CH543098A - Method and device for the investigation of doped semiconductor material - Google Patents
Method and device for the investigation of doped semiconductor materialInfo
- Publication number
- CH543098A CH543098A CH477972A CH477972A CH543098A CH 543098 A CH543098 A CH 543098A CH 477972 A CH477972 A CH 477972A CH 477972 A CH477972 A CH 477972A CH 543098 A CH543098 A CH 543098A
- Authority
- CH
- Switzerland
- Prior art keywords
- investigation
- semiconductor material
- doped semiconductor
- doped
- semiconductor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Weting (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH477972A CH543098A (en) | 1972-03-30 | 1972-03-30 | Method and device for the investigation of doped semiconductor material |
DE2220339A DE2220339A1 (en) | 1972-03-30 | 1972-04-26 | METHOD AND DEVICE FOR THE EXAMINATION OF DOPED SEMICONDUCTOR MATERIAL |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH477972A CH543098A (en) | 1972-03-30 | 1972-03-30 | Method and device for the investigation of doped semiconductor material |
Publications (1)
Publication Number | Publication Date |
---|---|
CH543098A true CH543098A (en) | 1973-10-15 |
Family
ID=4282392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH477972A CH543098A (en) | 1972-03-30 | 1972-03-30 | Method and device for the investigation of doped semiconductor material |
Country Status (2)
Country | Link |
---|---|
CH (1) | CH543098A (en) |
DE (1) | DE2220339A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2532760A1 (en) * | 1982-09-08 | 1984-03-09 | Comp Generale Electricite | METHOD AND DEVICE FOR OBTAINING PHYSICAL CHARACTERISTICS OF A SEMICONDUCTOR MATERIAL |
DE4305297A1 (en) * | 1993-02-20 | 1994-08-25 | Telefunken Microelectron | Texturing pickle for semiconductors, and use thereof |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1482929A (en) * | 1974-05-16 | 1977-08-17 | Post Office | Apparatus and method for measuring carrier concentration in semiconductor materials |
DE3103611A1 (en) * | 1981-02-03 | 1982-09-09 | Siemens AG, 1000 Berlin und 8000 München | Method and device for determining the depth profile of the charge carrier concentration in semiconductor crystals by means of differential capacity/voltage measurements by electrochemical means |
-
1972
- 1972-03-30 CH CH477972A patent/CH543098A/en not_active IP Right Cessation
- 1972-04-26 DE DE2220339A patent/DE2220339A1/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2532760A1 (en) * | 1982-09-08 | 1984-03-09 | Comp Generale Electricite | METHOD AND DEVICE FOR OBTAINING PHYSICAL CHARACTERISTICS OF A SEMICONDUCTOR MATERIAL |
EP0103806A1 (en) * | 1982-09-08 | 1984-03-28 | COMPAGNIE GENERALE D'ELECTRICITE Société anonyme dite: | Method and apparatus for studying the physical characteristics of a semi-conducting plate |
DE4305297A1 (en) * | 1993-02-20 | 1994-08-25 | Telefunken Microelectron | Texturing pickle for semiconductors, and use thereof |
DE4305297C2 (en) * | 1993-02-20 | 1998-09-24 | Telefunken Microelectron | Structural stains for semiconductors and their application |
Also Published As
Publication number | Publication date |
---|---|
DE2220339A1 (en) | 1973-10-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |