CH543098A - Method and device for the investigation of doped semiconductor material - Google Patents

Method and device for the investigation of doped semiconductor material

Info

Publication number
CH543098A
CH543098A CH477972A CH477972A CH543098A CH 543098 A CH543098 A CH 543098A CH 477972 A CH477972 A CH 477972A CH 477972 A CH477972 A CH 477972A CH 543098 A CH543098 A CH 543098A
Authority
CH
Switzerland
Prior art keywords
investigation
semiconductor material
doped semiconductor
doped
semiconductor
Prior art date
Application number
CH477972A
Other languages
German (de)
Inventor
Roland Dr Sittig
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Priority to CH477972A priority Critical patent/CH543098A/en
Priority to DE2220339A priority patent/DE2220339A1/en
Publication of CH543098A publication Critical patent/CH543098A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Weting (AREA)
CH477972A 1972-03-30 1972-03-30 Method and device for the investigation of doped semiconductor material CH543098A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH477972A CH543098A (en) 1972-03-30 1972-03-30 Method and device for the investigation of doped semiconductor material
DE2220339A DE2220339A1 (en) 1972-03-30 1972-04-26 METHOD AND DEVICE FOR THE EXAMINATION OF DOPED SEMICONDUCTOR MATERIAL

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH477972A CH543098A (en) 1972-03-30 1972-03-30 Method and device for the investigation of doped semiconductor material

Publications (1)

Publication Number Publication Date
CH543098A true CH543098A (en) 1973-10-15

Family

ID=4282392

Family Applications (1)

Application Number Title Priority Date Filing Date
CH477972A CH543098A (en) 1972-03-30 1972-03-30 Method and device for the investigation of doped semiconductor material

Country Status (2)

Country Link
CH (1) CH543098A (en)
DE (1) DE2220339A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532760A1 (en) * 1982-09-08 1984-03-09 Comp Generale Electricite METHOD AND DEVICE FOR OBTAINING PHYSICAL CHARACTERISTICS OF A SEMICONDUCTOR MATERIAL
DE4305297A1 (en) * 1993-02-20 1994-08-25 Telefunken Microelectron Texturing pickle for semiconductors, and use thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1482929A (en) * 1974-05-16 1977-08-17 Post Office Apparatus and method for measuring carrier concentration in semiconductor materials
DE3103611A1 (en) * 1981-02-03 1982-09-09 Siemens AG, 1000 Berlin und 8000 München Method and device for determining the depth profile of the charge carrier concentration in semiconductor crystals by means of differential capacity/voltage measurements by electrochemical means

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532760A1 (en) * 1982-09-08 1984-03-09 Comp Generale Electricite METHOD AND DEVICE FOR OBTAINING PHYSICAL CHARACTERISTICS OF A SEMICONDUCTOR MATERIAL
EP0103806A1 (en) * 1982-09-08 1984-03-28 COMPAGNIE GENERALE D'ELECTRICITE Société anonyme dite: Method and apparatus for studying the physical characteristics of a semi-conducting plate
DE4305297A1 (en) * 1993-02-20 1994-08-25 Telefunken Microelectron Texturing pickle for semiconductors, and use thereof
DE4305297C2 (en) * 1993-02-20 1998-09-24 Telefunken Microelectron Structural stains for semiconductors and their application

Also Published As

Publication number Publication date
DE2220339A1 (en) 1973-10-31

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Legal Events

Date Code Title Description
PL Patent ceased