SE314966B - - Google Patents

Info

Publication number
SE314966B
SE314966B SE11981/65A SE1198165A SE314966B SE 314966 B SE314966 B SE 314966B SE 11981/65 A SE11981/65 A SE 11981/65A SE 1198165 A SE1198165 A SE 1198165A SE 314966 B SE314966 B SE 314966B
Authority
SE
Sweden
Application number
SE11981/65A
Inventor
E Folkmann
E Pammer
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE314966B publication Critical patent/SE314966B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02—Inorganic compounds ; Elemental compounds
    • C11D3/04—Water-soluble compounds
    • C11D3/06—Phosphates, including polyphosphates
    • C11D3/062—Special methods concerning phosphates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/16—Oxyacids of phosphorus; Salts thereof
    • C01B25/26—Phosphates
    • C01B25/38—Condensed phosphates
    • C01B25/44—Metaphosphates
    • C01B25/445—Metaphosphates of alkali metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
SE11981/65A 1964-09-14 1965-09-14 SE314966B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0093142 1964-09-14

Publications (1)

Publication Number Publication Date
SE314966B true SE314966B (xx) 1969-09-22

Family

ID=7517758

Family Applications (1)

Application Number Title Priority Date Filing Date
SE11981/65A SE314966B (xx) 1964-09-14 1965-09-14

Country Status (6)

Country Link
US (1) US3365336A (xx)
CH (1) CH424731A (xx)
DE (1) DE1544253C3 (xx)
GB (1) GB1115508A (xx)
NL (1) NL6509273A (xx)
SE (1) SE314966B (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
US3717439A (en) * 1970-11-18 1973-02-20 Tokyo Shibaura Electric Co Vapour phase reaction apparatus
US3710757A (en) * 1970-12-09 1973-01-16 Texas Instruments Inc Continuous deposition system
US4522149A (en) * 1983-11-21 1985-06-11 General Instrument Corp. Reactor and susceptor for chemical vapor deposition process
US4694779A (en) * 1984-10-19 1987-09-22 Tetron, Inc. Reactor apparatus for semiconductor wafer processing
US4596208A (en) * 1984-11-05 1986-06-24 Spire Corporation CVD reaction chamber
FR2573325B1 (fr) * 1984-11-16 1993-08-20 Sony Corp Appareil et procede pour faire des depots de vapeur sur des plaquettes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL273009A (xx) * 1960-12-29
DE1137807B (de) * 1961-06-09 1962-10-11 Siemens Ag Verfahren zur Herstellung von Halbleiteranordnungen durch einkristalline Abscheidung von Halbleitermaterial aus der Gasphase
NL281754A (xx) * 1961-08-04
US3296040A (en) * 1962-08-17 1967-01-03 Fairchild Camera Instr Co Epitaxially growing layers of semiconductor through openings in oxide mask

Also Published As

Publication number Publication date
DE1544253B2 (de) 1974-01-17
DE1544253C3 (de) 1974-08-15
CH424731A (de) 1966-11-30
DE1544253A1 (de) 1970-03-26
GB1115508A (en) 1968-05-29
US3365336A (en) 1968-01-23
NL6509273A (xx) 1966-03-15

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