SE0003073D0 - Method and apparatus for generating X-ray or euv radiation as well as use thereof - Google Patents

Method and apparatus for generating X-ray or euv radiation as well as use thereof

Info

Publication number
SE0003073D0
SE0003073D0 SE0003073A SE0003073A SE0003073D0 SE 0003073 D0 SE0003073 D0 SE 0003073D0 SE 0003073 A SE0003073 A SE 0003073A SE 0003073 A SE0003073 A SE 0003073A SE 0003073 D0 SE0003073 D0 SE 0003073D0
Authority
SE
Sweden
Prior art keywords
jet
radiation
ray
generating
area
Prior art date
Application number
SE0003073A
Other languages
English (en)
Other versions
SE522150C2 (sv
SE0003073L (sv
Inventor
Hans Martin Hertz
Oscar Hemberg
Original Assignee
Jettec Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jettec Ab filed Critical Jettec Ab
Priority to SE0003073A priority Critical patent/SE522150C2/sv
Publication of SE0003073D0 publication Critical patent/SE0003073D0/sv
Priority to EP01952078A priority patent/EP1305984B1/en
Priority to JP2002515466A priority patent/JP5073146B2/ja
Priority to DE60143527T priority patent/DE60143527D1/de
Priority to PCT/SE2001/001646 priority patent/WO2002011499A1/en
Priority to AT01952078T priority patent/ATE489838T1/de
Priority to CNB018163963A priority patent/CN1272989C/zh
Priority to AU2001272873A priority patent/AU2001272873A1/en
Publication of SE0003073L publication Critical patent/SE0003073L/sv
Publication of SE522150C2 publication Critical patent/SE522150C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SE0003073A 2000-07-28 2000-08-31 Förfarande och apparat för alstring av röntgenstrålning samt användning därav SE522150C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE0003073A SE522150C2 (sv) 2000-08-31 2000-08-31 Förfarande och apparat för alstring av röntgenstrålning samt användning därav
EP01952078A EP1305984B1 (en) 2000-07-28 2001-07-18 Method and apparatus for generating x-ray radiation
JP2002515466A JP5073146B2 (ja) 2000-07-28 2001-07-18 Ｘ線発生方法および装置
DE60143527T DE60143527D1 (de) 2000-07-28 2001-07-18 Verfahren und vorrichtung zur erzeugung von röntgenstrahlung
PCT/SE2001/001646 WO2002011499A1 (en) 2000-07-28 2001-07-18 Method and apparatus for generating x-ray or euv radiation
AT01952078T ATE489838T1 (de) 2000-07-28 2001-07-18 Verfahren und vorrichtung zur erzeugung von röntgenstrahlung
CNB018163963A CN1272989C (zh) 2000-07-28 2001-07-18 产生x－光的方法和装置
AU2001272873A AU2001272873A1 (en) 2000-07-28 2001-07-18 Method and apparatus for generating x-ray or euv radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0003073A SE522150C2 (sv) 2000-08-31 2000-08-31 Förfarande och apparat för alstring av röntgenstrålning samt användning därav

Publications (3)

Publication Number Publication Date
SE0003073D0 true SE0003073D0 (sv) 2000-08-31
SE0003073L SE0003073L (sv) 2002-03-01
SE522150C2 SE522150C2 (sv) 2004-01-20

Family

ID=20280843

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0003073A SE522150C2 (sv) 2000-07-28 2000-08-31 Förfarande och apparat för alstring av röntgenstrålning samt användning därav

Country Status (1)

Country Link
SE (1) SE522150C2 (sv)

Also Published As

Publication number Publication date
SE522150C2 (sv) 2004-01-20
SE0003073L (sv) 2002-03-01

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Legal Events

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NUG Patent has lapsed