SE9700613D0 - Sensorelement med temperaturmätning - Google Patents

Sensorelement med temperaturmätning

Info

Publication number
SE9700613D0
SE9700613D0 SE9700613A SE9700613A SE9700613D0 SE 9700613 D0 SE9700613 D0 SE 9700613D0 SE 9700613 A SE9700613 A SE 9700613A SE 9700613 A SE9700613 A SE 9700613A SE 9700613 D0 SE9700613 D0 SE 9700613D0
Authority
SE
Sweden
Prior art keywords
diaphragm
shielding plate
base plate
sensor element
thermistors
Prior art date
Application number
SE9700613A
Other languages
English (en)
Swedish (sv)
Inventor
Staffan Jonsson
Original Assignee
Cecap Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cecap Ab filed Critical Cecap Ab
Priority to SE9700613A priority Critical patent/SE9700613D0/xx
Publication of SE9700613D0 publication Critical patent/SE9700613D0/xx
Priority to PCT/SE1998/000303 priority patent/WO1998037393A1/fr
Priority to AU61285/98A priority patent/AU6128598A/en
Priority to US09/377,832 priority patent/US6439056B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
SE9700613A 1997-02-20 1997-02-20 Sensorelement med temperaturmätning SE9700613D0 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE9700613A SE9700613D0 (sv) 1997-02-20 1997-02-20 Sensorelement med temperaturmätning
PCT/SE1998/000303 WO1998037393A1 (fr) 1997-02-20 1998-02-20 Capteur presentant des moyens de mesure de la temperature
AU61285/98A AU6128598A (en) 1997-02-20 1998-02-20 A sensor element having temperature measuring means
US09/377,832 US6439056B1 (en) 1997-02-20 1999-08-20 Sensor element having temperature measuring means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9700613A SE9700613D0 (sv) 1997-02-20 1997-02-20 Sensorelement med temperaturmätning

Publications (1)

Publication Number Publication Date
SE9700613D0 true SE9700613D0 (sv) 1997-02-20

Family

ID=20405876

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9700613A SE9700613D0 (sv) 1997-02-20 1997-02-20 Sensorelement med temperaturmätning

Country Status (4)

Country Link
US (1) US6439056B1 (fr)
AU (1) AU6128598A (fr)
SE (1) SE9700613D0 (fr)
WO (1) WO1998037393A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6698294B2 (en) * 2000-09-07 2004-03-02 Vega Grieshaber Kg Pressure cell with temperature sensors and pressure measuring method
WO2002065487A1 (fr) * 2001-02-16 2002-08-22 K-Tech Devices Corp. Element de resistance, capteur de contrainte et procede de fabrication correspondant
JP3870918B2 (ja) * 2002-10-23 2007-01-24 株式会社デンソー 温度センサ一体型圧力センサ装置
JP3870917B2 (ja) * 2003-03-19 2007-01-24 株式会社デンソー 温度センサ一体型圧力センサ装置及びその温度センサ固定方法
JP4161270B2 (ja) * 2003-10-29 2008-10-08 株式会社デンソー 衝突荷重検出センサ
JP2005274412A (ja) * 2004-03-25 2005-10-06 Denso Corp 温度センサ一体型圧力センサ装置
US7284444B2 (en) * 2005-12-30 2007-10-23 Kulite Semiconductor Products, Inc. Hermetically sealed displacement sensor apparatus
JP4867437B2 (ja) * 2006-04-05 2012-02-01 株式会社デンソー 温度センサ
US7516675B2 (en) * 2007-07-03 2009-04-14 Kulite Semiconductor Products, Inc. Joystick sensor apparatus
DE102009002662B4 (de) 2009-04-27 2022-11-24 Ifm Electronic Gmbh Kapazitiver Drucksensor als Kombinationssensor zur Erfassung weiterer Messgrößen
US9016133B2 (en) * 2011-01-05 2015-04-28 Nxp, B.V. Pressure sensor with pressure-actuated switch
JP2014085259A (ja) * 2012-10-24 2014-05-12 Toyo Sokki Kk ひずみゲージ、ひずみ測定装置及びひずみゲージ式変換器
EP2784462B1 (fr) * 2013-03-27 2015-03-11 VEGA Grieshaber KG Cellule de mesure de pression capacitive pour l'enregistrement de la pression d'un fluide adjacent à la cellule de mesure de pression
US10209156B2 (en) * 2016-12-15 2019-02-19 Wisenstech Ltd. Micromachined pressure sensor and method of making the same
US11740264B1 (en) * 2021-02-05 2023-08-29 Peng Sun High temperature current sensor for power electronics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011901A (en) 1976-03-10 1977-03-15 Massachusetts Institute Of Technology Method determining the suitability of metal compositions for casting
US4141252A (en) * 1977-11-04 1979-02-27 Lodge Arthur S Flush pressure transducers for measuring pressures in a flowing fluid
US4178621A (en) * 1978-01-23 1979-12-11 Motorola, Inc. Electromechanical pressure transducer
US4422335A (en) * 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
US4765188A (en) * 1986-11-24 1988-08-23 Bourns Instruments, Inc. Pressure transducer with integral digital temperature compensation
DE4011901A1 (de) * 1990-04-12 1991-10-17 Vdo Schindling Kapazitiver drucksensor
DE4031791A1 (de) 1990-10-08 1992-04-09 Leybold Ag Sensor fuer ein kapazitaetsmanometer
US5343755A (en) * 1993-05-05 1994-09-06 Rosemount Inc. Strain gage sensor with integral temperature signal
SE506558C2 (sv) * 1994-04-14 1998-01-12 Cecap Ab Givarelement för tryckgivare

Also Published As

Publication number Publication date
AU6128598A (en) 1998-09-09
US6439056B1 (en) 2002-08-27
WO1998037393A1 (fr) 1998-08-27

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