SE9401386L - Sätt att bestämma omfattningen av syreprecipitat i kisel - Google Patents

Sätt att bestämma omfattningen av syreprecipitat i kisel

Info

Publication number
SE9401386L
SE9401386L SE9401386A SE9401386A SE9401386L SE 9401386 L SE9401386 L SE 9401386L SE 9401386 A SE9401386 A SE 9401386A SE 9401386 A SE9401386 A SE 9401386A SE 9401386 L SE9401386 L SE 9401386L
Authority
SE
Sweden
Prior art keywords
pct
sec
concentration
measurements
extent
Prior art date
Application number
SE9401386A
Other languages
Unknown language ( )
English (en)
Other versions
SE9401386D0 (sv
SE502694C2 (sv
Inventor
Lennart Lindstroem
Tomas Hallberg
Original Assignee
Foersvarets Forskningsanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foersvarets Forskningsanstalt filed Critical Foersvarets Forskningsanstalt
Priority to SE9401386A priority Critical patent/SE502694C2/sv
Publication of SE9401386D0 publication Critical patent/SE9401386D0/sv
Priority to PCT/SE1995/000438 priority patent/WO1995029397A1/en
Priority to US08/727,563 priority patent/US5757003A/en
Priority to EP95917539A priority patent/EP0756705A1/en
Priority to JP7527581A priority patent/JPH10504639A/ja
Publication of SE9401386L publication Critical patent/SE9401386L/sv
Publication of SE502694C2 publication Critical patent/SE502694C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Spectrometry And Color Measurement (AREA)
SE9401386A 1994-04-22 1994-04-22 Sätt att bestämma omfattningen av syreprecipitat i kisel SE502694C2 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9401386A SE502694C2 (sv) 1994-04-22 1994-04-22 Sätt att bestämma omfattningen av syreprecipitat i kisel
PCT/SE1995/000438 WO1995029397A1 (en) 1994-04-22 1995-04-21 A method to determine the extent of oxygen precipitate in silicon
US08/727,563 US5757003A (en) 1994-04-22 1995-04-21 Method to determine the extent of oxygen precipitate in silicon
EP95917539A EP0756705A1 (en) 1994-04-22 1995-04-21 A method to determine the extent of oxygen precipitate in silicon
JP7527581A JPH10504639A (ja) 1994-04-22 1995-04-21 シリコン中の酸素析出の程度を定量するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9401386A SE502694C2 (sv) 1994-04-22 1994-04-22 Sätt att bestämma omfattningen av syreprecipitat i kisel

Publications (3)

Publication Number Publication Date
SE9401386D0 SE9401386D0 (sv) 1994-04-22
SE9401386L true SE9401386L (sv) 1995-10-23
SE502694C2 SE502694C2 (sv) 1995-12-11

Family

ID=20393757

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9401386A SE502694C2 (sv) 1994-04-22 1994-04-22 Sätt att bestämma omfattningen av syreprecipitat i kisel

Country Status (5)

Country Link
US (1) US5757003A (sv)
EP (1) EP0756705A1 (sv)
JP (1) JPH10504639A (sv)
SE (1) SE502694C2 (sv)
WO (1) WO1995029397A1 (sv)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113030000B (zh) * 2021-03-01 2023-02-21 西安奕斯伟材料科技有限公司 单晶硅棒间隙氧含量的测量方法及装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429047A (en) * 1981-08-28 1984-01-31 Rca Corporation Method for determining oxygen content in semiconductor material
US4809196A (en) * 1986-04-10 1989-02-28 International Business Machines Corporation Method for designating/sorting semiconductor wafers according to predicted oxygen precipitation behavior
US5066599A (en) * 1989-07-27 1991-11-19 Fujitsu Limited Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (ftir) and semiconductor device fabrication method using the same
US5386118A (en) * 1992-05-11 1995-01-31 Shin-Etsu Handotai Co., Ltd. Method and apparatus for determination of interstitial oxygen concentration in silicon single crystal
US5444246A (en) * 1992-09-30 1995-08-22 Shin-Etsu Handotai Co., Ltd. Determining carbon concentration in silicon single crystal by FT-IR

Also Published As

Publication number Publication date
SE9401386D0 (sv) 1994-04-22
EP0756705A1 (en) 1997-02-05
US5757003A (en) 1998-05-26
SE502694C2 (sv) 1995-12-11
WO1995029397A1 (en) 1995-11-02
JPH10504639A (ja) 1998-05-06

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