RU2020110912A3 - - Google Patents
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- RU2020110912A3 RU2020110912A3 RU2020110912A RU2020110912A RU2020110912A3 RU 2020110912 A3 RU2020110912 A3 RU 2020110912A3 RU 2020110912 A RU2020110912 A RU 2020110912A RU 2020110912 A RU2020110912 A RU 2020110912A RU 2020110912 A3 RU2020110912 A3 RU 2020110912A3
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2020110912A RU2745007C2 (ru) | 2020-03-16 | 2020-03-16 | Мембранный датчик давления |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2020110912A RU2745007C2 (ru) | 2020-03-16 | 2020-03-16 | Мембранный датчик давления |
Publications (3)
Publication Number | Publication Date |
---|---|
RU2020110912A RU2020110912A (ru) | 2020-07-10 |
RU2020110912A3 true RU2020110912A3 (ru) | 2020-10-09 |
RU2745007C2 RU2745007C2 (ru) | 2021-03-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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RU2020110912A RU2745007C2 (ru) | 2020-03-16 | 2020-03-16 | Мембранный датчик давления |
Country Status (1)
Country | Link |
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RU (1) | RU2745007C2 (ru) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2134408C1 (ru) * | 1998-06-25 | 1999-08-10 | Акционерное общество закрытого типа "ТИМОС" | Преобразователь давления |
RU2168710C2 (ru) * | 1999-01-25 | 2001-06-10 | Иркутское высшее военное авиационное инженерное училище | Тензорезисторный датчик давления |
US6892582B1 (en) * | 1999-08-20 | 2005-05-17 | Hitachi, Ltd. | Semiconductor pressure sensor and pressure sensing device |
JP4683618B2 (ja) * | 2005-02-10 | 2011-05-18 | キヤノンアネルバ株式会社 | 隔膜型圧力センサ及びその製造方法 |
CN101153825A (zh) * | 2006-09-25 | 2008-04-02 | 中国计量学院 | 硅微机械谐振式微压传感器芯片的结构及制造方法 |
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2020
- 2020-03-16 RU RU2020110912A patent/RU2745007C2/ru active
Also Published As
Publication number | Publication date |
---|---|
RU2020110912A (ru) | 2020-07-10 |
RU2745007C2 (ru) | 2021-03-18 |
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