SE9601280L - Anordning för tillförsel av luft till ett rum - Google Patents

Anordning för tillförsel av luft till ett rum

Info

Publication number
SE9601280L
SE9601280L SE9601280A SE9601280A SE9601280L SE 9601280 L SE9601280 L SE 9601280L SE 9601280 A SE9601280 A SE 9601280A SE 9601280 A SE9601280 A SE 9601280A SE 9601280 L SE9601280 L SE 9601280L
Authority
SE
Sweden
Prior art keywords
air
pct
zones
mixing
room
Prior art date
Application number
SE9601280A
Other languages
Unknown language ( )
English (en)
Other versions
SE9601280D0 (sv
SE508807C2 (sv
Inventor
Bertil Larsson
Original Assignee
Flaekt Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Flaekt Ab filed Critical Flaekt Ab
Priority to SE9601280A priority Critical patent/SE508807C2/sv
Publication of SE9601280D0 publication Critical patent/SE9601280D0/sv
Priority to US09/155,611 priority patent/US6080060A/en
Priority to JP9535184A priority patent/JP2000507686A/ja
Priority to AU24154/97A priority patent/AU2415497A/en
Priority to EP97919806A priority patent/EP0891521A1/en
Priority to PCT/SE1997/000461 priority patent/WO1997037173A1/en
Publication of SE9601280L publication Critical patent/SE9601280L/sv
Priority to NO984573A priority patent/NO307274B1/no
Publication of SE508807C2 publication Critical patent/SE508807C2/sv

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
SE9601280A 1996-04-01 1996-04-01 Anordning för tillförsel av luft till renrum indelat i zoner med olika klimatkrav SE508807C2 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE9601280A SE508807C2 (sv) 1996-04-01 1996-04-01 Anordning för tillförsel av luft till renrum indelat i zoner med olika klimatkrav
US09/155,611 US6080060A (en) 1996-04-01 1997-03-20 Equipment for air supply to a room
JP9535184A JP2000507686A (ja) 1996-04-01 1997-03-20 空間に空気を供給するための装置
AU24154/97A AU2415497A (en) 1996-04-01 1997-03-20 Equipment for air supply to a room
EP97919806A EP0891521A1 (en) 1996-04-01 1997-03-20 Equipment for air supply to a room
PCT/SE1997/000461 WO1997037173A1 (en) 1996-04-01 1997-03-20 Equipment for air supply to a room
NO984573A NO307274B1 (no) 1996-04-01 1998-09-30 Anordning for lufttilfoersel til et rom

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9601280A SE508807C2 (sv) 1996-04-01 1996-04-01 Anordning för tillförsel av luft till renrum indelat i zoner med olika klimatkrav

Publications (3)

Publication Number Publication Date
SE9601280D0 SE9601280D0 (sv) 1996-04-01
SE9601280L true SE9601280L (sv) 1997-10-02
SE508807C2 SE508807C2 (sv) 1998-11-09

Family

ID=20402067

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9601280A SE508807C2 (sv) 1996-04-01 1996-04-01 Anordning för tillförsel av luft till renrum indelat i zoner med olika klimatkrav

Country Status (7)

Country Link
US (1) US6080060A (sv)
EP (1) EP0891521A1 (sv)
JP (1) JP2000507686A (sv)
AU (1) AU2415497A (sv)
NO (1) NO307274B1 (sv)
SE (1) SE508807C2 (sv)
WO (1) WO1997037173A1 (sv)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3773327B2 (ja) * 1997-05-14 2006-05-10 三機工業株式会社 空調装置
JP3476395B2 (ja) * 1999-09-24 2003-12-10 Ｎｅｃエレクトロニクス株式会社 クリーンルーム及びクリーンルームの空調方法
TW501194B (en) * 2000-08-23 2002-09-01 Tokyo Electron Ltd Processing system for object to be processed
FR2824626B1 (fr) * 2001-05-14 2004-04-16 Pierre Bridenne Procede et dispositif pour diffuser un flux de protection a l'egard d'une ambiance environnante
US6817941B1 (en) * 2001-10-25 2004-11-16 Lsi Logic Corporation Uniform airflow diffuser
US6718277B2 (en) 2002-04-17 2004-04-06 Hewlett-Packard Development Company, L.P. Atmospheric control within a building
US6986654B2 (en) * 2002-07-03 2006-01-17 Therics, Inc. Apparatus, systems and methods for use in three-dimensional printing
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US7204751B2 (en) * 2003-07-07 2007-04-17 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for filtering contaminants
FR2904097B1 (fr) * 2006-07-24 2009-05-22 Green Cap Soc Par Actions Simp Procede et installation de traitement d'air pour volumes confines temporairement, et volumes confines faisant application de ces procede et installation
JP2008032335A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp ミニエンバイロメント装置、検査装置、製造装置、及び空間の清浄化方法
ES2367292B1 (es) * 2010-04-22 2012-05-18 Jorge Galiano Bernat Dispositivo para el soporte de un purificador de aire.
US9365091B2 (en) * 2013-02-01 2016-06-14 Ford Global Technologies, Llc Vehicle thermal management and filtration system
US10337751B2 (en) * 2016-08-04 2019-07-02 Environmental Information Services, Inc. Liquefied petroleum gas solvent extraction room ventilation system and methods
KR102139249B1 (ko) * 2018-04-03 2020-07-29 우범제 이에프이엠
US11543147B1 (en) * 2019-10-28 2023-01-03 Trane International Inc. Systems and methods for detecting air filter fouling in a climate control system
JP7410565B2 (ja) * 2020-03-27 2024-01-10 国立研究開発法人産業技術総合研究所 カプセル化クリーンルームシステム

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2609743A (en) * 1947-01-16 1952-09-09 Carrier Corp Dual duct air conditioning system
DE948551C (de) * 1950-09-28 1956-09-06 William Joseph Caldwell Verfahren zum Klimatisieren von Raeumen
US3824909A (en) * 1970-04-08 1974-07-23 Cgt Corp Distribution system for clean rooms
AU499313B2 (en) * 1974-11-29 1979-04-12 Carrier Corporation Air conditioning system
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
AU597470B2 (en) * 1988-02-02 1990-05-31 Hirayama Setsubi Kabushiki Kaisha Clean room system
US5058491A (en) * 1990-08-27 1991-10-22 Taiwan Semiconductor Manufacturing Company, Ltd. Building and method for manufacture of integrated circuits
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
JPH0926176A (ja) * 1995-07-07 1997-01-28 Canon Inc 処理システムとこれを用いたデバイス生産方法
JP3654612B2 (ja) * 1996-09-24 2005-06-02 株式会社ルネサステクノロジ クリーンルーム

Also Published As

Publication number Publication date
SE9601280D0 (sv) 1996-04-01
EP0891521A1 (en) 1999-01-20
SE508807C2 (sv) 1998-11-09
WO1997037173A1 (en) 1997-10-09
NO984573D0 (no) 1998-09-30
AU2415497A (en) 1997-10-22
US6080060A (en) 2000-06-27
NO984573L (no) 1998-11-26
JP2000507686A (ja) 2000-06-20
NO307274B1 (no) 2000-03-06

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