FI884644A - Manometer med absolut kapasitans. - Google Patents

Manometer med absolut kapasitans. Download PDF

Info

Publication number
FI884644A
FI884644A FI884644A FI884644A FI884644A FI 884644 A FI884644 A FI 884644A FI 884644 A FI884644 A FI 884644A FI 884644 A FI884644 A FI 884644A FI 884644 A FI884644 A FI 884644A
Authority
FI
Finland
Prior art keywords
electrode
pressure
capacitance
changes
membrane
Prior art date
Application number
FI884644A
Other languages
English (en)
Other versions
FI89982B (fi
FI884644A0 (fi
FI89982C (fi
Inventor
Richard A Benson
John A Denner
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Priority to FI884644A priority Critical patent/FI89982C/fi
Publication of FI884644A0 publication Critical patent/FI884644A0/fi
Publication of FI884644A publication Critical patent/FI884644A/fi
Publication of FI89982B publication Critical patent/FI89982B/fi
Application granted granted Critical
Publication of FI89982C publication Critical patent/FI89982C/fi

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
FI884644A 1988-10-10 1988-10-10 Kapacitiv absoluttryckomvandlare FI89982C (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FI884644A FI89982C (fi) 1988-10-10 1988-10-10 Kapacitiv absoluttryckomvandlare

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI884644 1988-10-10
FI884644A FI89982C (fi) 1988-10-10 1988-10-10 Kapacitiv absoluttryckomvandlare

Publications (4)

Publication Number Publication Date
FI884644A0 FI884644A0 (fi) 1988-10-10
FI884644A true FI884644A (fi) 1990-04-11
FI89982B FI89982B (fi) 1993-08-31
FI89982C FI89982C (fi) 1993-12-10

Family

ID=8527170

Family Applications (1)

Application Number Title Priority Date Filing Date
FI884644A FI89982C (fi) 1988-10-10 1988-10-10 Kapacitiv absoluttryckomvandlare

Country Status (1)

Country Link
FI (1) FI89982C (fi)

Also Published As

Publication number Publication date
FI89982B (fi) 1993-08-31
FI884644A0 (fi) 1988-10-10
FI89982C (fi) 1993-12-10

Similar Documents

Publication Publication Date Title
SE8803590D0 (sv) Absoulut kapacitans manometer
Shah et al. On the surface flaw problem
DE59009568D1 (de) Kapazitiver Feuchtesensor.
EP0990885A3 (en) Capacitive pressure sensor
WO1998059228A3 (en) Capacitive pressure transducer with improved electrode support
WO2005093378A3 (en) Annular capacitive pressure sensor
FR2492937B1 (fr) Diaphragme deformable, notamment pour capteur de pression capacitif ou autres transducteurs
EP0911623A3 (en) High pressure sensor and method of forming
WO2004052046A3 (en) Thin membrane transducer
SE7503078L (sv) Kapacitivt kraftavkenningsorgan.
EP0902267A3 (de) Beschleunigungskompensierter Druckaufnehmer
EP1128173A3 (en) Capacitive semiconductor pressure sensor
DE59006238D1 (de) Kraftwandler.
FI884644A (fi) Manometer med absolut kapasitans.
JPS59171826A (ja) 静電容量型圧力センサ−の温度補償装置
TR199700699T1 (en) Bas�n� g�stergesi.
GB2019007A (en) In-Line Pressure Sensor
KR920012224A (ko) 건 및 건반
GB1586968A (en) Pressure transducer
AU1994299A (en) A pressure sensor for detecting small pressure differences and low pressures
DE58904807D1 (de) Halterung fuer das piezoelektrische roehrchen eines drucksensors.
SU679831A1 (ru) Мембранный узел
JPH0674848A (ja) 圧力センサー
Bonse Capacitive position transducers: Theoretical aspects and practical applications.
JPS6426117A (en) Pressure transducer

Legal Events

Date Code Title Description
BB Publication of examined application
FG Patent granted

Owner name: MKS INSTRUMENTS, INC.

MA Patent expired