SE8803590A - - Google Patents

Info

Publication number
SE8803590A
SE8803590A SE8803590A SE8803590A SE8803590A SE 8803590 A SE8803590 A SE 8803590A SE 8803590 A SE8803590 A SE 8803590A SE 8803590 A SE8803590 A SE 8803590A SE 8803590 A SE8803590 A SE 8803590A
Authority
SE
Sweden
Prior art keywords
electrode
capsule
diaphragm
capacitance
appearing
Prior art date
Application number
SE8803590A
Other languages
English (en)
Other versions
SE8803590D0 (sv
SE461057B (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of SE8803590D0 publication Critical patent/SE8803590D0/xx
Publication of SE8803590A publication Critical patent/SE8803590A/xx
Publication of SE461057B publication Critical patent/SE461057B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SE8803590A 1987-05-18 1988-10-10 Kapacitiv tryckomvandlaranordning jaemte ett foerfarande foer kapacitiv maetning av tryck oever ett brett tryckomraade SE461057B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/050,898 US4785669A (en) 1987-05-18 1987-05-18 Absolute capacitance manometers

Publications (3)

Publication Number Publication Date
SE8803590D0 SE8803590D0 (sv) 1988-10-10
SE8803590A true SE8803590A (ja) 1989-12-18
SE461057B SE461057B (sv) 1989-12-18

Family

ID=21968155

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8803590A SE461057B (sv) 1987-05-18 1988-10-10 Kapacitiv tryckomvandlaranordning jaemte ett foerfarande foer kapacitiv maetning av tryck oever ett brett tryckomraade

Country Status (6)

Country Link
US (1) US4785669A (ja)
EP (1) EP0291885B1 (ja)
JP (1) JP2532128B2 (ja)
CA (1) CA1316010C (ja)
DE (1) DE3883067T2 (ja)
SE (1) SE461057B (ja)

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* Cited by examiner, † Cited by third party
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US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
US5247834A (en) * 1990-02-09 1993-09-28 Avl Gesellschaft Fuer Verbrennungskraftmaschinen Und Messtechnik Gmbh. Prof. Dr.Dr. H.C. Hans List Density measuring apparatus
DE59006845D1 (de) * 1990-05-02 1994-09-22 Siemens Ag Kapazitiver Sensor.
US5515711A (en) * 1995-06-26 1996-05-14 Mks Instruments, Inc. Pressure measurement and calibration apparatus using gravity-induced diaphragm deflection
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US5811685A (en) * 1996-12-11 1998-09-22 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
WO2000028295A1 (en) * 1998-11-06 2000-05-18 Bausch & Lomb Surgical, Inc. Capacitive vacuum sensor
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6508131B2 (en) 1999-05-14 2003-01-21 Rosemount Inc. Process sensor module having a single ungrounded input/output conductor
US6465320B1 (en) * 2000-06-16 2002-10-15 Motorola, Inc. Electronic component and method of manufacturing
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6901808B1 (en) 2002-02-12 2005-06-07 Lam Research Corporation Capacitive manometer having reduced process drift
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
US7000483B2 (en) * 2003-02-03 2006-02-21 Dielectrics Industries, Inc. Inflatable manometers
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US8145180B2 (en) 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US7262693B2 (en) 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
US8160535B2 (en) 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7047832B1 (en) * 2004-11-08 2006-05-23 Oporgenics, Inc., Llc Apparatus for measuring gas exchange
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
JP2006208225A (ja) * 2005-01-28 2006-08-10 Nippon M K S Kk 差圧センサー
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
EP1896910A1 (en) 2005-06-27 2008-03-12 Rosemount, Inc. Field device with dynamically adjustable power consumption radio frequency communication
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
US7757563B2 (en) * 2008-04-10 2010-07-20 Mks Instruments, Inc. Capacitance manometers and methods of making same
US8929948B2 (en) 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
CN102067048B (zh) 2008-06-17 2017-03-08 罗斯蒙特公司 用于具有可变压降的现场设备的rf适配器
JP5554328B2 (ja) 2008-06-17 2014-07-23 ローズマウント インコーポレイテッド 本質安全の低電圧クランプ回路を備えるフィールド装置用ｒｆアダプタ
CN102084626B (zh) 2008-06-17 2013-09-18 罗斯蒙德公司 用于具有环路电流旁路的现场设备的rf适配器
US8694060B2 (en) 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
JP2010169665A (ja) * 2008-12-24 2010-08-05 Canon Anelva Corp 静電容量型隔膜真空計、真空装置
US9674976B2 (en) 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8626087B2 (en) 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
SG182731A1 (en) * 2010-02-02 2012-08-30 Mks Instr Inc Capacitive pressure sensor
US8561471B2 (en) 2010-02-02 2013-10-22 Mks Instruments, Inc. Capacitive pressure sensor with improved electrode structure
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
TWI568999B (zh) 2011-09-29 2017-02-01 Ｍｋｓ公司 具有改良的電極結構之電容式壓力感測器
WO2013051199A1 (ja) * 2011-10-05 2013-04-11 キヤノンアネルバ株式会社 隔膜型圧力計
JP5826943B2 (ja) 2011-10-11 2015-12-02 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 静電容量型圧力計アセンブリ
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
US10288509B2 (en) * 2013-11-25 2019-05-14 Horiba Stec, Co., Ltd. Capacitive pressure sensor with reduced sensitivity to temperature change
DE102014012918B4 (de) 2014-09-05 2019-01-03 Heinz Plöchinger Dual-Kapazitäts-Manometer mit kleinem Messvolumen
RU169407U1 (ru) * 2016-12-19 2017-03-16 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" Электретный датчик давления
RU192599U1 (ru) * 2019-04-11 2019-09-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" (ТвГТУ) Струйный детектор газов
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
DE102022102437A1 (de) 2022-02-02 2023-08-03 Heinz Plöchinger Korrekturverfahren für Dual-Kapazitäts-Manometer
US11467051B1 (en) 2022-04-11 2022-10-11 Heinz Plöchinger Method for correcting a dual capacitance pressure sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484732A (en) * 1967-12-07 1969-12-16 Robert W Postma Dual range pressure sensor
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
JPS56148029A (en) * 1980-04-16 1981-11-17 Bendix Corp Pressure capsule for pressure sensor
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4499773A (en) * 1983-04-28 1985-02-19 Dresser Industries, Inc. Variable capacitance pressure transducer

Also Published As

Publication number Publication date
CA1316010C (en) 1993-04-13
JP2532128B2 (ja) 1996-09-11
US4785669A (en) 1988-11-22
DE3883067D1 (de) 1993-09-16
EP0291885A2 (en) 1988-11-23
EP0291885A3 (en) 1991-01-09
JPS6479632A (en) 1989-03-24
SE8803590D0 (sv) 1988-10-10
SE461057B (sv) 1989-12-18
DE3883067T2 (de) 1994-03-03
EP0291885B1 (en) 1993-08-11

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