SE377055B - - Google Patents

Info

Publication number
SE377055B
SE377055B SE7109780A SE978071A SE377055B SE 377055 B SE377055 B SE 377055B SE 7109780 A SE7109780 A SE 7109780A SE 978071 A SE978071 A SE 978071A SE 377055 B SE377055 B SE 377055B
Authority
SE
Sweden
Application number
SE7109780A
Inventor
J Grandia
R M Potemski
J M Woodall
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE377055B publication Critical patent/SE377055B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/06Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/064Rotating sliding boat system
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/06Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/062Vertical dipping system
    • H10P14/263
    • H10P14/265
    • H10P14/2911
    • H10P14/3421

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SE7109780A 1970-08-17 1971-07-30 SE377055B (show.php)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6452370A 1970-08-17 1970-08-17

Publications (1)

Publication Number Publication Date
SE377055B true SE377055B (show.php) 1975-06-23

Family

ID=22056562

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7109780A SE377055B (show.php) 1970-08-17 1971-07-30

Country Status (9)

Country Link
JP (1) JPS5134391B1 (show.php)
AU (1) AU459061B2 (show.php)
BE (1) BE771417A (show.php)
CA (1) CA955507A (show.php)
CH (1) CH548791A (show.php)
FR (1) FR2104258A5 (show.php)
GB (1) GB1300187A (show.php)
NL (1) NL175535C (show.php)
SE (1) SE377055B (show.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61126501U (show.php) * 1985-01-26 1986-08-08
JP3139329B2 (ja) * 1995-07-14 2001-02-26 株式会社村田製作所 液相エピタキシャル成長装置

Also Published As

Publication number Publication date
NL175535C (nl) 1984-11-16
JPS5134391B1 (show.php) 1976-09-25
DE2140582A1 (de) 1972-02-24
CH548791A (de) 1974-05-15
AU3240971A (en) 1973-02-22
AU459061B2 (en) 1975-03-13
BE771417A (fr) 1971-12-31
NL7111290A (show.php) 1972-02-21
DE2140582B2 (de) 1975-06-19
FR2104258A5 (show.php) 1972-04-14
CA955507A (en) 1974-10-01
NL175535B (nl) 1984-06-18
GB1300187A (en) 1972-12-20

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