FR2788885B1 - DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME - Google Patents

DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME

Info

Publication number
FR2788885B1
FR2788885B1 FR9900632A FR9900632A FR2788885B1 FR 2788885 B1 FR2788885 B1 FR 2788885B1 FR 9900632 A FR9900632 A FR 9900632A FR 9900632 A FR9900632 A FR 9900632A FR 2788885 B1 FR2788885 B1 FR 2788885B1
Authority
FR
France
Prior art keywords
manufacturing
same
electromagnetic radiation
thermal detection
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9900632A
Other languages
French (fr)
Other versions
FR2788885A1 (en
Inventor
Jean Jacques Yon
Michel Vilain
Buffet Jean Louis Ouvrier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9900632A priority Critical patent/FR2788885B1/en
Priority to EP00900622A priority patent/EP1147560A1/en
Priority to PCT/FR2000/000120 priority patent/WO2000044050A1/en
Publication of FR2788885A1 publication Critical patent/FR2788885A1/en
Application granted granted Critical
Publication of FR2788885B1 publication Critical patent/FR2788885B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14669—Infrared imagers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
FR9900632A 1999-01-21 1999-01-21 DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME Expired - Fee Related FR2788885B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9900632A FR2788885B1 (en) 1999-01-21 1999-01-21 DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME
EP00900622A EP1147560A1 (en) 1999-01-21 2000-01-20 Electromagnetic radiation heat sensor array and method for making same
PCT/FR2000/000120 WO2000044050A1 (en) 1999-01-21 2000-01-20 Electromagnetic radiation heat sensor array and method for making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9900632A FR2788885B1 (en) 1999-01-21 1999-01-21 DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME

Publications (2)

Publication Number Publication Date
FR2788885A1 FR2788885A1 (en) 2000-07-28
FR2788885B1 true FR2788885B1 (en) 2003-07-18

Family

ID=9541069

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9900632A Expired - Fee Related FR2788885B1 (en) 1999-01-21 1999-01-21 DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME

Country Status (3)

Country Link
EP (1) EP1147560A1 (en)
FR (1) FR2788885B1 (en)
WO (1) WO2000044050A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007509315A (en) * 2003-10-09 2007-04-12 オカス コーポレーション Two-layer bolometer-type infrared sensor and method for manufacturing the same
GB2411521A (en) * 2004-02-27 2005-08-31 Qinetiq Ltd Fabrication method for micro-sensor device
FR2930639B1 (en) 2008-04-29 2011-07-01 Ulis THERMAL DETECTOR WITH HIGH INSULATION

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2200246B (en) * 1985-09-12 1989-11-01 Plessey Co Plc Thermal detector array
DE68923589T2 (en) * 1988-08-12 1996-01-18 Texas Instruments Inc Infrared detector.
JPH08261832A (en) * 1995-03-20 1996-10-11 Fujitsu Ltd Infrared sensor and its manufacture
FR2752299B1 (en) * 1996-08-08 1998-09-11 Commissariat Energie Atomique INFRARED DETECTOR AND MANUFACTURING METHOD THEREOF

Also Published As

Publication number Publication date
EP1147560A1 (en) 2001-10-24
FR2788885A1 (en) 2000-07-28
WO2000044050A1 (en) 2000-07-27

Similar Documents

Publication Publication Date Title
FR2798223B1 (en) SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
FR2781566B1 (en) TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF
DE69929237D1 (en) RADIATION DETECTION DEVICE
FR2752299B1 (en) INFRARED DETECTOR AND MANUFACTURING METHOD THEREOF
DE69940993D1 (en) Thermal detector with bolometric amplification
FR2830622B1 (en) MONITORING METHOD AND OPTO-ELECTRONIC DETECTOR
ATE363438T1 (en) FERMETURE INVIOLABLE AND PROCEDE DE FABRICATION ASSOCIE
DE69935389D1 (en) TEMPERATURE SENSOR AND ELECTRONIC DEVICE WITH THIS SENSOR
DE69928361D1 (en) Radiation detection device
EP1196759A4 (en) Particle sensor with cooled light trap and related method
FR2796718B1 (en) TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF
FR2745595B1 (en) THERMAL ADHESIVE COVER AND MANUFACTURING METHOD THEREOF
FR2797556B1 (en) HEAT DISSIPATOR AND ELECTRONIC UNIT USING THE SAME
PL338487A1 (en) Compound glass/ceramics heating plate at least one heating area and method of marking such heating area on such plate o
FR2802338B1 (en) ELECTROMAGNETIC RADIATION DETECTION DEVICE
FR2750799B1 (en) SEMICONDUCTOR DEVICE PREVENTING UNLOCKING AND MANUFACTURING METHOD THEREOF
FR2799003B1 (en) RADIATION DETECTOR USING COMPOSITE MATERIAL AND METHOD FOR MANUFACTURING THE SAME
FR2845206B1 (en) ULTRALEGER ELECTROMAGNETIC WAVE CONCENTRATOR, AND METHOD OF MANUFACTURING THE SAME
FR2715250B1 (en) Three-dimensional radiation detection device and method of manufacturing this device.
FR2801669B1 (en) THERMAL INFRARED DETECTOR
AU2003205843A8 (en) Device and method for the calibration and control of thermal detectors
FR2788885B1 (en) DEVICE FOR THE THERMAL DETECTION OF ELECTROMAGNETIC RADIATION AND METHOD OF MANUFACTURING THE SAME
FR2778907B1 (en) OZONIZER AND METHOD FOR MANUFACTURING SAID OZONIZER
DE69841401D1 (en) Thermal infrared sensor, manufacturing method and infrared imaging device
FR2779274B1 (en) INTEGRATED CIRCUIT WITH STOP LAYER AND MANUFACTURING METHOD THEREOF

Legal Events

Date Code Title Description
CL Concession to grant licences
TP Transmission of property
ST Notification of lapse

Effective date: 20110930