SE0201239L - Anordning och metod för överföring av ett mönster till ett substrat - Google Patents

Anordning och metod för överföring av ett mönster till ett substrat

Info

Publication number
SE0201239L
SE0201239L SE0201239A SE0201239A SE0201239L SE 0201239 L SE0201239 L SE 0201239L SE 0201239 A SE0201239 A SE 0201239A SE 0201239 A SE0201239 A SE 0201239A SE 0201239 L SE0201239 L SE 0201239L
Authority
SE
Sweden
Prior art keywords
substrate
transferring
pattern
areas
plates
Prior art date
Application number
SE0201239A
Other languages
English (en)
Other versions
SE524563C2 (sv
SE0201239D0 (sv
Inventor
Lennart Olsson
Original Assignee
Obducat Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Obducat Ab filed Critical Obducat Ab
Priority to SE0201239A priority Critical patent/SE524563C2/sv
Publication of SE0201239D0 publication Critical patent/SE0201239D0/sv
Priority to PCT/SE2003/000640 priority patent/WO2003090985A1/en
Priority to DE60328879T priority patent/DE60328879D1/de
Priority to EP03723553A priority patent/EP1497102B1/en
Priority to AU2003230483A priority patent/AU2003230483A1/en
Priority to AT03723553T priority patent/ATE439969T1/de
Priority to US10/512,265 priority patent/US20050172848A1/en
Publication of SE0201239L publication Critical patent/SE0201239L/sv
Publication of SE524563C2 publication Critical patent/SE524563C2/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Composite Materials (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Printing Methods (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
SE0201239A 2002-04-24 2002-04-24 Anordning och metod för överföring av ett mönster till ett substrat SE524563C2 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE0201239A SE524563C2 (sv) 2002-04-24 2002-04-24 Anordning och metod för överföring av ett mönster till ett substrat
PCT/SE2003/000640 WO2003090985A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
DE60328879T DE60328879D1 (de) 2002-04-24 2003-04-23 Vorrichtung und verfahren zum übertragen eines musters auf ein substrat
EP03723553A EP1497102B1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
AU2003230483A AU2003230483A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
AT03723553T ATE439969T1 (de) 2002-04-24 2003-04-23 Vorrichtung und verfahren zum übertragen eines musters auf ein substrat
US10/512,265 US20050172848A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0201239A SE524563C2 (sv) 2002-04-24 2002-04-24 Anordning och metod för överföring av ett mönster till ett substrat

Publications (3)

Publication Number Publication Date
SE0201239D0 SE0201239D0 (sv) 2002-04-24
SE0201239L true SE0201239L (sv) 2003-10-25
SE524563C2 SE524563C2 (sv) 2004-08-24

Family

ID=20287670

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0201239A SE524563C2 (sv) 2002-04-24 2002-04-24 Anordning och metod för överföring av ett mönster till ett substrat

Country Status (1)

Country Link
SE (1) SE524563C2 (sv)

Also Published As

Publication number Publication date
SE524563C2 (sv) 2004-08-24
SE0201239D0 (sv) 2002-04-24

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Legal Events

Date Code Title Description
NUG Patent has lapsed