NL7409951A - Aftastmicroscoop. - Google Patents

Aftastmicroscoop.

Info

Publication number
NL7409951A
NL7409951A NL7409951A NL7409951A NL7409951A NL 7409951 A NL7409951 A NL 7409951A NL 7409951 A NL7409951 A NL 7409951A NL 7409951 A NL7409951 A NL 7409951A NL 7409951 A NL7409951 A NL 7409951A
Authority
NL
Netherlands
Prior art keywords
scan microscope
microscope
scan
Prior art date
Application number
NL7409951A
Other languages
English (en)
Other versions
NL178923B (nl
NL178923C (nl
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Publication of NL7409951A publication Critical patent/NL7409951A/nl
Publication of NL178923B publication Critical patent/NL178923B/nl
Application granted granted Critical
Publication of NL178923C publication Critical patent/NL178923C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
NLAANVRAGE7409951,A 1973-07-24 1974-07-23 Microsondestelsel voor het met een afbuigbare bundel van geladen deeltjes aftasten van een voorwerp. NL178923C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00382230A US3842272A (en) 1973-07-24 1973-07-24 Scanning charged particle microprobe with external spurious electric field effect correction

Publications (3)

Publication Number Publication Date
NL7409951A true NL7409951A (nl) 1975-01-28
NL178923B NL178923B (nl) 1986-01-02
NL178923C NL178923C (nl) 1988-09-16

Family

ID=23508051

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7409951,A NL178923C (nl) 1973-07-24 1974-07-23 Microsondestelsel voor het met een afbuigbare bundel van geladen deeltjes aftasten van een voorwerp.

Country Status (11)

Country Link
US (1) US3842272A (nl)
JP (1) JPS5822854B2 (nl)
CA (1) CA1013483A (nl)
DD (1) DD113661A1 (nl)
DE (1) DE2433999C2 (nl)
FR (1) FR2239013B1 (nl)
GB (1) GB1465518A (nl)
IT (1) IT1016963B (nl)
NL (1) NL178923C (nl)
SE (1) SE389762B (nl)
SU (1) SU572230A3 (nl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243058B2 (nl) * 1974-04-22 1977-10-28
JPH06105601B2 (ja) * 1986-10-08 1994-12-21 株式会社日立製作所 走査電子顕微鏡
US5463268A (en) * 1994-05-23 1995-10-31 National Electrostatics Corp. Magnetically shielded high voltage electron accelerator
US6714892B2 (en) * 2001-03-12 2004-03-30 Agere Systems, Inc. Three dimensional reconstruction metrology
US10784094B2 (en) 2017-02-03 2020-09-22 Gatan, Inc. Harmonic line noise correction for electron energy loss spectrometer
RU2678504C1 (ru) * 2018-01-09 2019-01-29 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный университет" Устройство получения электронно-микроскопического изображения и локального элементного анализа радиоактивного образца методом электронной микроскопии в радиационно-защитной камере
TW202414496A (zh) 2022-09-26 2024-04-01 德商卡爾蔡司多重掃描電子顯微鏡有限公司 帶電粒子束裝置的擾動補償

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE911056C (de) * 1938-02-10 1954-05-10 Siemens Ag Elektronenmikroskop
US3588586A (en) * 1968-04-26 1971-06-28 Jeol Ltd Apparatus for correcting electron beam deflection
US3549883A (en) * 1968-10-07 1970-12-22 Gen Electric Scanning electron microscope wherein an image is formed as a function of specimen current
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
FR2239013A1 (nl) 1975-02-21
NL178923B (nl) 1986-01-02
SE389762B (sv) 1976-11-15
DE2433999A1 (de) 1975-02-13
SU572230A3 (ru) 1977-09-05
FR2239013B1 (nl) 1978-01-27
DD113661A1 (nl) 1975-06-12
JPS5044769A (nl) 1975-04-22
AU7148674A (en) 1976-01-22
US3842272A (en) 1974-10-15
SE7409441L (nl) 1975-01-27
NL178923C (nl) 1988-09-16
IT1016963B (it) 1977-06-20
DE2433999C2 (de) 1986-06-19
GB1465518A (en) 1977-02-23
JPS5822854B2 (ja) 1983-05-11
CA1013483A (en) 1977-07-05

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
CNR Transfer of rights (patent application after its laying open for public inspection)

Free format text: WARNER LAMBERT TECHNOLOGIES, INC.

CNR Transfer of rights (patent application after its laying open for public inspection)

Free format text: NANOMETRICS, INC.

A85 Still pending on 85-01-01
R1B Notice of opposition during period of laying open
NP1 Patent granted (not automatically)
V4 Discontinued because of reaching the maximum lifetime of a patent