AT268380B - Verfahren zur Herstellung von Halbleitergeräten - Google Patents
Verfahren zur Herstellung von HalbleitergerätenInfo
- Publication number
- AT268380B AT268380B AT2666A AT2666A AT268380B AT 268380 B AT268380 B AT 268380B AT 2666 A AT2666 A AT 2666A AT 2666 A AT2666 A AT 2666A AT 268380 B AT268380 B AT 268380B
- Authority
- AT
- Austria
- Prior art keywords
- semiconductor devices
- manufacturing semiconductor
- manufacturing
- devices
- semiconductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32105—Oxidation of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HUZA000245 | 1965-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT268380B true AT268380B (de) | 1969-02-10 |
Family
ID=11003026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT2666A AT268380B (de) | 1965-01-05 | 1966-01-03 | Verfahren zur Herstellung von Halbleitergeräten |
Country Status (3)
| Country | Link |
|---|---|
| AT (1) | AT268380B (de) |
| DE (1) | DE1639605B1 (de) |
| GB (1) | GB1133709A (de) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE570182A (de) * | 1957-08-07 | 1900-01-01 | ||
| NL249150A (de) * | 1959-03-25 |
-
1966
- 1966-01-03 AT AT2666A patent/AT268380B/de active
- 1966-01-04 GB GB368/66A patent/GB1133709A/en not_active Expired
- 1966-01-04 DE DE19661639605D patent/DE1639605B1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1133709A (en) | 1968-11-13 |
| DE1639605B1 (de) | 1970-07-23 |
| AU6955474A (en) | 1975-12-04 |
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