SA519410188B1 - طريقة لتشكيل هياكل ضوئية ذكية لمراقبة المواد - Google Patents
طريقة لتشكيل هياكل ضوئية ذكية لمراقبة الموادInfo
- Publication number
- SA519410188B1 SA519410188B1 SA519410188A SA519410188A SA519410188B1 SA 519410188 B1 SA519410188 B1 SA 519410188B1 SA 519410188 A SA519410188 A SA 519410188A SA 519410188 A SA519410188 A SA 519410188A SA 519410188 B1 SA519410188 B1 SA 519410188B1
- Authority
- SA
- Saudi Arabia
- Prior art keywords
- photonic structures
- material monitoring
- fabricating
- solid substrate
- deformable layer
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000012544 monitoring process Methods 0.000 title 1
- 239000007787 solid Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 1
- 238000004049 embossing Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/60—Releasing, lubricating or separating agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00769—Producing diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/0094—Condition, form or state of moulded material or of the material to be shaped having particular viscosity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2883/00—Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as mould material
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Micromachines (AREA)
- Laminated Bodies (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/490,566 US10877192B2 (en) | 2017-04-18 | 2017-04-18 | Method of fabricating smart photonic structures for material monitoring |
| PCT/US2018/028103 WO2018195159A1 (en) | 2017-04-18 | 2018-04-18 | Method of fabricating smart photonic structures for material monitoring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SA519410188B1 true SA519410188B1 (ar) | 2022-06-08 |
Family
ID=62143545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SA519410188A SA519410188B1 (ar) | 2017-04-18 | 2019-09-24 | طريقة لتشكيل هياكل ضوئية ذكية لمراقبة المواد |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10877192B2 (https=) |
| EP (1) | EP3612793A1 (https=) |
| JP (1) | JP6946611B2 (https=) |
| KR (1) | KR20200002906A (https=) |
| CN (1) | CN110546454B (https=) |
| SA (1) | SA519410188B1 (https=) |
| SG (1) | SG11201909373RA (https=) |
| WO (1) | WO2018195159A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9816941B2 (en) * | 2016-03-28 | 2017-11-14 | Saudi Arabian Oil Company | Systems and methods for constructing and testing composite photonic structures |
| US11667059B2 (en) * | 2019-01-31 | 2023-06-06 | Meta Platforms Technologies, Llc | Techniques for reducing surface adhesion during demolding in nanoimprint lithography |
| US11852005B2 (en) * | 2021-12-09 | 2023-12-26 | Saudi Arabian Oil Company | Deformation monitoring mechanism with multi-pixel angle-sensitive laser ranging |
| US12305501B2 (en) | 2022-10-31 | 2025-05-20 | Saudi Arabian Oil Company | Distributed fiber sensing in a packer for permanent casing and formation deformation monitoring |
Family Cites Families (81)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85100054B (zh) * | 1985-04-01 | 1986-10-22 | 清华大学 | 用于云纹干涉法的闪耀衍射光栅及试件栅制备工艺 |
| JPS644703A (en) * | 1987-06-27 | 1989-01-09 | Shimadzu Corp | Diffraction grating and its production |
| US4986671A (en) | 1989-04-12 | 1991-01-22 | Luxtron Corporation | Three-parameter optical fiber sensor and system |
| AU634010B2 (en) | 1989-11-28 | 1993-02-11 | Toyo Seikan Kaisha Ltd. | Metallic container equipped with hologram or diffraction grating |
| JP2692599B2 (ja) | 1994-07-27 | 1997-12-17 | 株式会社島津製作所 | レーザー非接触伸び計 |
| US5446286A (en) | 1994-08-11 | 1995-08-29 | Bhargava; Rameshwar N. | Ultra-fast detectors using doped nanocrystal insulators |
| DE69519384T2 (de) | 1994-09-29 | 2001-05-23 | British Telecomm | Optische Faser mit Quantenpunkten |
| US5575878A (en) * | 1994-11-30 | 1996-11-19 | Honeywell Inc. | Method for making surface relief profilers |
| US5682237A (en) | 1995-05-26 | 1997-10-28 | McDonnell Douglas | Fiber strain sensor and system including one intrinsic and one extrinsic fabry-perot interferometer |
| US5861129A (en) | 1995-09-13 | 1999-01-19 | Katoot; Mohammad W. | Polymer optical fibers and process for manufacture thereof |
| US6091872A (en) | 1996-10-29 | 2000-07-18 | Katoot; Mohammad W. | Optical fiber imaging system |
| US8361356B2 (en) * | 2001-06-04 | 2013-01-29 | Sipix Imaging, Inc. | Composition and process for the sealing of microcups in roll-to-roll display manufacturing |
| US6499355B1 (en) | 2001-08-24 | 2002-12-31 | General Electric Company | Elongation and cracking testing and optical characterization of small-size coatings and materials |
| US6460417B1 (en) | 2001-08-24 | 2002-10-08 | General Electric Company | Formability testing of small-size coatings and materials |
| BE1014373A6 (nl) | 2001-09-19 | 2003-09-02 | Voet Marc | Werkwijze en sensor voor het bewaken van een naad. |
| WO2003096123A1 (en) * | 2002-05-08 | 2003-11-20 | Agency For Science, Technology And Research | Reversal imprint technique |
| US7138621B2 (en) | 2002-05-08 | 2006-11-21 | Virginia Tech Intellectual Properties, Inc. | Optical fiber sensors based on pressure-induced temporal periodic variations in refractive index |
| US6833274B2 (en) | 2002-05-28 | 2004-12-21 | The Johns Hopkins University | Cortisol sensor |
| US7095502B2 (en) | 2002-08-06 | 2006-08-22 | Joseph Lakowicz | Optical structures for metal-enhanced sensing |
| FR2846745B1 (fr) | 2002-10-30 | 2004-12-24 | Genewave | Dispositif de support d'elements chromophores. |
| US6854327B2 (en) | 2002-11-06 | 2005-02-15 | Shell Oil Company | Apparatus and method for monitoring compaction |
| US20050205574A1 (en) * | 2002-11-15 | 2005-09-22 | Alexander Lambotte | Water-soluble portion packaging with a filling |
| US20040150827A1 (en) | 2003-02-04 | 2004-08-05 | General Electric Company | Device arrays and methods for operation in aggressive solvents and for measurements of barrier properties of plurality of coatings |
| WO2004078459A1 (en) * | 2003-02-28 | 2004-09-16 | Toray Plastics (America), Inc. | High refractive index coated embossable film and method for producing it |
| US7054513B2 (en) | 2003-06-09 | 2006-05-30 | Virginia Tech Intellectual Properties, Inc. | Optical fiber with quantum dots |
| US8535041B2 (en) | 2006-07-28 | 2013-09-17 | Microcontinuum, Inc. | Addressable flexible patterns |
| EP1635034B1 (en) | 2004-08-27 | 2009-06-03 | Schlumberger Holdings Limited | Pipeline bend radius and shape sensor and measurement apparatus |
| JP2006084885A (ja) * | 2004-09-17 | 2006-03-30 | Shimadzu Corp | レプリカ回折格子の製造方法 |
| GB2421075A (en) | 2004-12-09 | 2006-06-14 | Insensys Ltd | Optical-fibre interstice displacement sensor |
| ATE404853T1 (de) | 2004-12-16 | 2008-08-15 | Insensys Oil & Gas Ltd | Vorrichtung zur überwachung von spannungen in einer verbindung von strukturen |
| US7855046B2 (en) | 2005-04-07 | 2010-12-21 | The University Of North Carolina At Charlotte | Method and apparatus for fabricating shaped structures and shaped structures including one- , two- or three-dimensional patterns incorporated therein |
| US7308163B2 (en) | 2005-05-10 | 2007-12-11 | Hewlett-Packard Development Company, L.P. | Photonic crystal system and method of controlling/detecting direction of radiation propagation using photonic crystal system |
| US7162125B1 (en) * | 2005-06-23 | 2007-01-09 | Sru Biosystems, Inc. | Optimized grating based biosensor and substrate combination |
| US7780912B2 (en) | 2005-08-26 | 2010-08-24 | Lawrence Livermore National Security, Llc | Paint for detection of radiological or chemical agents |
| CN1316227C (zh) | 2005-09-30 | 2007-05-16 | 大连理工大学 | 一种光纤光栅位移传感器 |
| EP1949147B1 (en) | 2005-11-18 | 2012-03-21 | Nanocomp Oy Ltd. | Method of producing a diffraction grating element |
| JP2007139698A (ja) | 2005-11-22 | 2007-06-07 | Mitsubishi Heavy Ind Ltd | 歪センシング用光ファイバ |
| CN100392357C (zh) | 2006-04-21 | 2008-06-04 | 北京交通大学 | 基于双模光子晶体光纤的横向应力传感系统及实现方法 |
| US7957617B2 (en) | 2006-05-11 | 2011-06-07 | President And Fellows Of Harvard College | Methods, materials and devices for light manipulation with oriented molecular assemblies in micronscale photonic circuit elements with High-Q or slow light |
| CN100468008C (zh) | 2006-05-26 | 2009-03-11 | 北京交通大学 | 写有光栅的光子晶体光纤的横向应力传感系统及实现方法 |
| GB0620339D0 (en) | 2006-10-12 | 2006-11-22 | Insensys Ltd | Pressure rod |
| NZ576760A (en) | 2006-11-09 | 2011-10-28 | Univ Illinois | Photonic crystal based biosensor based on a microfluidic device |
| US7489402B2 (en) | 2006-12-04 | 2009-02-10 | Finesse Solutions, Llc | Optical collection geometries for phase fluorimetry |
| US20080144001A1 (en) | 2006-12-15 | 2008-06-19 | Bauke Heeg | Spectral imaging device |
| US7768640B2 (en) | 2007-05-07 | 2010-08-03 | The Board Of Trustees Of The University Of Illinois | Fluorescence detection enhancement using photonic crystal extraction |
| JP5038218B2 (ja) * | 2007-05-15 | 2012-10-03 | キヤノン株式会社 | 3次元フォトニック結晶の製造方法 |
| US7763484B2 (en) * | 2007-06-13 | 2010-07-27 | Sumitomo Electric Industries, Ltd. | Method to form an optical grating and to form a distributed feedback laser diode with the optical grating |
| US8219180B2 (en) | 2007-10-11 | 2012-07-10 | Tufts University | System and method employing fiber optic shape tracking |
| US8135244B1 (en) | 2007-11-14 | 2012-03-13 | The United States Of America As Represented By The United States Deparment Of Energy | Real time measurement of shock pressure |
| WO2009141775A1 (en) | 2008-05-23 | 2009-11-26 | Koninklijke Philips Electronics N.V. | A parametric stereo upmix apparatus, a parametric stereo decoder, a parametric stereo downmix apparatus, a parametric stereo encoder |
| GB0813715D0 (en) | 2008-07-28 | 2008-09-03 | Airbus Uk Ltd | A monitor and a method for measuring oxygen concentration |
| US8384892B2 (en) | 2008-10-03 | 2013-02-26 | Board Of Trustees Of The University Of Illinois | Surface enhanced raman spectroscopy on optical resonator (e.g., photonic crystal) surfaces |
| CN101477304B (zh) | 2008-11-04 | 2011-08-17 | 南京大学 | 在复杂形状表面复制高分辨率纳米结构的压印方法 |
| US20120126458A1 (en) | 2009-05-26 | 2012-05-24 | King William P | Casting microstructures into stiff and durable materials from a flexible and reusable mold |
| JP5592089B2 (ja) | 2009-08-19 | 2014-09-17 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
| EP2488912B1 (en) | 2009-10-12 | 2019-07-24 | The Trustees Of Columbia University In The City Of New York | Waveguide comprising photonic crystal for outcoupling light of specific wavelengths |
| US8344333B2 (en) | 2010-07-08 | 2013-01-01 | The Board Of Trustees Of The University Of Illinois | Multi-color fluorescence enhancement from a photonic crystal surface |
| US20120039357A1 (en) | 2010-08-16 | 2012-02-16 | Marc Levesque | Fiber-optic temperature sensor assembly |
| CA2712880A1 (en) | 2010-08-16 | 2012-02-16 | Institut National D'optique | Fiber-optic temperature sensor assembly |
| JP5760391B2 (ja) * | 2010-11-02 | 2015-08-12 | 旭硝子株式会社 | 回折光学素子及び計測装置 |
| GB201100991D0 (en) | 2011-01-20 | 2011-03-09 | Univ City | Fibre-optic sensor |
| DE102011015141A1 (de) | 2011-03-16 | 2012-09-20 | Carl Zeiss Laser Optics Gmbh | Verfahren zum Herstellen eines reflektiven optischen Bauelements für eine EUV-Projektionsbelichtungsanlage und derartiges Bauelement |
| CN102230834A (zh) | 2011-06-03 | 2011-11-02 | 大连理工大学 | 一种带温度自补偿的光纤光栅索力传感器 |
| JP5331174B2 (ja) * | 2011-08-11 | 2013-10-30 | 株式会社トプコン | 回折格子一体型偏光変換素子 |
| US9170172B2 (en) | 2011-08-23 | 2015-10-27 | The Boeing Company | Composite structure having an embedded sensing system |
| US9086331B2 (en) | 2012-10-23 | 2015-07-21 | The Boeing Company | Optical fiber coupled photonic crystal slab strain sensor system |
| WO2014063843A1 (de) | 2012-10-26 | 2014-05-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensorelement mit einer photonischen kristallanordnung |
| CN103812002A (zh) | 2012-11-07 | 2014-05-21 | 无锡华御信息技术有限公司 | 半导体分布反馈激光器 |
| CN103811998A (zh) | 2012-11-07 | 2014-05-21 | 无锡华御信息技术有限公司 | 分布反馈激光器的制造方法 |
| DK2904058T3 (en) * | 2012-12-21 | 2016-08-22 | Koninklijke Philips Nv | COMPOSITION, IMAGE INK AND METHOD OF PRINTING |
| US20160025584A1 (en) | 2013-01-16 | 2016-01-28 | Omnisens Sa | A sensing cable |
| JP6029502B2 (ja) | 2013-03-19 | 2016-11-24 | 株式会社日立ハイテクノロジーズ | 曲面回折格子の製造方法 |
| US9400353B2 (en) | 2013-04-30 | 2016-07-26 | The Board Of Trustees Of The University Of Illinois | Silicon-based photonic crystal fluorescence enhancement and laser line scanning instrument |
| JP6163892B2 (ja) * | 2013-06-06 | 2017-07-19 | 凸版印刷株式会社 | 微細凹凸回折構造を有する表示体 |
| DE102014203254A1 (de) | 2014-02-24 | 2015-08-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | FRET-Drucksensor zur berührungsfreien Messung von Drücken |
| CN103808441B (zh) | 2014-03-03 | 2016-08-17 | 哈尔滨工业大学 | 一种三维纳米尺度光子晶体力传感器 |
| CA2943254C (en) | 2014-03-24 | 2021-05-04 | Instrumentation Laboratory Company | Bioassay system and method for detecting analytes in body fluids |
| CN203857939U (zh) | 2014-04-30 | 2014-10-01 | 青岛市光电工程技术研究院 | 一种适用于高温环境的管道应变实时检测器及检测系统 |
| CN204115925U (zh) | 2014-08-28 | 2015-01-21 | 天津大学 | 多维应力光子晶体光纤测试装置 |
| JP2016164961A (ja) | 2014-10-30 | 2016-09-08 | キヤノン株式会社 | 液体吐出装置、ナノインプリント装置、ナノインプリント用液体収容タンク、硬化物パターンの製造方法、光学部品の製造方法、回路基板の製造方法、インプリント用モールドの製造方法 |
| CN106291776B (zh) * | 2016-09-07 | 2018-01-30 | 山东科技大学 | 一种基于纳米成型技术的力响应性光子晶体材料的制备方法 |
-
2017
- 2017-04-18 US US15/490,566 patent/US10877192B2/en active Active
-
2018
- 2018-04-18 JP JP2019552982A patent/JP6946611B2/ja not_active Expired - Fee Related
- 2018-04-18 CN CN201880025370.7A patent/CN110546454B/zh not_active Expired - Fee Related
- 2018-04-18 KR KR1020197033546A patent/KR20200002906A/ko not_active Withdrawn
- 2018-04-18 WO PCT/US2018/028103 patent/WO2018195159A1/en not_active Ceased
- 2018-04-18 SG SG11201909373R patent/SG11201909373RA/en unknown
- 2018-04-18 EP EP18723627.8A patent/EP3612793A1/en not_active Withdrawn
-
2019
- 2019-09-24 SA SA519410188A patent/SA519410188B1/ar unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200002906A (ko) | 2020-01-08 |
| US20180299597A1 (en) | 2018-10-18 |
| CN110546454A (zh) | 2019-12-06 |
| EP3612793A1 (en) | 2020-02-26 |
| WO2018195159A1 (en) | 2018-10-25 |
| CN110546454B (zh) | 2021-09-14 |
| SG11201909373RA (en) | 2019-11-28 |
| JP6946611B2 (ja) | 2021-10-06 |
| JP2020517981A (ja) | 2020-06-18 |
| US10877192B2 (en) | 2020-12-29 |
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