JPS5125311B1 - - Google Patents
Info
- Publication number
- JPS5125311B1 JPS5125311B1 JP46044920A JP4492071A JPS5125311B1 JP S5125311 B1 JPS5125311 B1 JP S5125311B1 JP 46044920 A JP46044920 A JP 46044920A JP 4492071 A JP4492071 A JP 4492071A JP S5125311 B1 JPS5125311 B1 JP S5125311B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H10P14/69215—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
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- H10P14/6334—
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- H10P14/662—
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- H10P14/6682—
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- H10P32/141—
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- H10P32/171—
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- H10P14/6923—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/043—Dual dielectric
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4907370A | 1970-06-23 | 1970-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5125311B1 true JPS5125311B1 (enExample) | 1976-07-30 |
Family
ID=21957917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46044920A Pending JPS5125311B1 (enExample) | 1970-06-23 | 1971-06-23 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3764411A (enExample) |
| JP (1) | JPS5125311B1 (enExample) |
| DE (2) | DE2130928A1 (enExample) |
| FR (1) | FR2096436B1 (enExample) |
| GB (1) | GB1345231A (enExample) |
| NL (1) | NL7108512A (enExample) |
| SE (1) | SE388312B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2130793B (en) * | 1982-11-22 | 1986-09-03 | Gen Electric Co Plc | Forming a doped region in a semiconductor body |
| US4851370A (en) * | 1987-12-28 | 1989-07-25 | American Telephone And Telegraph Company, At&T Bell Laboratories | Fabricating a semiconductor device with low defect density oxide |
| US5273934A (en) * | 1991-06-19 | 1993-12-28 | Siemens Aktiengesellschaft | Method for producing a doped region in a substrate |
| JPH0851103A (ja) * | 1994-08-08 | 1996-02-20 | Fuji Electric Co Ltd | 薄膜の生成方法 |
| TW304293B (en) * | 1996-11-18 | 1997-05-01 | United Microelectronics Corp | Manufacturing method for shallow trench isolation |
| DE102017117306A1 (de) * | 2017-07-31 | 2019-01-31 | Infineon Technologies Ag | Verfahren zum Herstellen einer Leistungshalbleitervorrichtung mit einer reduzierten Sauerstoffkonzentration |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1400895A (fr) * | 1963-08-12 | 1965-05-28 | Siemens Ag | Procédé pour fabriquer des composants à semi-conducteurs |
| US3566517A (en) * | 1967-10-13 | 1971-03-02 | Gen Electric | Self-registered ig-fet devices and method of making same |
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1970
- 1970-06-23 US US00049073A patent/US3764411A/en not_active Expired - Lifetime
-
1971
- 1971-05-07 SE SE7105973A patent/SE388312B/xx unknown
- 1971-06-15 GB GB2795171A patent/GB1345231A/en not_active Expired
- 1971-06-21 NL NL7108512A patent/NL7108512A/xx not_active Application Discontinuation
- 1971-06-22 DE DE19712130928 patent/DE2130928A1/de not_active Withdrawn
- 1971-06-22 FR FR7122713A patent/FR2096436B1/fr not_active Expired
- 1971-06-22 DE DE19717123990U patent/DE7123990U/de not_active Expired
- 1971-06-23 JP JP46044920A patent/JPS5125311B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL7108512A (enExample) | 1971-12-27 |
| GB1345231A (en) | 1974-01-30 |
| FR2096436A1 (enExample) | 1972-02-18 |
| DE7123990U (de) | 1972-04-06 |
| SE388312B (sv) | 1976-09-27 |
| FR2096436B1 (enExample) | 1977-03-18 |
| US3764411A (en) | 1973-10-09 |
| DE2130928A1 (de) | 1971-12-30 |