SE8405100D0 - CAPACITIVE MOISTURE ERRORS AND PROCEDURES FOR ITS RECOVERY - Google Patents

CAPACITIVE MOISTURE ERRORS AND PROCEDURES FOR ITS RECOVERY

Info

Publication number
SE8405100D0
SE8405100D0 SE8405100A SE8405100A SE8405100D0 SE 8405100 D0 SE8405100 D0 SE 8405100D0 SE 8405100 A SE8405100 A SE 8405100A SE 8405100 A SE8405100 A SE 8405100A SE 8405100 D0 SE8405100 D0 SE 8405100D0
Authority
SE
Sweden
Prior art keywords
moisture
structured
film
base electrode
polyimide
Prior art date
Application number
SE8405100A
Other languages
Swedish (sv)
Other versions
SE8405100L (en
Inventor
F Hegner
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Publication of SE8405100D0 publication Critical patent/SE8405100D0/en
Publication of SE8405100L publication Critical patent/SE8405100L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The capacitive moisture sensor is formed by the use of the thin-film art on a moisture-insensitive insulating substrate (1). A structured electrode (2) is formed as a base electrode on the substrate. The base electrode is covered with a thin, moisture-sensitive film of polyimide (7). On the polyimide film there is arranged a top electrode (8) which is structured to be substantially complementary to the base electrode (2). Between the structured base electrode (2) and the moisture-sensitive film (7) a moisture- insensitive electrically insulating film (3) can be arranged which is formed preferably by surface oxidation of the structured base electrode. The production process includes the feature that to form the moisture-sensitive film first of all a polyimide precursor is applied, then this is structured in accordance with the desired form of the moisture-sensitive film, and then the polyimide precursor is imidised for conversion to moisture-sensitive polyimide. <IMAGE>
SE8405100A 1983-10-28 1984-10-11 CAPACITIVE MOISTURE SENSOR AND PROCEDURE FOR ITS MANUFACTURING SE8405100L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833339276 DE3339276A1 (en) 1983-10-28 1983-10-28 CAPACITIVE HUMIDITY SENSOR AND METHOD FOR THE PRODUCTION THEREOF

Publications (2)

Publication Number Publication Date
SE8405100D0 true SE8405100D0 (en) 1984-10-11
SE8405100L SE8405100L (en) 1985-05-30

Family

ID=6213031

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8405100A SE8405100L (en) 1983-10-28 1984-10-11 CAPACITIVE MOISTURE SENSOR AND PROCEDURE FOR ITS MANUFACTURING

Country Status (8)

Country Link
JP (1) JPS60166854A (en)
DE (1) DE3339276A1 (en)
FI (1) FI844116L (en)
FR (1) FR2554237A1 (en)
GB (1) GB2149922A (en)
IT (1) IT1177031B (en)
NL (1) NL8403264A (en)
SE (1) SE8405100L (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI65674C (en) * 1982-12-21 1984-06-11 Vaisala Oy CAPACITIVE FUEL FARTIGHETSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNINGDAERAV
JPS6486053A (en) * 1987-09-29 1989-03-30 Toshiba Corp Sensitive element
JPH0786491B2 (en) * 1987-12-15 1995-09-20 三菱化学株式会社 Humidity sensor
JPH0786492B2 (en) * 1987-12-15 1995-09-20 三菱化学株式会社 Humidity sensor
JPH0786489B2 (en) * 1987-12-15 1995-09-20 三菱化学株式会社 Condensation sensor
FI901655A0 (en) * 1989-05-02 1990-04-02 Siemens Ag CAPACITIVE FUNCTION SENSOR.
DE3919864A1 (en) * 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co CAPACITIVE HUMIDITY SENSOR
WO1991003735A1 (en) * 1989-08-29 1991-03-21 E + E Elektronik Gesellschaft M.B.H. Process for making a moisture sensor
US4965698A (en) * 1989-09-27 1990-10-23 Johnson Service Company Capacitance humidity sensor
DE4438892C2 (en) * 1994-10-31 1997-09-04 Testo Gmbh & Co Adjustable capacitive sensor and method for adjusting such a sensor
WO2000025120A1 (en) * 1998-10-22 2000-05-04 Marco Koch Capacitive moisture sensor and a method for the production thereof
DE19917717C2 (en) * 1999-04-20 2002-10-17 Joerg Mueller Capacitive humidity sensor
WO2001042776A1 (en) * 1999-12-08 2001-06-14 Sensirion Ag Capacitive sensor
JP2002243689A (en) 2001-02-15 2002-08-28 Denso Corp Capacity-type humidity sensor and method for manufacturing the same
US6580600B2 (en) 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2002243690A (en) * 2001-02-20 2002-08-28 Denso Corp Capacitance type humidity sensor and method for manufacturing the same
JP2003004683A (en) 2001-06-15 2003-01-08 Denso Corp Capacitance-type humidity sensor
JP4501320B2 (en) 2001-07-16 2010-07-14 株式会社デンソー Capacitive humidity sensor
JP2006019589A (en) * 2004-07-02 2006-01-19 Denso Corp Semiconductor apparatus
DE102009047201A1 (en) 2009-11-26 2011-06-01 Hagen, Gunter, Dipl.-Ing. Use of organometallic framework material comprising organic compound that is at least bidentate and coordinately bonded to metal ion comprising ion of iron, zinc, copper, aluminum or cobalt to produce sorption layer for humidity sensor
US9063067B1 (en) 2010-11-17 2015-06-23 Alvin P. Schmitt Moisture sensing devices
JP7120519B2 (en) * 2018-07-12 2022-08-17 ミネベアミツミ株式会社 Humidity sensor and its manufacturing method
JP7193203B2 (en) * 2018-11-16 2022-12-20 ミネベアミツミ株式会社 detector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI48229C (en) * 1972-10-12 1974-07-10 Vaisala Oy Capacitive humidity sensor and manufacturing process for the same.
DE2848034A1 (en) * 1978-11-06 1980-05-14 Siemens Ag CAPACITIVE HUMIDITY SENSOR
FR2486656A1 (en) * 1980-07-09 1982-01-15 Commissariat Energie Atomique CAPACITIVE HYGROMETER
FI65674C (en) * 1982-12-21 1984-06-11 Vaisala Oy CAPACITIVE FUEL FARTIGHETSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNINGDAERAV

Also Published As

Publication number Publication date
IT8423303A1 (en) 1986-04-25
IT8423303A0 (en) 1984-10-25
FI844116A0 (en) 1984-10-18
FI844116L (en) 1985-04-29
NL8403264A (en) 1985-05-17
IT1177031B (en) 1987-08-26
DE3339276A1 (en) 1985-05-09
GB2149922A (en) 1985-06-19
FR2554237A1 (en) 1985-05-03
GB8425691D0 (en) 1984-11-14
JPS60166854A (en) 1985-08-30
SE8405100L (en) 1985-05-30

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