SE389762B - Forfarande och anordning for att vid en anleggning med avsokande partikelstrale korrigera stralens avlenkning i avseende pa inverkan fran yttre, periodiska storfelt - Google Patents

Forfarande och anordning for att vid en anleggning med avsokande partikelstrale korrigera stralens avlenkning i avseende pa inverkan fran yttre, periodiska storfelt

Info

Publication number
SE389762B
SE389762B SE7409441A SE7409441A SE389762B SE 389762 B SE389762 B SE 389762B SE 7409441 A SE7409441 A SE 7409441A SE 7409441 A SE7409441 A SE 7409441A SE 389762 B SE389762 B SE 389762B
Authority
SE
Sweden
Prior art keywords
radium
reviewing
particulate
correcting
ray
Prior art date
Application number
SE7409441A
Other languages
English (en)
Swedish (sv)
Other versions
SE7409441L (ja
Inventor
V J Coates
L M Welter
J J Gold
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Publication of SE7409441L publication Critical patent/SE7409441L/xx
Publication of SE389762B publication Critical patent/SE389762B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
SE7409441A 1973-07-24 1974-07-19 Forfarande och anordning for att vid en anleggning med avsokande partikelstrale korrigera stralens avlenkning i avseende pa inverkan fran yttre, periodiska storfelt SE389762B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00382230A US3842272A (en) 1973-07-24 1973-07-24 Scanning charged particle microprobe with external spurious electric field effect correction

Publications (2)

Publication Number Publication Date
SE7409441L SE7409441L (ja) 1975-01-27
SE389762B true SE389762B (sv) 1976-11-15

Family

ID=23508051

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7409441A SE389762B (sv) 1973-07-24 1974-07-19 Forfarande och anordning for att vid en anleggning med avsokande partikelstrale korrigera stralens avlenkning i avseende pa inverkan fran yttre, periodiska storfelt

Country Status (11)

Country Link
US (1) US3842272A (ja)
JP (1) JPS5822854B2 (ja)
CA (1) CA1013483A (ja)
DD (1) DD113661A1 (ja)
DE (1) DE2433999C2 (ja)
FR (1) FR2239013B1 (ja)
GB (1) GB1465518A (ja)
IT (1) IT1016963B (ja)
NL (1) NL178923C (ja)
SE (1) SE389762B (ja)
SU (1) SU572230A3 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243058B2 (ja) * 1974-04-22 1977-10-28
JPH06105601B2 (ja) * 1986-10-08 1994-12-21 株式会社日立製作所 走査電子顕微鏡
US5463268A (en) * 1994-05-23 1995-10-31 National Electrostatics Corp. Magnetically shielded high voltage electron accelerator
US6714892B2 (en) * 2001-03-12 2004-03-30 Agere Systems, Inc. Three dimensional reconstruction metrology
WO2018144690A1 (en) 2017-02-03 2018-08-09 Gatan, Inc. Harmonic line noise correction for electron energy loss spectrometer
RU2678504C1 (ru) * 2018-01-09 2019-01-29 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный университет" Устройство получения электронно-микроскопического изображения и локального элементного анализа радиоактивного образца методом электронной микроскопии в радиационно-защитной камере
TWI870972B (zh) 2022-09-26 2025-01-21 德商卡爾蔡司多重掃描電子顯微鏡有限公司 帶電粒子束裝置的擾動補償
WO2025149160A1 (en) 2024-01-11 2025-07-17 Carl Zeiss Smt Gmbh Disturbance compensation for charged particle beam devices

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE911056C (de) * 1938-02-10 1954-05-10 Siemens Ag Elektronenmikroskop
US3588586A (en) * 1968-04-26 1971-06-28 Jeol Ltd Apparatus for correcting electron beam deflection
US3549883A (en) * 1968-10-07 1970-12-22 Gen Electric Scanning electron microscope wherein an image is formed as a function of specimen current
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
DE2433999A1 (de) 1975-02-13
DD113661A1 (ja) 1975-06-12
IT1016963B (it) 1977-06-20
FR2239013A1 (ja) 1975-02-21
AU7148674A (en) 1976-01-22
US3842272A (en) 1974-10-15
JPS5044769A (ja) 1975-04-22
CA1013483A (en) 1977-07-05
DE2433999C2 (de) 1986-06-19
SE7409441L (ja) 1975-01-27
GB1465518A (en) 1977-02-23
NL7409951A (nl) 1975-01-28
NL178923C (nl) 1988-09-16
FR2239013B1 (ja) 1978-01-27
SU572230A3 (ru) 1977-09-05
NL178923B (nl) 1986-01-02
JPS5822854B2 (ja) 1983-05-11

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