SE311766B - - Google Patents

Info

Publication number
SE311766B
SE311766B SE335866A SE335866A SE311766B SE 311766 B SE311766 B SE 311766B SE 335866 A SE335866 A SE 335866A SE 335866 A SE335866 A SE 335866A SE 311766 B SE311766 B SE 311766B
Authority
SE
Sweden
Application number
SE335866A
Inventor
P Kruythoff
Original Assignee
Optische Ind De Oude Delft Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optische Ind De Oude Delft Nv filed Critical Optische Ind De Oude Delft Nv
Publication of SE311766B publication Critical patent/SE311766B/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
SE335866A 1965-03-15 1966-03-14 SE311766B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6503242A NL6503242A (ja) 1965-03-15 1965-03-15

Publications (1)

Publication Number Publication Date
SE311766B true SE311766B (ja) 1969-06-23

Family

ID=19792657

Family Applications (1)

Application Number Title Priority Date Filing Date
SE335866A SE311766B (ja) 1965-03-15 1966-03-14

Country Status (5)

Country Link
CH (1) CH436765A (ja)
DE (1) DE1275304B (ja)
GB (1) GB1095078A (ja)
NL (1) NL6503242A (ja)
SE (1) SE311766B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2148017B (en) * 1981-05-15 1986-04-09 Gen Signal Corp Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4391494A (en) * 1981-05-15 1983-07-05 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
US5298939A (en) * 1991-11-04 1994-03-29 Swanson Paul A Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
US5883703A (en) * 1996-02-08 1999-03-16 Megapanel Corporation Methods and apparatus for detecting and compensating for focus errors in a photolithography tool
FI20095065A0 (fi) * 2009-01-26 2009-01-26 Wallac Oy Yhdistetty linssi ja heijastin sekä sitä käyttävä optinen laite

Also Published As

Publication number Publication date
CH436765A (de) 1967-05-31
NL6503242A (ja) 1966-09-16
DE1275304B (de) 1968-08-14
GB1095078A (en) 1967-12-13

Similar Documents

Publication Publication Date Title
FI44380B (ja)
JPS4517200Y1 (ja)
JPS438426Y1 (ja)
JPS4331203Y1 (ja)
JPS431076Y1 (ja)
JPS4711015Y1 (ja)
BE675187A (ja)
BE674975A (ja)
NL6503242A (ja)
BE675179A (ja)
NL6614910A (ja)
NL6604464A (ja)
NL6601566A (ja)
NL6600184A (ja)
NL6517227A (ja)
BE678482A (ja)
BE675548A (ja)
BE675499A (ja)
BE675433A (ja)
BE675369A (ja)
BE675334A (ja)
BE675318A (ja)
BE675227A (ja)
BE675200A (ja)
BE675035A (ja)