GB1216448A - Improvements in or relating to cryopumps - Google Patents

Improvements in or relating to cryopumps

Info

Publication number
GB1216448A
GB1216448A GB38096/69A GB3809669A GB1216448A GB 1216448 A GB1216448 A GB 1216448A GB 38096/69 A GB38096/69 A GB 38096/69A GB 3809669 A GB3809669 A GB 3809669A GB 1216448 A GB1216448 A GB 1216448A
Authority
GB
United Kingdom
Prior art keywords
cryopump
baffles
july
valve
cooling coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB38096/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of GB1216448A publication Critical patent/GB1216448A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

1,216,448. Vacuum pumps. L'AIR LIQUIDE SOC. ANON. POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGE CLAUDE. July 29, 1969 [July 30, 1968], No.38096/69. Heading F1N. A cryopump comprises a sealed casing lined with thermal insulation 21, an inlet closable by a valve 13 and connectible to a chamber to be exhausted, a stack of spaced apart frustro-conical baffles 26 aligned with the axis of the valve 13, and cooled gas condensation surfaces 22 surrounding the baffles 26. The baffles and an inner lining 29 are contacted by a cooling coil 32, 30a, 28a...31, 28e through which flows gaseous helium at 80‹K. The gas condensation surfaces 22 are composed of a plurality of square plates spaced along the length of a cooling coil 23 through which flows gaseous helium at 23‹K. An installation, Fig.1 (not shown) comprising two identical cryopumps is described, the cryopump being connected in parallel to enable one to be regenerated while the other operates. During regeneration conduit 52 supplies dry gas to the cryopump and the liquefied deposit flows out through this conduit 52.
GB38096/69A 1968-07-30 1969-07-29 Improvements in or relating to cryopumps Expired GB1216448A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR161161 1968-07-30

Publications (1)

Publication Number Publication Date
GB1216448A true GB1216448A (en) 1970-12-23

Family

ID=8653206

Family Applications (1)

Application Number Title Priority Date Filing Date
GB38096/69A Expired GB1216448A (en) 1968-07-30 1969-07-29 Improvements in or relating to cryopumps

Country Status (9)

Country Link
US (1) US3579997A (en)
BE (1) BE736646A (en)
CH (1) CH512675A (en)
DE (1) DE1937821A1 (en)
FR (1) FR1584067A (en)
GB (1) GB1216448A (en)
LU (1) LU59124A1 (en)
NL (1) NL161573C (en)
SE (1) SE353944B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153439A (en) * 1984-01-27 1985-08-21 Seiko Instr & Electronics Vacuum cooling trap

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2830943C2 (en) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump assembly
US4336690A (en) * 1979-09-28 1982-06-29 Varian Associates, Inc. Cryogenic pump with radiation shield
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
JPS58160552A (en) * 1982-03-18 1983-09-24 Toyota Motor Corp Ignition timing control method for an internal combustion engine
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
JP2574586B2 (en) * 1990-11-19 1997-01-22 ライボルト アクチエンゲゼルシヤフト Method for regenerating a cryopump and a cryopump suitable for performing the method
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
DE9111236U1 (en) * 1991-09-10 1992-07-09 Leybold AG, 6450 Hanau Cryo pump
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
DE4336035A1 (en) * 1993-10-22 1995-04-27 Leybold Ag Process for operating a cryopump and vacuum pump system with cryopump and backing pump
US5901558A (en) * 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
DE102005039795B4 (en) * 2005-08-22 2007-07-26 Bruker Biospin Ag Cooling device for generating a cold gas stream
JP5748682B2 (en) * 2012-01-31 2015-07-15 住友重機械工業株式会社 Cold trap and cold trap control method
JP6871751B2 (en) * 2017-02-07 2021-05-12 住友重機械工業株式会社 Cryopump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703673A (en) * 1950-04-08 1955-03-08 Alois Vogt Vacuum pump
US2934257A (en) * 1956-01-25 1960-04-26 Edwards High Vacuum Ltd Vapour vacuum pumps
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3296810A (en) * 1964-08-24 1967-01-10 Nat Res Corp High conductance cold trap for vacuum systems
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153439A (en) * 1984-01-27 1985-08-21 Seiko Instr & Electronics Vacuum cooling trap

Also Published As

Publication number Publication date
BE736646A (en) 1970-01-28
CH512675A (en) 1971-09-15
US3579997A (en) 1971-05-25
FR1584067A (en) 1969-12-12
SE353944B (en) 1973-02-19
LU59124A1 (en) 1969-11-25
NL161573B (en) 1979-09-17
NL161573C (en) 1980-02-15
NL6911437A (en) 1970-02-03
DE1937821A1 (en) 1970-02-12

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