SE407629B - METHOD AND DEVICE FOR DETERMINING BERAR CONCENTRATION AS A FUNCTION OF DEPTH IN A SEMICONDUCTOR MATERIAL - Google Patents

METHOD AND DEVICE FOR DETERMINING BERAR CONCENTRATION AS A FUNCTION OF DEPTH IN A SEMICONDUCTOR MATERIAL

Info

Publication number
SE407629B
SE407629B SE7505618A SE7505618A SE407629B SE 407629 B SE407629 B SE 407629B SE 7505618 A SE7505618 A SE 7505618A SE 7505618 A SE7505618 A SE 7505618A SE 407629 B SE407629 B SE 407629B
Authority
SE
Sweden
Prior art keywords
berar
depth
concentration
determining
function
Prior art date
Application number
SE7505618A
Other languages
Swedish (sv)
Other versions
SE7505618L (en
Inventor
M M Faktor
E G Bremner
T Ambridge
Original Assignee
Post Office
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Post Office filed Critical Post Office
Publication of SE7505618L publication Critical patent/SE7505618L/en
Publication of SE407629B publication Critical patent/SE407629B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
SE7505618A 1974-05-16 1975-05-15 METHOD AND DEVICE FOR DETERMINING BERAR CONCENTRATION AS A FUNCTION OF DEPTH IN A SEMICONDUCTOR MATERIAL SE407629B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2190274A GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials
GB2190374 1974-05-16

Publications (2)

Publication Number Publication Date
SE7505618L SE7505618L (en) 1975-11-17
SE407629B true SE407629B (en) 1979-04-02

Family

ID=26255598

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7505618A SE407629B (en) 1974-05-16 1975-05-15 METHOD AND DEVICE FOR DETERMINING BERAR CONCENTRATION AS A FUNCTION OF DEPTH IN A SEMICONDUCTOR MATERIAL

Country Status (5)

Country Link
JP (1) JPS5127062A (en)
DE (1) DE2521909A1 (en)
FR (1) FR2271569B1 (en)
GB (1) GB1482929A (en)
SE (1) SE407629B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531686A (en) * 1991-07-24 1993-02-09 Nissan Motor Co Ltd Unit type robot
CN107102038B (en) * 2017-06-12 2023-04-11 重庆交通大学 Cable corrosion damage detection system and method based on equivalent series capacitance measurement
CN113030188A (en) * 2021-03-08 2021-06-25 内蒙古工业大学 Method for detecting carrier concentration of semiconductor material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH543098A (en) * 1972-03-30 1973-10-15 Bbc Brown Boveri & Cie Method and device for the investigation of doped semiconductor material

Also Published As

Publication number Publication date
SE7505618L (en) 1975-11-17
DE2521909C2 (en) 1987-06-19
FR2271569B1 (en) 1981-04-10
FR2271569A1 (en) 1975-12-12
GB1482929A (en) 1977-08-17
JPS5342662B2 (en) 1978-11-14
DE2521909A1 (en) 1975-12-04
JPS5127062A (en) 1976-03-06

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