SE353944B - - Google Patents
Info
- Publication number
- SE353944B SE353944B SE10250/69A SE1025069A SE353944B SE 353944 B SE353944 B SE 353944B SE 10250/69 A SE10250/69 A SE 10250/69A SE 1025069 A SE1025069 A SE 1025069A SE 353944 B SE353944 B SE 353944B
- Authority
- SE
- Sweden
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR161161 | 1968-07-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
SE353944B true SE353944B (ko) | 1973-02-19 |
Family
ID=8653206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE10250/69A SE353944B (ko) | 1968-07-30 | 1969-07-21 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3579997A (ko) |
BE (1) | BE736646A (ko) |
CH (1) | CH512675A (ko) |
DE (1) | DE1937821A1 (ko) |
FR (1) | FR1584067A (ko) |
GB (1) | GB1216448A (ko) |
LU (1) | LU59124A1 (ko) |
NL (1) | NL161573C (ko) |
SE (1) | SE353944B (ko) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4148196A (en) * | 1977-04-25 | 1979-04-10 | Sciex Inc. | Multiple stage cryogenic pump and method of pumping |
DE2830943C2 (de) * | 1978-07-14 | 1986-06-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpenanordnung |
US4336690A (en) * | 1979-09-28 | 1982-06-29 | Varian Associates, Inc. | Cryogenic pump with radiation shield |
US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
JPS58160552A (ja) * | 1982-03-18 | 1983-09-24 | Toyota Motor Corp | 内燃機関の点火時期制御方法 |
JPS60161702A (ja) * | 1984-01-27 | 1985-08-23 | Seiko Instr & Electronics Ltd | 真空用冷却トラツプ |
US4559787A (en) * | 1984-12-04 | 1985-12-24 | The United States Of America As Represented By The United States Department Of Energy | Vacuum pump apparatus |
DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
WO1992008894A1 (de) * | 1990-11-19 | 1992-05-29 | Leybold Aktiengesellschaft | Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe |
JP3123126B2 (ja) * | 1991-07-15 | 2001-01-09 | 株式会社日立製作所 | 冷却機付き真空容器 |
DE9111236U1 (de) * | 1991-09-10 | 1992-07-09 | Leybold AG, 6450 Hanau | Kryopumpe |
US5228299A (en) * | 1992-04-16 | 1993-07-20 | Helix Technology Corporation | Cryopump water drain |
US5261244A (en) * | 1992-05-21 | 1993-11-16 | Helix Technology Corporation | Cryogenic waterpump |
DE4336035A1 (de) * | 1993-10-22 | 1995-04-27 | Leybold Ag | Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe |
US5901558A (en) * | 1997-08-20 | 1999-05-11 | Helix Technology Corporation | Water pump with integral gate valve |
US6155059A (en) * | 1999-01-13 | 2000-12-05 | Helix Technology Corporation | High capacity cryopump |
DE102005039795B4 (de) * | 2005-08-22 | 2007-07-26 | Bruker Biospin Ag | Kühlvorrichtung zur Erzeugung eines kalten Gasstromes |
JP5748682B2 (ja) * | 2012-01-31 | 2015-07-15 | 住友重機械工業株式会社 | コールドトラップおよびコールドトラップの制御方法 |
JP6871751B2 (ja) * | 2017-02-07 | 2021-05-12 | 住友重機械工業株式会社 | クライオポンプ |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2703673A (en) * | 1950-04-08 | 1955-03-08 | Alois Vogt | Vacuum pump |
US2934257A (en) * | 1956-01-25 | 1960-04-26 | Edwards High Vacuum Ltd | Vapour vacuum pumps |
US3081068A (en) * | 1959-10-16 | 1963-03-12 | Milleron Norman | Cold trap |
US3296810A (en) * | 1964-08-24 | 1967-01-10 | Nat Res Corp | High conductance cold trap for vacuum systems |
US3321927A (en) * | 1965-02-12 | 1967-05-30 | Jr Charles B Hood | Spiral liquid cooled baffle for shielding diffusion pumps |
US3364654A (en) * | 1965-09-27 | 1968-01-23 | Union Carbide Corp | Ultrahigh vacuum pumping process and apparatus |
-
1968
- 1968-07-30 FR FR161161A patent/FR1584067A/fr not_active Expired
-
1969
- 1969-07-10 US US840734A patent/US3579997A/en not_active Expired - Lifetime
- 1969-07-17 LU LU59124D patent/LU59124A1/xx unknown
- 1969-07-21 SE SE10250/69A patent/SE353944B/xx unknown
- 1969-07-25 NL NL6911437.A patent/NL161573C/xx active
- 1969-07-25 DE DE19691937821 patent/DE1937821A1/de active Pending
- 1969-07-25 CH CH1144369A patent/CH512675A/fr not_active IP Right Cessation
- 1969-07-28 BE BE736646D patent/BE736646A/xx unknown
- 1969-07-29 GB GB38096/69A patent/GB1216448A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CH512675A (fr) | 1971-09-15 |
NL161573B (nl) | 1979-09-17 |
GB1216448A (en) | 1970-12-23 |
LU59124A1 (ko) | 1969-11-25 |
NL161573C (nl) | 1980-02-15 |
BE736646A (ko) | 1970-01-28 |
NL6911437A (ko) | 1970-02-03 |
US3579997A (en) | 1971-05-25 |
DE1937821A1 (de) | 1970-02-12 |
FR1584067A (ko) | 1969-12-12 |