CN85100054B - 用于云纹干涉法的闪耀衍射光栅及试件栅制备工艺 - Google Patents
用于云纹干涉法的闪耀衍射光栅及试件栅制备工艺 Download PDFInfo
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Abstract
用于云纹干涉法中的闪耀衍射光栅。本发明属用光学方法和衍射光栅元件测量固体的变形。本发明为用于云纹干涉法中的位相型闪耀衍射光栅。其断面形状为等腰三角形。密度为50~1200线/毫米的平行栅和正交栅。复制在试件表面上形成试件栅。选择等腰三角形的斜面倾角β和光栅节距p,使入射的相干准直光在所需要的m衍射极上进行闪耀,获得最大光强。利用衍射波前的干涉,可以获得代表试件表面的位移场和应变场的高灵敏度、高反差的云纹干涉条纹图。
Description
用于云纹干涉法的闪耀衍射光栅。
本发明是用光学方法和衍射光栅元件测量固体的变形。
五十年代发展起来的以感光制栅技术和两栅叠合的机械干涉理论为基础的传统云纹法是将受力变形的试件栅(或称变形栅)与不变形的基准栅相叠合,发生机械干涉,产生代表试件表面的位移场和应变场的云纹干涉条纹。该方法所采用的光栅是密度为40~50线/毫米的黑白相间的振幅型栅,属低密度栅,其灵敏度较低,仅适用于大变形的测量范围。由于这种光栅衍射效率差,且不具闪耀特性,高阶衍射谱的光强损失和噪声比都很大,因而条纹倍增技术受到了限制。
近代激光和光栅技术及波前干涉理论为基础的云纹干涉法是八十年代发展起来的一种新的实验力学方法。它比传统的云纹法灵敏度提高几十倍乃至百倍,达到波长量级。它突破了传统云纹法的理论和技术。采用高密度(如:600、1200线/毫米)位相型衍射光栅的试件栅,对受力变形的试件栅用单光束、双光束和多光束的准直激光的照射下,利用栅线的衍射波前的干涉,可以获取代表试件表面位移场和应变场的高灵敏度,高反差的云纹干涉条纹。
目前国内外用于云纹干涉法中的光栅是位相型全息衍射光栅。该光栅的波形为正弦形,其衍射效率低,且仍不具闪耀特性,最大光强集中在零级,其±1衍射级光强仍有相当损失,不能充分利用入射光的光强。
针对上述两种光栅存在的问题,发明一种用于云纹干涉法中的波形为等腰三角形的位相型闪耀衍射光栅。该光栅的衍射效率高,且具闪耀特性,它既适应于单光束,双光束和多光束的云纹干涉法及错位云纹干涉法,又可实现条纹倍增。
经国际联网检索国外无此专利
现有技术可参阅:
1.“高灵敏度云纹干涉法-一种简易的方法”D·泡斯特和W·A拜日柯特美国“实验力学”杂志 21(3)1981.3
P·100-104
〔D·Post,and W·A·Baracat,“Highsensitivity Moire Interferometry-A Simplified Approach”EXP·Mech.21(3)P·100-104(March 1981)〕
2.PAT DL-129247
3.PAT GB-1493261
本发明的要点是将位相型闪耀光栅用于云纹干涉法。该光栅的沟槽断面形状为等腰三角形(如图1,2所示)。它是由栅体和基体构成。若栅体为金属反射层(1)和胶层(2)组成,基体材料可为金属或玻璃、塑料、陶瓷等非金属材料,这种光栅称为反射式闪耀衍射光栅(图1)。若栅体为透明胶层(4),基体(3′)为玻璃、透明塑料、石英等透明材料,则此光栅称为透射式闪耀衍射光栅(图2)。上述光栅均可为平行栅和正交网格栅,其栅线密度为50~1200线/毫米。该光栅满足光栅方程式P(sinφ+sinθ)=mλ,式中P为光栅常数,或称栅线节距;λ为准直入射光的波长;φ为光束的入射角;θ为第m衍射级光的衍射角。根据需要选择合适的光栅节距P和等腰三角形的斜面倾角β(见图3)。使对称入射的相干准直光在所需要的±m衍射级进行闪耀,在该衍射级上获得最大光强,且光强比接近于1。
附图1反射式闪耀衍射光栅示意图。
附图2透射式闪耀衍射光栅示意图。
附图3闪耀衍射光栅波形参数及入射光、衍射光示意图。
以下结合附图1、2、3以双光束云纹干涉法为例对发明作进一步的详细描述。
本发明位相型闪耀衍射光栅,其波形断面为等腰三角形。当等腰三角形的斜面倾角β=φ/2=1/2sin-1(mλ/P),且±m衍射级光垂直于光栅表面时,即±m衍射级光的衍射角θ=0,并在该衍射级上进行闪耀,发生干涉,以获得最大光强,且光强比接近于1。能够获得2m倍增的代表构件表面变形的高灵敏度、高反差的云纹干涉条纹图。
采用高密度(即高频)、低衍射级闪耀光栅。如:密度为600线/毫米和1200线/毫米的光栅,±1级闪耀,在双光束照射下,其±1衍射级光发生干涉,所获得的云纹干涉条纹的灵敏度分别相当于1200和2400线/毫米,其入射光的入射角φ分别为22.314°和49.408°,其光栅沟槽斜面倾角β仍分别为11.157°和24.704°。
采用低密度(低频)、高衍射级闪耀光栅。如:密度为50和100线/毫米的光栅,在±12级进行闪耀,即在双光束照射下,其±12级衍射光发生干涉,所获得的云纹干涉条纹的灵敏度分别相当于1200和2400线/毫米。此时,其入射光的入射角φ仍分别为22.314°和49.408°其光栅沟槽斜面倾角β仍分别为11.157°和24.704°。这样,可以采用较低密度闪耀衍射光栅获得相当于4000线/毫米的极限灵敏度。
所发明的闪耀衍射光栅可采用功率较小的激光器而获得足够光强的效果,这为动荷和瞬态量测和现场实测创造了有利条件。目前,该项技术已成为实时观测实验应力分析的有效方法。已应用于断裂力学中裂纹尖端附近的弹塑性位移场和应变场的测定;低周疲劳和复合材料的应变场及残余应力的测量。
Claims (5)
1、一种由栅体和基体构成的光栅,其特征是用于云纹干涉法中的位相型闪耀衍射光栅,其沟槽断面形状为等腰三角形。
2、按照权利要求1所说的光栅,其特征在于该光栅为平行栅,栅线密度为50~1200线/毫米。
3、按照权利要求1所说的光栅,其特征在于该光栅为正交网格栅,栅线密度为50~1200线/毫米。
4、按照权利要求1,2,3所说的光栅,其特征在于所说的光栅是反射式闪耀衍射光栅,栅体为金属反射层(1)和胶层(2)组成,基体(3)为金属材料或玻璃、塑料、陶瓷等非金属材料(图1)。
5、按照权利要求1,2,3所说的光栅,其特征在于该光栅为透射式闪耀衍射光栅,栅体为透明胶层(4),基体(3′)为玻璃、石英、透明塑料等透明材料。
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CN102636332A (zh) * | 2012-04-12 | 2012-08-15 | 科纳技术(苏州)有限公司 | 一种闪耀光栅沟槽微结构变异的测试系统 |
JP6321418B2 (ja) * | 2014-03-20 | 2018-05-09 | スリーエム イノベイティブ プロパティズ カンパニー | シート及び建造物変形評価用物品 |
CN104111040B (zh) * | 2014-06-11 | 2016-08-17 | 华中科技大学 | 一种浮法玻璃波筋在线检测方法 |
WO2017100033A1 (en) | 2015-12-09 | 2017-06-15 | 3M Innovative Properties Company | Optical stack |
US10877192B2 (en) * | 2017-04-18 | 2020-12-29 | Saudi Arabian Oil Company | Method of fabricating smart photonic structures for material monitoring |
WO2019174426A1 (zh) * | 2018-03-12 | 2019-09-19 | Oppo广东移动通信有限公司 | 衍射光学元件及其制造方法、激光投射模组、深度相机与电子装置 |
CN111207673A (zh) * | 2020-01-17 | 2020-05-29 | 中北大学 | 一种基于等腰三角闪耀光栅结构的位移传感器 |
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