NL6509273A - - Google Patents

Info

Publication number
NL6509273A
NL6509273A NL6509273A NL6509273A NL6509273A NL 6509273 A NL6509273 A NL 6509273A NL 6509273 A NL6509273 A NL 6509273A NL 6509273 A NL6509273 A NL 6509273A NL 6509273 A NL6509273 A NL 6509273A
Authority
NL
Netherlands
Application number
NL6509273A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6509273A publication Critical patent/NL6509273A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02Inorganic compounds ; Elemental compounds
    • C11D3/04Water-soluble compounds
    • C11D3/06Phosphates, including polyphosphates
    • C11D3/062Special methods concerning phosphates
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00Phosphorus; Compounds thereof
    • C01B25/16Oxyacids of phosphorus; Salts thereof
    • C01B25/26Phosphates
    • C01B25/38Condensed phosphates
    • C01B25/44Metaphosphates
    • C01B25/445Metaphosphates of alkali metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
NL6509273A 1964-09-14 1965-07-16 NL6509273A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0093142 1964-09-14

Publications (1)

Publication Number Publication Date
NL6509273A true NL6509273A (xx) 1966-03-15

Family

ID=7517758

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6509273A NL6509273A (xx) 1964-09-14 1965-07-16

Country Status (6)

Country Link
US (1) US3365336A (xx)
CH (1) CH424731A (xx)
DE (1) DE1544253C3 (xx)
GB (1) GB1115508A (xx)
NL (1) NL6509273A (xx)
SE (1) SE314966B (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
US3717439A (en) * 1970-11-18 1973-02-20 Tokyo Shibaura Electric Co Vapour phase reaction apparatus
US3710757A (en) * 1970-12-09 1973-01-16 Texas Instruments Inc Continuous deposition system
US4522149A (en) * 1983-11-21 1985-06-11 General Instrument Corp. Reactor and susceptor for chemical vapor deposition process
US4694779A (en) * 1984-10-19 1987-09-22 Tetron, Inc. Reactor apparatus for semiconductor wafer processing
US4596208A (en) * 1984-11-05 1986-06-24 Spire Corporation CVD reaction chamber
FR2573325B1 (fr) * 1984-11-16 1993-08-20 Sony Corp Appareil et procede pour faire des depots de vapeur sur des plaquettes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL273009A (xx) * 1960-12-29
DE1137807B (de) * 1961-06-09 1962-10-11 Siemens Ag Verfahren zur Herstellung von Halbleiteranordnungen durch einkristalline Abscheidung von Halbleitermaterial aus der Gasphase
NL281754A (xx) * 1961-08-04
US3296040A (en) * 1962-08-17 1967-01-03 Fairchild Camera Instr Co Epitaxially growing layers of semiconductor through openings in oxide mask

Also Published As

Publication number Publication date
DE1544253B2 (de) 1974-01-17
DE1544253C3 (de) 1974-08-15
CH424731A (de) 1966-11-30
DE1544253A1 (de) 1970-03-26
SE314966B (xx) 1969-09-22
GB1115508A (en) 1968-05-29
US3365336A (en) 1968-01-23

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