식회사 Semiconductor package having stepped molding compound with conductive via, method for formation of the same and stacked semiconductor package using the same
US8704350B2 (en) 2008-11-13 2014-04-22 Samsung Electro-Mechanics Co., Ltd. Stacked wafer level package and method of manufacturing the same
US7952176B2 (en) 2008-12-09 2011-05-31 Stats Chippac Ltd. Integrated circuit packaging system and method of manufacture thereof
US9082806B2 (en) * 2008-12-12 2015-07-14 Stats Chippac, Ltd. Semiconductor device and method of forming a vertical interconnect structure for 3-D FO-WLCSP
TWI499024B (en) 2009-01-07 2015-09-01 Advanced Semiconductor Eng Package-on-package device, semiconductor package and method for manufacturing the same
US8012797B2 (en) 2009-01-07 2011-09-06 Advanced Semiconductor Engineering, Inc. Method for forming stackable semiconductor device packages including openings with conductive bumps of specified geometries
US9299648B2 (en) 2009-03-04 2016-03-29 Stats Chippac Ltd. Integrated circuit packaging system with patterned substrate and method of manufacture thereof
TWI570820B (en) 2009-06-09 2017-02-11 史達晶片有限公司 Semiconductor device and method of forming stress relief layer between die and interconnect structure
US7993976B2 (en) 2009-06-12 2011-08-09 Stats Chippac, Ltd. Semiconductor device and method of forming conductive vias with trench in saw street
US8367470B2 (en) 2009-08-07 2013-02-05 Stats Chippac, Ltd. Semiconductor device and method of forming cavity in build-up interconnect structure for short signal path between die
US8198131B2 (en) * 2009-11-18 2012-06-12 Advanced Semiconductor Engineering, Inc. Stackable semiconductor device packages
US8241952B2 (en) * 2010-02-25 2012-08-14 Stats Chippac, Ltd. Semiconductor device and method of forming IPD in fan-out level chip scale package
TWI411075B (en) * 2010-03-22 2013-10-01 Advanced Semiconductor Eng Semiconductor package and manufacturing method thereof
US8409979B2 (en) 2011-05-31 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of forming interconnect structure with conductive pads having expanded interconnect surface area for enhanced interconnection properties
US9082780B2 (en) 2012-03-23 2015-07-14 Stats Chippac, Ltd. Semiconductor device and method of forming a robust fan-out package including vertical interconnects and mechanical support layer
US9331007B2 (en) 2012-10-16 2016-05-03 Stats Chippac, Ltd. Semiconductor device and method of forming conductive ink layer as interconnect structure between semiconductor packages

Also Published As

Publication number Publication date
CN103295925A (en) 2013-09-11
US20160141238A1 (en) 2016-05-19
CN103295925B (en) 2018-06-08
SG193122A1 (en) 2013-09-30
CN108666214A (en) 2018-10-16
TW201804573A (en) 2018-02-01
TW201347052A (en) 2013-11-16
US10622293B2 (en) 2020-04-14
US9293401B2 (en) 2016-03-22
CN108666214B (en) 2022-03-08
TWI680540B (en) 2019-12-21
US20130228917A1 (en) 2013-09-05
TWI606523B (en) 2017-11-21

Similar Documents

Publication Publication Date Title
SG10201506633SA (en) Semiconductor device and method for forming a low profile embedded wafer level ball grid array molded laser package (ewlb-mlp)
TWI562388B (en) Wafer level optoelectronic device packages and methods for making the same
KR102365046B9 (en) Composision for etching method for etching and semiconductor device
TWI563695B (en) Method for manufacturing optical semiconductor device
TWI562379B (en) Semiconductor device and method for manufacturing semiconductor device
EP2782121A4 (en) Semiconductor device and method for manufacturing semiconductor device
TWI562367B (en) Semiconductor device and method for manufacturing semiconductor device
EP2793266A4 (en) Semiconductor device and method for manufacturing semiconductor device
EP2793268A4 (en) Method for manufacturing semiconductor device
EP2711986A4 (en) Semiconductor device and method for manufacturing semiconductor device
EP2833404A4 (en) Semiconductor device and method for manufacturing semiconductor device
SG10201406984RA (en) Semicondcutor device and method offorming embedded wafer level chip scale packages
EP2677538A4 (en) Wafer level package, chip size package device and method of manufacturing wafer level package
EP2709149A4 (en) Semiconductor device and manufacturing method thereof
EP2790216A4 (en) Semiconductor device and semiconductor device manufacturing method
SG10201605125PA (en) Semiconductor device and method of using a standardized carrier to form embedded wafer level chip scale packages
TWI563540B (en) Semiconductor device manufacturing method
SG10201503189QA (en) Semiconductor wafer and manufacturing method thereof
EP2728615A4 (en) Semiconductor device and method for manufacturing semiconductor device
EP2709148A4 (en) Semiconductor device and manufacturing method thereof
EP2722878A4 (en) Semiconductor device and method for manufacturing semiconductor device
EP2584621A4 (en) Leadframe for optical semiconductor device, method for manufacturing leadframe for optical semiconductor device, and optical semiconductor device
EP2913843A4 (en) Semiconductor device manufacturing method
EP2775515A4 (en) Semiconductor device and manufacturing method thereof
EP2736067A4 (en) Method for manufacturing semiconductor device