SE453335B - Komposition for negativ fotoresist innehallande kemiska grupper som kan sjelv- eller samkondensera under sur katalys samt anvendning av kompositionen - Google Patents
Komposition for negativ fotoresist innehallande kemiska grupper som kan sjelv- eller samkondensera under sur katalys samt anvendning av kompositionenInfo
- Publication number
- SE453335B SE453335B SE8602224A SE8602224A SE453335B SE 453335 B SE453335 B SE 453335B SE 8602224 A SE8602224 A SE 8602224A SE 8602224 A SE8602224 A SE 8602224A SE 453335 B SE453335 B SE 453335B
- Authority
- SE
- Sweden
- Prior art keywords
- composition
- chemical groups
- negative photoresist
- self
- acid catalysis
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Materials For Photolithography (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Cosmetics (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Polymerisation Methods In General (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8602224A SE453335B (sv) | 1986-05-15 | 1986-05-15 | Komposition for negativ fotoresist innehallande kemiska grupper som kan sjelv- eller samkondensera under sur katalys samt anvendning av kompositionen |
AT87850150T ATE52349T1 (de) | 1986-05-15 | 1987-05-07 | Zusammensetzung fuer negative photoresiste und verwendung dieser zusammensetzung. |
EP87850150A EP0250377B1 (en) | 1986-05-15 | 1987-05-07 | Composition for negative photoresists and use of the composition |
DE8787850150T DE3762466D1 (de) | 1986-05-15 | 1987-05-07 | Zusammensetzung fuer negative photoresiste und verwendung dieser zusammensetzung. |
NO872008A NO872008L (no) | 1986-05-15 | 1987-05-14 | Negativt fotoresist-materiale. |
FI872137A FI872137A (fi) | 1986-05-15 | 1987-05-14 | Hoegkaenslig negativ fotoresist. |
DK248487A DK248487A (da) | 1986-05-15 | 1987-05-14 | Hoejfoelsom negativ fotoresist |
JP62118737A JPS62295047A (ja) | 1986-05-15 | 1987-05-15 | ネガ型ホトレジスト用組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8602224A SE453335B (sv) | 1986-05-15 | 1986-05-15 | Komposition for negativ fotoresist innehallande kemiska grupper som kan sjelv- eller samkondensera under sur katalys samt anvendning av kompositionen |
Publications (3)
Publication Number | Publication Date |
---|---|
SE8602224D0 SE8602224D0 (sv) | 1986-05-15 |
SE8602224L SE8602224L (sv) | 1987-11-16 |
SE453335B true SE453335B (sv) | 1988-01-25 |
Family
ID=20364543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8602224A SE453335B (sv) | 1986-05-15 | 1986-05-15 | Komposition for negativ fotoresist innehallande kemiska grupper som kan sjelv- eller samkondensera under sur katalys samt anvendning av kompositionen |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP0250377B1 (xx) |
JP (1) | JPS62295047A (xx) |
AT (1) | ATE52349T1 (xx) |
DE (1) | DE3762466D1 (xx) |
DK (1) | DK248487A (xx) |
FI (1) | FI872137A (xx) |
NO (1) | NO872008L (xx) |
SE (1) | SE453335B (xx) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1597748A1 (de) * | 1967-10-27 | 1970-08-27 | Basf Ag | Verfahren zum Herstellen von Reliefformen fuer Druckzwecke |
JPS492286B1 (xx) * | 1970-02-19 | 1974-01-19 | ||
DE2064079C2 (de) * | 1970-12-28 | 1982-09-09 | Hoechst Ag, 6000 Frankfurt | Photopolymerisierbares Gemisch |
DE2361041C3 (de) * | 1973-12-07 | 1980-08-14 | Hoechst Ag, 6000 Frankfurt | Photopolymerisierbares Gemisch |
JPS50134420A (xx) * | 1974-04-10 | 1975-10-24 | ||
US4540649A (en) * | 1984-09-12 | 1985-09-10 | Napp Systems (Usa) Inc. | Water developable photopolymerizable composition and printing plate element containing same |
-
1986
- 1986-05-15 SE SE8602224A patent/SE453335B/xx not_active IP Right Cessation
-
1987
- 1987-05-07 AT AT87850150T patent/ATE52349T1/de not_active IP Right Cessation
- 1987-05-07 DE DE8787850150T patent/DE3762466D1/de not_active Expired - Fee Related
- 1987-05-07 EP EP87850150A patent/EP0250377B1/en not_active Expired - Lifetime
- 1987-05-14 FI FI872137A patent/FI872137A/fi not_active IP Right Cessation
- 1987-05-14 DK DK248487A patent/DK248487A/da not_active Application Discontinuation
- 1987-05-14 NO NO872008A patent/NO872008L/no unknown
- 1987-05-15 JP JP62118737A patent/JPS62295047A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE3762466D1 (de) | 1990-05-31 |
SE8602224L (sv) | 1987-11-16 |
NO872008D0 (no) | 1987-05-14 |
SE8602224D0 (sv) | 1986-05-15 |
ATE52349T1 (de) | 1990-05-15 |
EP0250377B1 (en) | 1990-04-25 |
FI872137A (fi) | 1987-11-16 |
NO872008L (no) | 1987-11-16 |
DK248487D0 (da) | 1987-05-14 |
FI872137A0 (fi) | 1987-05-14 |
JPS62295047A (ja) | 1987-12-22 |
DK248487A (da) | 1987-11-16 |
EP0250377A1 (en) | 1987-12-23 |
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Legal Events
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NUG | Patent has lapsed |
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