SE385785B - DEVICE FOR INDIFFUSION OF THE DOPPING SUBSTANCE IN DISCS OF SALMON MATERIALS - Google Patents

DEVICE FOR INDIFFUSION OF THE DOPPING SUBSTANCE IN DISCS OF SALMON MATERIALS

Info

Publication number
SE385785B
SE385785B SE964071A SE964071A SE385785B SE 385785 B SE385785 B SE 385785B SE 964071 A SE964071 A SE 964071A SE 964071 A SE964071 A SE 964071A SE 385785 B SE385785 B SE 385785B
Authority
SE
Sweden
Prior art keywords
dopping
indiffusion
salmon
discs
substance
Prior art date
Application number
SE964071A
Other languages
Swedish (sv)
Inventor
K Reuschel
W Dietze
M Suss
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE385785B publication Critical patent/SE385785B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SE964071A 1970-07-27 1971-07-27 DEVICE FOR INDIFFUSION OF THE DOPPING SUBSTANCE IN DISCS OF SALMON MATERIALS SE385785B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (en) 1970-07-27 1970-07-27 Arrangement for diffusing dopants into slices made of semiconductor material

Publications (1)

Publication Number Publication Date
SE385785B true SE385785B (en) 1976-07-26

Family

ID=5778005

Family Applications (1)

Application Number Title Priority Date Filing Date
SE964071A SE385785B (en) 1970-07-27 1971-07-27 DEVICE FOR INDIFFUSION OF THE DOPPING SUBSTANCE IN DISCS OF SALMON MATERIALS

Country Status (9)

Country Link
JP (1) JPS4915102B1 (en)
BE (1) BE770550A (en)
CA (1) CA932481A (en)
CH (1) CH561082A5 (en)
DE (1) DE2037173A1 (en)
FR (1) FR2103051A5 (en)
GB (1) GB1312226A (en)
NL (1) NL7107778A (en)
SE (1) SE385785B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
JPS57143428A (en) * 1981-02-27 1982-09-04 High Frequency Heattreat Co Ltd Induction heating and hardening method

Also Published As

Publication number Publication date
DE2037173A1 (en) 1972-02-03
CH561082A5 (en) 1975-04-30
JPS4915102B1 (en) 1974-04-12
NL7107778A (en) 1972-01-31
CA932481A (en) 1973-08-21
FR2103051A5 (en) 1972-04-07
BE770550A (en) 1972-01-27
GB1312226A (en) 1973-04-04

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