SE9700613D0 - Sensorelement med temperaturmätning - Google Patents
Sensorelement med temperaturmätningInfo
- Publication number
- SE9700613D0 SE9700613D0 SE9700613A SE9700613A SE9700613D0 SE 9700613 D0 SE9700613 D0 SE 9700613D0 SE 9700613 A SE9700613 A SE 9700613A SE 9700613 A SE9700613 A SE 9700613A SE 9700613 D0 SE9700613 D0 SE 9700613D0
- Authority
- SE
- Sweden
- Prior art keywords
- diaphragm
- shielding plate
- base plate
- sensor element
- thermistors
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9700613A SE9700613D0 (sv) | 1997-02-20 | 1997-02-20 | Sensorelement med temperaturmätning |
PCT/SE1998/000303 WO1998037393A1 (en) | 1997-02-20 | 1998-02-20 | A sensor element having temperature measuring means |
AU61285/98A AU6128598A (en) | 1997-02-20 | 1998-02-20 | A sensor element having temperature measuring means |
US09/377,832 US6439056B1 (en) | 1997-02-20 | 1999-08-20 | Sensor element having temperature measuring means |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9700613A SE9700613D0 (sv) | 1997-02-20 | 1997-02-20 | Sensorelement med temperaturmätning |
Publications (1)
Publication Number | Publication Date |
---|---|
SE9700613D0 true SE9700613D0 (sv) | 1997-02-20 |
Family
ID=20405876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9700613A SE9700613D0 (sv) | 1997-02-20 | 1997-02-20 | Sensorelement med temperaturmätning |
Country Status (4)
Country | Link |
---|---|
US (1) | US6439056B1 (xx) |
AU (1) | AU6128598A (xx) |
SE (1) | SE9700613D0 (xx) |
WO (1) | WO1998037393A1 (xx) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6698294B2 (en) * | 2000-09-07 | 2004-03-02 | Vega Grieshaber Kg | Pressure cell with temperature sensors and pressure measuring method |
WO2002065487A1 (fr) * | 2001-02-16 | 2002-08-22 | K-Tech Devices Corp. | Element de resistance, capteur de contrainte et procede de fabrication correspondant |
JP3870918B2 (ja) * | 2002-10-23 | 2007-01-24 | 株式会社デンソー | 温度センサ一体型圧力センサ装置 |
JP3870917B2 (ja) * | 2003-03-19 | 2007-01-24 | 株式会社デンソー | 温度センサ一体型圧力センサ装置及びその温度センサ固定方法 |
JP4161270B2 (ja) * | 2003-10-29 | 2008-10-08 | 株式会社デンソー | 衝突荷重検出センサ |
JP2005274412A (ja) * | 2004-03-25 | 2005-10-06 | Denso Corp | 温度センサ一体型圧力センサ装置 |
US7284444B2 (en) * | 2005-12-30 | 2007-10-23 | Kulite Semiconductor Products, Inc. | Hermetically sealed displacement sensor apparatus |
JP4867437B2 (ja) * | 2006-04-05 | 2012-02-01 | 株式会社デンソー | 温度センサ |
US7516675B2 (en) * | 2007-07-03 | 2009-04-14 | Kulite Semiconductor Products, Inc. | Joystick sensor apparatus |
DE102009002662B4 (de) | 2009-04-27 | 2022-11-24 | Ifm Electronic Gmbh | Kapazitiver Drucksensor als Kombinationssensor zur Erfassung weiterer Messgrößen |
US9016133B2 (en) * | 2011-01-05 | 2015-04-28 | Nxp, B.V. | Pressure sensor with pressure-actuated switch |
JP2014085259A (ja) * | 2012-10-24 | 2014-05-12 | Toyo Sokki Kk | ひずみゲージ、ひずみ測定装置及びひずみゲージ式変換器 |
EP2784462B1 (de) * | 2013-03-27 | 2015-03-11 | VEGA Grieshaber KG | Kapazitive Druckmesszelle zur Erfassung des Druckes eines an die Messzelle angrenzenden Mediums |
US10209156B2 (en) * | 2016-12-15 | 2019-02-19 | Wisenstech Ltd. | Micromachined pressure sensor and method of making the same |
US11740264B1 (en) * | 2021-02-05 | 2023-08-29 | Peng Sun | High temperature current sensor for power electronics |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4011901A (en) | 1976-03-10 | 1977-03-15 | Massachusetts Institute Of Technology | Method determining the suitability of metal compositions for casting |
US4141252A (en) * | 1977-11-04 | 1979-02-27 | Lodge Arthur S | Flush pressure transducers for measuring pressures in a flowing fluid |
US4178621A (en) * | 1978-01-23 | 1979-12-11 | Motorola, Inc. | Electromechanical pressure transducer |
US4422335A (en) * | 1981-03-25 | 1983-12-27 | The Bendix Corporation | Pressure transducer |
US4765188A (en) * | 1986-11-24 | 1988-08-23 | Bourns Instruments, Inc. | Pressure transducer with integral digital temperature compensation |
DE4011901A1 (de) * | 1990-04-12 | 1991-10-17 | Vdo Schindling | Kapazitiver drucksensor |
DE4031791A1 (de) | 1990-10-08 | 1992-04-09 | Leybold Ag | Sensor fuer ein kapazitaetsmanometer |
US5343755A (en) * | 1993-05-05 | 1994-09-06 | Rosemount Inc. | Strain gage sensor with integral temperature signal |
SE506558C2 (sv) * | 1994-04-14 | 1998-01-12 | Cecap Ab | Givarelement för tryckgivare |
-
1997
- 1997-02-20 SE SE9700613A patent/SE9700613D0/xx unknown
-
1998
- 1998-02-20 AU AU61285/98A patent/AU6128598A/en not_active Abandoned
- 1998-02-20 WO PCT/SE1998/000303 patent/WO1998037393A1/en active Application Filing
-
1999
- 1999-08-20 US US09/377,832 patent/US6439056B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AU6128598A (en) | 1998-09-09 |
US6439056B1 (en) | 2002-08-27 |
WO1998037393A1 (en) | 1998-08-27 |
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