SE8702531L - THERMAL DETECTOR SETUP - Google Patents

THERMAL DETECTOR SETUP

Info

Publication number
SE8702531L
SE8702531L SE8702531A SE8702531A SE8702531L SE 8702531 L SE8702531 L SE 8702531L SE 8702531 A SE8702531 A SE 8702531A SE 8702531 A SE8702531 A SE 8702531A SE 8702531 L SE8702531 L SE 8702531L
Authority
SE
Sweden
Prior art keywords
layer
thermal detector
contact
electrode
substrate
Prior art date
Application number
SE8702531A
Other languages
Unknown language ( )
Swedish (sv)
Other versions
SE466571B (en
SE8702531D0 (en
Inventor
D J Pedder
N M Shorrocks
A D Parsons
R W Whatmore
Original Assignee
Plessey Overseas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Overseas filed Critical Plessey Overseas
Publication of SE8702531D0 publication Critical patent/SE8702531D0/en
Publication of SE8702531L publication Critical patent/SE8702531L/en
Publication of SE466571B publication Critical patent/SE466571B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14875—Infrared CCD or CID imagers
    • H01L27/14881—Infrared CCD or CID imagers of the hybrid type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/206—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices on foils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

A thermal detector array comprises discrete thermal detector elements arranged in a two-dimensional array, each element 1 being supported on one side of a layer 3 of resilient low thermal conductivity material which serves also to space said elements apart from one another, an opposite side of said layer carrying a common electrode structure 5 which is in contact with each element and provides interconnections therebetween by means of high thermal resistance electrically conductive tracks 7, each element 1 having an element electrode 9 which is in contact with an inwardly facing surface of the element, each element electrode 9 being connected by means of a bonding member 13 to an input circuit 15 of a semiconductor substrate 11, such that the said bonding members 13 serve to support the layer 3 with respect to the substrate 11, and each element 1 having a radiation absorber 17 associated therewith. <IMAGE>
SE8702531A 1985-09-12 1987-06-17 THERMAL DETECTOR SETUP COMPREHENSIVE DISCRETE THERMAL DETECTOR ELEMENTS SE466571B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8522638A GB2200246B (en) 1985-09-12 1985-09-12 Thermal detector array

Publications (3)

Publication Number Publication Date
SE8702531D0 SE8702531D0 (en) 1987-06-17
SE8702531L true SE8702531L (en) 1988-08-06
SE466571B SE466571B (en) 1992-03-02

Family

ID=10585093

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8702531A SE466571B (en) 1985-09-12 1987-06-17 THERMAL DETECTOR SETUP COMPREHENSIVE DISCRETE THERMAL DETECTOR ELEMENTS

Country Status (7)

Country Link
BE (1) BE102T1 (en)
DE (1) DE3644882A1 (en)
FR (2) FR2624603B1 (en)
GB (1) GB2200246B (en)
IT (1) IT1235675B (en)
NL (1) NL8615006A (en)
SE (1) SE466571B (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621688D0 (en) * 1986-09-09 1986-10-15 Graviner Ltd Radiation detection arrangements
GB2206997A (en) * 1987-07-10 1989-01-18 Philips Electronic Associated Arrays of pyroelectric or ferroelectric infrared detector elements
US5047644A (en) * 1989-07-31 1991-09-10 Texas Instruments Incorporated Polyimide thermal isolation mesa for a thermal imaging system
US5306912A (en) * 1989-10-21 1994-04-26 Thorn Emi Plc Optically addressed thermal imaging device
FR2670325B1 (en) * 1990-12-11 1993-01-22 Thomson Composants Militaires MONOLITHIC INFRARED DETECTOR WITH PYROELECTRIC MATERIAL.
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
DE69211153T2 (en) * 1991-11-04 1996-12-05 Honeywell Inc THIN FILM PYROELECTRIC IMAGE MATRIX
GB2274543A (en) * 1993-01-21 1994-07-27 Central Research Lab Ltd Infrared detector
GB9604786D0 (en) * 1996-03-06 1996-09-25 Marconi Gec Ltd Micromachined devices
US5942791A (en) * 1996-03-06 1999-08-24 Gec-Marconi Limited Micromachined devices having microbridge structure
EP0853237B1 (en) 1997-01-14 2000-06-21 Infrared Integrated Systems Ltd. Sensor using a detector array
GB2335077B (en) * 1998-03-04 2003-05-28 Marconi Gec Ltd Radiation detectors
FR2788885B1 (en) * 1999-01-21 2003-07-18 Commissariat Energie Atomique DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME
EP1178294A1 (en) * 2000-08-04 2002-02-06 Ecole Polytechnique Federale De Lausanne Pyroelectric sensor with reduced parasitic thermal coupling between its pixels
US20040155188A1 (en) * 2001-06-08 2004-08-12 Markus Kohli Infrared sensor and method for making same
FR2862160B1 (en) * 2003-11-10 2006-05-12 Ulis DEVICE FOR DETECTING INFRARED RADIATION WITH BOLOMETRIC DETECTORS
FR2875606B1 (en) 2004-09-22 2006-11-10 Commissariat Energie Atomique DETECTOR FOR ELECTROMAGNETIC RADIATION AND PARTICLES WITH REDUCED CONNECTIONS
DE102005001966B4 (en) * 2005-01-15 2009-08-20 Infratec Gmbh Infrarotsensorik Und Messtechnik Microphone-reduced pyroelectric detector
JP5644121B2 (en) * 2010-01-26 2014-12-24 セイコーエプソン株式会社 THERMAL TYPE PHOTODETECTOR, THERMAL TYPE PHOTODETECTOR, ELECTRONIC DEVICE, AND METHOD FOR PRODUCING THERMAL TYPE OPTICAL DETECTOR
JP4833382B2 (en) * 2010-03-11 2011-12-07 パナソニック株式会社 Method of measuring temperature using pyroelectric temperature sensor
CN102437166B (en) * 2011-10-09 2013-05-01 中国科学院苏州纳米技术与纳米仿生研究所 Manufacturing method of non-refrigeration infrared detection system pixel array
FR3006438B1 (en) 2013-06-04 2015-06-26 Commissariat Energie Atomique TEMPERATURE SENSOR

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3801949A (en) * 1973-03-08 1974-04-02 Rca Corp Thermal detector and method of making the same
US4039833A (en) * 1976-08-17 1977-08-02 The United States Of America As Represented By The Secretary Of The Navy High density infrared detector array
GB1523347A (en) * 1976-11-16 1978-08-31 Secr Defence Pyroelectric tragets
GB1532293A (en) * 1977-06-14 1978-11-15 Secr Defence Pyroelectric vidicon targets and a method and machine for reticulating them
GB1592500A (en) * 1977-12-01 1981-07-08 Roundy C B Pyroelectric infrared detection system
GB2030023B (en) * 1977-12-19 1982-08-04 Texas Instruments Inc Ferroelectric imaging system
GB2028579B (en) * 1978-08-22 1982-12-22 English Electric Valve Co Ltd Target for a pyroelectric camera
US4317063A (en) * 1978-10-28 1982-02-23 Plessey Handel Und Investments Ag Pyroelectric detectors
GB2035685B (en) * 1978-10-28 1983-05-05 Plessey Co Ltd Pyroelectric detectors
US4532434A (en) * 1978-10-30 1985-07-30 Phillips Petroleum Company Waveform generator
US4354109A (en) * 1979-12-31 1982-10-12 Honeywell Inc. Mounting for pyroelectric detecctor arrays
DE3045118C2 (en) * 1980-11-29 1983-10-13 Georg Dipl.-Ing. 7500 Karlsruhe Richter Infrared detector and method of manufacture
GB2095905B (en) * 1981-03-27 1985-01-16 Philips Electronic Associated Infra-red radiation imaging devices and methods for their manufacture
GB2100058B (en) * 1981-06-05 1985-03-20 Philips Electronic Associated Pyroelectric detector
US4532424A (en) * 1983-04-25 1985-07-30 Rockwell International Corporation Pyroelectric thermal detector array
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device

Also Published As

Publication number Publication date
SE466571B (en) 1992-03-02
FR2624603A1 (en) 1989-06-16
FR2624603B1 (en) 1993-04-30
GB8522638D0 (en) 1988-05-25
GB2200246A (en) 1988-07-27
FR2620531A1 (en) 1989-03-17
IT1235675B (en) 1992-09-21
NL8615006A (en) 1988-08-01
DE3644882A1 (en) 1988-11-17
FR2620531B1 (en) 1993-11-05
GB2200246B (en) 1989-11-01
SE8702531D0 (en) 1987-06-17
BE102T1 (en) 1988-08-10

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