NL7107778A - - Google Patents
Info
- Publication number
- NL7107778A NL7107778A NL7107778A NL7107778A NL7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A NL 7107778 A NL7107778 A NL 7107778A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702037173 DE2037173A1 (en) | 1970-07-27 | 1970-07-27 | Arrangement for diffusing dopants into slices made of semiconductor material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7107778A true NL7107778A (en) | 1972-01-31 |
Family
ID=5778005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7107778A NL7107778A (en) | 1970-07-27 | 1971-06-07 |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS4915102B1 (en) |
| BE (1) | BE770550A (en) |
| CA (1) | CA932481A (en) |
| CH (1) | CH561082A5 (en) |
| DE (1) | DE2037173A1 (en) |
| FR (1) | FR2103051A5 (en) |
| GB (1) | GB1312226A (en) |
| NL (1) | NL7107778A (en) |
| SE (1) | SE385785B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| JPS57143428A (en) * | 1981-02-27 | 1982-09-04 | High Frequency Heattreat Co Ltd | Induction heating and hardening method |
-
1970
- 1970-07-27 DE DE19702037173 patent/DE2037173A1/en active Pending
- 1970-12-29 JP JP12193270A patent/JPS4915102B1/ja active Pending
-
1971
- 1971-06-07 NL NL7107778A patent/NL7107778A/xx unknown
- 1971-06-15 CH CH867371A patent/CH561082A5/xx not_active IP Right Cessation
- 1971-06-18 GB GB2860671A patent/GB1312226A/en not_active Expired
- 1971-07-19 FR FR7126290A patent/FR2103051A5/fr not_active Expired
- 1971-07-27 CA CA119193A patent/CA932481A/en not_active Expired
- 1971-07-27 SE SE964071A patent/SE385785B/en unknown
- 1971-07-27 BE BE770550A patent/BE770550A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA932481A (en) | 1973-08-21 |
| GB1312226A (en) | 1973-04-04 |
| FR2103051A5 (en) | 1972-04-07 |
| SE385785B (en) | 1976-07-26 |
| CH561082A5 (en) | 1975-04-30 |
| JPS4915102B1 (en) | 1974-04-12 |
| BE770550A (en) | 1972-01-27 |
| DE2037173A1 (en) | 1972-02-03 |