SE388312B - Sett att astadkomma storemnesdiffusion enligt ett smeltskiktsforfarande - Google Patents

Sett att astadkomma storemnesdiffusion enligt ett smeltskiktsforfarande

Info

Publication number
SE388312B
SE388312B SE7105973A SE597371A SE388312B SE 388312 B SE388312 B SE 388312B SE 7105973 A SE7105973 A SE 7105973A SE 597371 A SE597371 A SE 597371A SE 388312 B SE388312 B SE 388312B
Authority
SE
Sweden
Prior art keywords
way
melt layer
diffusion according
layer procedure
perform big
Prior art date
Application number
SE7105973A
Other languages
English (en)
Swedish (sv)
Inventor
D M Brown
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of SE388312B publication Critical patent/SE388312B/xx

Links

Classifications

    • H10P14/69215—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/6334—
    • H10P14/662—
    • H10P14/6682—
    • H10P32/141—
    • H10P32/171—
    • H10P14/6923—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/043—Dual dielectric
SE7105973A 1970-06-23 1971-05-07 Sett att astadkomma storemnesdiffusion enligt ett smeltskiktsforfarande SE388312B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4907370A 1970-06-23 1970-06-23

Publications (1)

Publication Number Publication Date
SE388312B true SE388312B (sv) 1976-09-27

Family

ID=21957917

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7105973A SE388312B (sv) 1970-06-23 1971-05-07 Sett att astadkomma storemnesdiffusion enligt ett smeltskiktsforfarande

Country Status (7)

Country Link
US (1) US3764411A (enExample)
JP (1) JPS5125311B1 (enExample)
DE (2) DE2130928A1 (enExample)
FR (1) FR2096436B1 (enExample)
GB (1) GB1345231A (enExample)
NL (1) NL7108512A (enExample)
SE (1) SE388312B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130793B (en) * 1982-11-22 1986-09-03 Gen Electric Co Plc Forming a doped region in a semiconductor body
US4851370A (en) * 1987-12-28 1989-07-25 American Telephone And Telegraph Company, At&T Bell Laboratories Fabricating a semiconductor device with low defect density oxide
US5273934A (en) * 1991-06-19 1993-12-28 Siemens Aktiengesellschaft Method for producing a doped region in a substrate
JPH0851103A (ja) * 1994-08-08 1996-02-20 Fuji Electric Co Ltd 薄膜の生成方法
TW304293B (en) * 1996-11-18 1997-05-01 United Microelectronics Corp Manufacturing method for shallow trench isolation
DE102017117306A1 (de) * 2017-07-31 2019-01-31 Infineon Technologies Ag Verfahren zum Herstellen einer Leistungshalbleitervorrichtung mit einer reduzierten Sauerstoffkonzentration

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1400895A (fr) * 1963-08-12 1965-05-28 Siemens Ag Procédé pour fabriquer des composants à semi-conducteurs
US3566517A (en) * 1967-10-13 1971-03-02 Gen Electric Self-registered ig-fet devices and method of making same

Also Published As

Publication number Publication date
NL7108512A (enExample) 1971-12-27
JPS5125311B1 (enExample) 1976-07-30
GB1345231A (en) 1974-01-30
FR2096436A1 (enExample) 1972-02-18
DE7123990U (de) 1972-04-06
FR2096436B1 (enExample) 1977-03-18
US3764411A (en) 1973-10-09
DE2130928A1 (de) 1971-12-30

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