SE459887B - Tryckgivare - Google Patents

Tryckgivare

Info

Publication number
SE459887B
SE459887B SE8700556A SE8700556A SE459887B SE 459887 B SE459887 B SE 459887B SE 8700556 A SE8700556 A SE 8700556A SE 8700556 A SE8700556 A SE 8700556A SE 459887 B SE459887 B SE 459887B
Authority
SE
Sweden
Prior art keywords
recess
membrane
capacitor
pressure sensor
housing
Prior art date
Application number
SE8700556A
Other languages
English (en)
Swedish (sv)
Other versions
SE8700556L (sv
SE8700556D0 (sv
Inventor
S Jonsson
R Olsson
Original Assignee
Hydrolab Ab
Jonsson & Billquist Dev Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hydrolab Ab, Jonsson & Billquist Dev Ab filed Critical Hydrolab Ab
Priority to SE8700556A priority Critical patent/SE459887B/sv
Publication of SE8700556D0 publication Critical patent/SE8700556D0/xx
Priority to EP88901955A priority patent/EP0409827B1/de
Priority to DE88901955T priority patent/DE3883995T2/de
Priority to JP63501864A priority patent/JP2559266B2/ja
Priority to PCT/SE1988/000049 priority patent/WO1988006281A1/en
Publication of SE8700556L publication Critical patent/SE8700556L/
Priority to US07/411,501 priority patent/US4935841A/en
Publication of SE459887B publication Critical patent/SE459887B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SE8700556A 1987-02-12 1987-02-12 Tryckgivare SE459887B (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE8700556A SE459887B (sv) 1987-02-12 1987-02-12 Tryckgivare
EP88901955A EP0409827B1 (de) 1987-02-12 1988-02-11 Drucksensor
DE88901955T DE3883995T2 (de) 1987-02-12 1988-02-11 Drucksensor.
JP63501864A JP2559266B2 (ja) 1987-02-12 1988-02-11 圧力センサ
PCT/SE1988/000049 WO1988006281A1 (en) 1987-02-12 1988-02-11 Pressure sensor
US07/411,501 US4935841A (en) 1987-02-12 1989-02-11 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8700556A SE459887B (sv) 1987-02-12 1987-02-12 Tryckgivare

Publications (3)

Publication Number Publication Date
SE8700556D0 SE8700556D0 (sv) 1987-02-12
SE8700556L SE8700556L (sv) 1988-08-13
SE459887B true SE459887B (sv) 1989-08-14

Family

ID=20367493

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8700556A SE459887B (sv) 1987-02-12 1987-02-12 Tryckgivare

Country Status (6)

Country Link
US (1) US4935841A (de)
EP (1) EP0409827B1 (de)
JP (1) JP2559266B2 (de)
DE (1) DE3883995T2 (de)
SE (1) SE459887B (de)
WO (1) WO1988006281A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
US5050034A (en) * 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
DE4136995C2 (de) * 1991-11-11 1996-08-08 Sensycon Ind Sensorsyst Kapazitiver Drucksensor
KR940012737A (ko) * 1992-11-06 1994-06-24 루셀 이. 바우만 압력 변환 장치 및 그 제조방법
SE506558C2 (sv) * 1994-04-14 1998-01-12 Cecap Ab Givarelement för tryckgivare
DE19509250C1 (de) * 1995-03-15 1996-09-12 Bosch Gmbh Robert Verfahren zur Herstellung eines Drucksensors
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US20060149168A1 (en) * 2002-08-19 2006-07-06 Robert Czarnek Capacitive uterine contraction sensor
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
CN104316227B (zh) * 2014-11-05 2016-07-13 中国人民解放军总参谋部工程兵科研三所 一种双面感压式土压力传感器
DE102018101332A1 (de) * 2018-01-22 2019-07-25 Conbee Gmbh Getränkeuntersetzer, System mit einem Getränkeuntersetzer sowie Verfahren zur Datenkommunikation in einem System mit einem Getränkeuntersetzer
DE102018119835A1 (de) 2018-08-15 2020-02-20 Chemische Fabrik Budenheim Kg Polymerzusammensetzung mit Phosphonatflammschutzmittel
US12056994B2 (en) * 2020-07-15 2024-08-06 Xerox Corporation Systems and methods for improved object placement sensing for point-of-purchase sales
US12009159B2 (en) 2021-04-13 2024-06-11 Xerox Corporation Membrane switches configured to sense pressure applied from compliant and rigid objects

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4422125A (en) * 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
DE3404262A1 (de) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Kapazitiver messfuehler
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.

Also Published As

Publication number Publication date
EP0409827A1 (de) 1991-01-30
SE8700556L (sv) 1988-08-13
US4935841A (en) 1990-06-19
DE3883995T2 (de) 1994-03-24
JPH02502218A (ja) 1990-07-19
SE8700556D0 (sv) 1987-02-12
WO1988006281A1 (en) 1988-08-25
JP2559266B2 (ja) 1996-12-04
EP0409827B1 (de) 1993-09-08
DE3883995D1 (de) 1993-10-14

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