RU98123600A - QUARTZ GLASS DETAIL FOR USE IN THE PRODUCTION OF SEMICONDUCTORS - Google Patents

QUARTZ GLASS DETAIL FOR USE IN THE PRODUCTION OF SEMICONDUCTORS

Info

Publication number
RU98123600A
RU98123600A RU98123600/28A RU98123600A RU98123600A RU 98123600 A RU98123600 A RU 98123600A RU 98123600/28 A RU98123600/28 A RU 98123600/28A RU 98123600 A RU98123600 A RU 98123600A RU 98123600 A RU98123600 A RU 98123600A
Authority
RU
Russia
Prior art keywords
quartz glass
structural elements
plane
detail
average
Prior art date
Application number
RU98123600/28A
Other languages
Russian (ru)
Other versions
RU2195045C2 (en
Inventor
Дитмар Хелльманн
Жерар Лебрэн
Йорг БЕККЕР
Original Assignee
Хераеус Кварцглас ГмбХ
Хераеус Квартц С.А.С.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19713014A external-priority patent/DE19713014C2/en
Application filed by Хераеус Кварцглас ГмбХ, Хераеус Квартц С.А.С. filed Critical Хераеус Кварцглас ГмбХ
Publication of RU98123600A publication Critical patent/RU98123600A/en
Application granted granted Critical
Publication of RU2195045C2 publication Critical patent/RU2195045C2/en

Links

Claims (7)

1. Деталь из кварцевого стекла для применения при изготовлении полупроводников, имеющая шершавую поверхность, образованную рельефными структурными элементами, неправильной формы, расположенными между первой, возвышающейся плоскостью и второй, углубленной, плоскостью, при этом множество структурных элементов имеют проходящую в первой плоскости, в основном плоскую верхнюю поверхность, которая со всех сторон ограничена наподобие граней в основном плоскими боковыми поверхностями, которые проходят между первой и второй плоскостями, отличающаяся тем, что средняя глубина Ra неровностей профиля поверхности составляет между 0,1 мкм и 10 мкм, и величина проекции структурных элементов (1) на первую плоскость (2) в среднем находится в диапазоне между 30 мкм и 180 мкм.1. A quartz glass component for use in the manufacture of semiconductors having a rough surface formed by embossed structural elements of irregular shape located between the first, rising plane and the second, recessed plane, with many structural elements passing in the first plane, mainly a flat upper surface that is bounded on all sides like faces by generally flat side surfaces that extend between the first and second planes, different This is due to the fact that the average depth R a of surface profile irregularities is between 0.1 μm and 10 μm, and the projection of structural elements (1) onto the first plane (2) is on average in the range between 30 μm and 180 μm. 2. Деталь из кварцевого стекла по п. 1, отличающаяся тем, что средняя глубина Ra неровностей профиля поверхности составляет между 1 мкм и 5 мкм, и величина проекции структурных элементов (1) на первую плоскость (2) в среднем находится в диапазоне между 50 мкм и 100 мкм.2. A quartz glass component according to claim 1, characterized in that the average depth R a of the surface profile irregularities is between 1 μm and 5 μm, and the projection of the structural elements (1) onto the first plane (2) is on average in the range between 50 microns and 100 microns. 3. Деталь из кварцевого стекла по пп. 1 или 2, отличающаяся тем, что по меньшей мере часть боковых поверхностей (5) выполнена с образованием ступенчатых элементов (7). 3. Detail of quartz glass according to paragraphs. 1 or 2, characterized in that at least part of the side surfaces (5) is formed with the formation of stepped elements (7). 4. Деталь из кварцевого стекла по п. 3, отличающаяся тем, что ступенчатые элементы (7) имеют глубину ступенек в диапазоне от 0,5 мкм до 5 мкм. 4. A quartz glass part according to claim 3, characterized in that the stepped elements (7) have a step depth in the range from 0.5 μm to 5 μm. 5. Деталь из кварцевого стекла по одному из пп. 1-4, отличающаяся тем, что между соседними структурными элементами (1) выполнена канавка (8), которая имеет ширину около 1 мкм. 5. Detail of quartz glass according to one of paragraphs. 1-4, characterized in that between adjacent structural elements (1) a groove (8) is made, which has a width of about 1 μm. 6. Деталь из кварцевого стекла по п. 5, отличающаяся тем, что канавка (8) образована с помощью последовательного расположения друг за другом множества углублений. 6. A quartz glass part according to claim 5, characterized in that the groove (8) is formed by sequentially arranging multiple recesses one after the other. 7. Деталь из кварцевого стекла по одному из пп. 1-6, отличающаяся тем, что структурные элементы (1) выполнены с острыми углами и кромками. 7. Detail of quartz glass according to one of paragraphs. 1-6, characterized in that the structural elements (1) are made with sharp corners and edges.
RU98123600/28A 1997-03-27 1998-03-24 Quartz glass part for semiconductor manufacture RU2195045C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19713014A DE19713014C2 (en) 1997-03-27 1997-03-27 Quartz glass component for use in semiconductor manufacture
DE19713014.3 1997-03-27

Publications (2)

Publication Number Publication Date
RU98123600A true RU98123600A (en) 2000-09-27
RU2195045C2 RU2195045C2 (en) 2002-12-20

Family

ID=7824874

Family Applications (1)

Application Number Title Priority Date Filing Date
RU98123600/28A RU2195045C2 (en) 1997-03-27 1998-03-24 Quartz glass part for semiconductor manufacture

Country Status (11)

Country Link
US (1) US6150006A (en)
EP (1) EP0914676B1 (en)
JP (1) JP3786240B2 (en)
KR (1) KR100507604B1 (en)
CN (1) CN1150346C (en)
AT (1) ATE326065T1 (en)
DE (2) DE19713014C2 (en)
RU (1) RU2195045C2 (en)
SG (1) SG63833A1 (en)
TW (1) TW506950B (en)
WO (1) WO1998044538A2 (en)

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