SE308299B - - Google Patents
Info
- Publication number
- SE308299B SE308299B SE2941/60A SE294160A SE308299B SE 308299 B SE308299 B SE 308299B SE 2941/60 A SE2941/60 A SE 2941/60A SE 294160 A SE294160 A SE 294160A SE 308299 B SE308299 B SE 308299B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US801690A US3170859A (en) | 1959-03-25 | 1959-03-25 | Process for the preparation of silicon films |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE308299B true SE308299B (US07860544-20101228-C00003.png) | 1969-02-10 |
Family
ID=25181803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE2941/60A SE308299B (US07860544-20101228-C00003.png) | 1959-03-25 | 1960-03-23 |
Country Status (7)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1288869A (fr) * | 1961-02-15 | 1962-03-30 | Electronique & Physique | Perfectionnements aux méthodes pour la préparation et l'utilisation de composés chimiques, notamment des hydrures, en quantités réglables et dispositifs pour leur mise en application |
| AT268380B (de) * | 1965-01-05 | 1969-02-10 | Egyesuelt Izzolampa | Verfahren zur Herstellung von Halbleitergeräten |
| US3437511A (en) * | 1966-04-07 | 1969-04-08 | Us Air Force | Metal surfaced with boron and coating of silicon,silicon carbide or titanium nitride |
| NL6915771A (US07860544-20101228-C00003.png) * | 1968-10-30 | 1970-05-04 | ||
| FR2555206B1 (fr) * | 1983-11-22 | 1986-05-09 | Thomson Csf | Procede de depot de silicium amorphe par decomposition thermique a basse temperature et dispositif de mise en oeuvre du procede |
| IT1198290B (it) * | 1986-12-02 | 1988-12-21 | Sgs Microelettronica Spa | Metodo di decontaminazione di una camera utilizzata nei processi sotto vuoto di deposizione,attacco o crescita di films di elevata purezza,di particolare applicazione nella tecnologia dei semiconduttori |
| US5190823A (en) * | 1989-07-31 | 1993-03-02 | General Electric Company | Method for improving adhesion of synthetic diamond coatings to substrates |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1489724A (en) * | 1922-04-28 | 1924-04-08 | Gerald L Wendt | Method of producing chemical reactions |
| GB583142A (en) * | 1944-09-29 | 1946-12-10 | Standard Telephones Cables Ltd | Improvements in or relating to coating insulating surfaces with metal |
| US2768061A (en) * | 1953-02-26 | 1956-10-23 | Gen Electric | Hydrogen reduction method and apparatus |
| US2945797A (en) * | 1956-05-12 | 1960-07-19 | Saint Gobain | Manufacture of metals of high purity |
| US2955966A (en) * | 1957-07-03 | 1960-10-11 | Int Standard Electric Corp | Manufacture of semiconductor material |
| US3008897A (en) * | 1959-08-07 | 1961-11-14 | Sinclair Refining Co | Hydrocarbon demetallization process |
-
0
- NL NL249150D patent/NL249150A/xx unknown
-
1959
- 1959-03-25 US US801690A patent/US3170859A/en not_active Expired - Lifetime
-
1960
- 1960-02-25 GB GB6676/60A patent/GB942201A/en not_active Expired
- 1960-03-01 BE BE588164A patent/BE588164A/fr unknown
- 1960-03-03 DE DEM44530A patent/DE1119837B/de active Pending
- 1960-03-23 CH CH326560A patent/CH396854A/de unknown
- 1960-03-23 SE SE2941/60A patent/SE308299B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1119837B (de) | 1961-12-21 |
| NL249150A (US07860544-20101228-C00003.png) | |
| BE588164A (fr) | 1960-06-16 |
| CH396854A (de) | 1965-08-15 |
| US3170859A (en) | 1965-02-23 |
| GB942201A (en) | 1963-11-20 |
